semi合集-English.pdf - 第3092页

SEMI E123.1-0703 © SEMI 2003 15 NOTICE: SEMI makes no warranties or represen tations as to the suitability o f the standards set forth herein for any particular application . The determinati on of the suitability o f the…

100%1 / 7923
SEMI E123.1-0703 © SEMI 2003 14
Test Equipment Host (Station Control) Handler
RCMD=BIN-UNITS (with
bin list for
multiple sites)
S2,F49
"
!
S2,F50 ACK: BIN-UNITS
Unload units …(UNLOAD
state)
Load next batch of
unts… (LOAD state)
Repeat… until last unit is completed
!
S6,F11 Event:
LastUnitCompleted
(no more units in all
inputs and buffers).
Handler transitions to
READY state.
ACK: Event S6,F12
"
Host/Operator
determines current lot
has more units to
process, loads
remainder of lot onto
Handler Inputs.
RCMD=START
(Host initiated
resume after load is
complete.)
S2,F41
"
!
S2,F42 ACK: START
A
lternatively Operator
can resume directly
from Handler after
loading of units.
Next event to Host
would then be
“UnitsReady” event.
Processing Repeats from top again until all units for lot
is processed …
!
S6,F11 Event:
LastUnitCompleted
Handler again
transitions to READY
state per above.
ACK: Event S6,F12
"
Host/operator
determines lot has
completed.
RCMD=STOP S2,F41
"
!
S2,F42 ACK: STOP
Handler transitions to
STOPPING state and
ultimately to IDLE
state.
SEMI E123.1-0703 © SEMI 2003 15
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer' s instructions, product labels, product data sheets, and other relevant
literature, respecting any materials or equipment mentioned herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor Equipment and Materials International (SEMI) takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E125-0305 © SEMI 2003, 2005 1
SEMI E125-0305
SPECIFICATION FOR EQUIPMENT SELF DESCRIPTION (EqSD)
This specification was technically approved by the Global Information & Control Committee and is the direct
responsibility of the North American Information & Control Committee. Current edition approved by the
North American Regional Standards Committee on August 16, 2004. Initially available at www.semi.org
September 2004; to be published November 2004. Originally published July 2003; previously published July
2004.
NOTICE: The designation of SEMI E125 was updated during the 0305 publishing cycle to reflect the creation of
SEMI E125.1.
Contents
1 Purpose .......................................................................................................................................................................2
1.1 Specification Purpose ..........................................................................................................................................2
2 Scope ..........................................................................................................................................................................2
2.1 In-scope ...............................................................................................................................................................2
2.2 Out of Scope.........................................................................................................................................................2
3 Limitations..................................................................................................................................................................2
3.1 Abstract Model ....................................................................................................................................................2
3.2 Other Limitations.................................................................................................................................................2
4 Referenced Standards .................................................................................................................................................2
4.1 SEMI Standards...................................................................................................................................................2
4.2 ISO Standards......................................................................................................................................................3
4.3 Other Standards...................................................................................................................................................3
5 Terminology ...............................................................................................................................................................3
5.1 Abbreviations and Acronyms...............................................................................................................................3
5.2 Definitions ...........................................................................................................................................................3
6 Conventions................................................................................................................................................................4
6.1 Document and Notation Conventions..................................................................................................................4
6.2 Terms...................................................................................................................................................................5
7 Background.................................................................................................................................................................5
7.1 Motivation............................................................................................................................................................5
8 Overview ....................................................................................................................................................................6
8.1 Equipment Metadata Organization .....................................................................................................................6
8.2 Accessing Equipment Metadata...........................................................................................................................7
9 Interfaces for Managing Equipment Metadata ...........................................................................................................7
9.1 Equipment Metadata Manager............................................................................................................................7
9.2 Metadata Client .................................................................................................................................................12
10 Equipment Metadata...............................................................................................................................................13
10.1 Management of Equipment Metadata..............................................................................................................13
10.2 Equipment Structure........................................................................................................................................13
10.3 Equipment Nodes.............................................................................................................................................13
10.4 Parameters.......................................................................................................................................................15
10.5 Parameter Types..............................................................................................................................................20
10.6 Units ................................................................................................................................................................28
10.7 Exceptions........................................................................................................................................................28
10.8 StateMachines..................................................................................................................................................29
10.9 ObjTypes..........................................................................................................................................................35
11 Requirements for Compliance ................................................................................................................................37
11.1 Compliance to Equipment Self-Description.....................................................................................................37
11.2 Table 55 provides a checklist for Equipment Self Description compliance. ...................................................37