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SEMI E111-0305 © SEMI 2001, 2005 9   Figure 9 Section B-B: Door Only Top View of RSP150 with Reticle Contact Surfaces     Figure 10 Detail D: Reticle Contact Surface

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SEMI E111-0305 © SEMI 2001, 2005 8
Figure 7
Section A-A: Door Only Top View of RSP150
Figure 8
Section C-C: Door Only Side View of RSP150
SEMI E111-0305 © SEMI 2001, 2005 9
Figure 9
Section B-B: Door Only Top View of RSP150 with Reticle Contact Surfaces
Figure 10
Detail D: Reticle Contact Surface
SEMI E111-0305 © SEMI 2001, 2005 10
Figure 11
Exterior Bottom View of RSP150
RFID PLACEMENT ZONE
Figure 12
Detail E: RFID Placement Zone