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SEMI E5-1104 © SEMI 1982, 2004 43 Name Format Description Value s Class DataSetName 20 The name of the Data Se t that was uploaded through S7F37, F39, F41, F43; S15F49, F51 transactions that initi ated Data Set transfer …

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SEMI E5-1104 © SEMI 1982, 2004 42
Table 4 Variable Item Dictionary
Name Format Description Values Class
AlarmID 3(), 5() This variable is valid only upon
the setting or clearing of an alarm
condition and contains the current
alarm identification (ALID),
regardless of whether that alarm is
enabled for reporting
DVVAL
AlarmsEnabled 0 Contains the list of alarms
(ALIDs) enabled for reporting
(via Stream 5)
Structure:
L,n n = # of alarms enabled
1.<ALID
1
>
.
.
n.<ALID
n
>
SV
AlarmsSet 0 Contents of this variable is a list
of alarms (ALIDs) currently in the
UNSAFE (alarm set) state,
regardless of whether the alarms
are enabled for reporting
Structure:
L,n n = # of alarms set
1.<ALID
1
>
.
.
n.<ALID
n
>
SV
ARAMSAccumReset 20 The timestamp of when the set of
accumulators EngTime,
InterruptionCtr, PrdTime,
NSTime, SbyTime, SDTime, and
UDTime were reset to zero. Uses
format defined for CLOCK.
SV
ARAMSInfo 20 Text field set by the equipment to
provide additional information
concerning an ARAMS state
change.
SV
ARAMSState 20 The ARAMS code corresponding
to the current state/substate. Four
characters.
SV
ARAMSText 20 Text describing the ARAMSState.
3–80 characters.
SV
ARAMSTimeStamp 20 The timestamp of the last ARAM
state change. This is a format
requirement only and does not
imply precision or accuracy.
Uses format defined for CLOCK.
SV
CLOCK 20 The value of the equipment’s
internal clock. This is a format
requirement only and does not
imply precision or accuracy.
Format: YYYYMMDDhhmmsscc
YYYY = Year 0000 to 9999
MM = Month 01 to 12
DD = Day 01 to 31
hh = Hour 00 to 23
mm = Minute 00 to 59
ss = Second 00 to 59
cc = centisecond 00 to 99
SV
ControlState 10, 51 This status variable contains the
code which identifies the current
control state of the equipment.
When reported related to a control
state transition, its value should
represent the state current after
the transition.
1 = OFF-LINE/EQUIPMENT OFF-
LINE
2 = OFF-LINE/ATTEMPT ON-LINE
3 = OFF-LINE/HOST OFF-LINE
4 = ON-LINE/LOCAL
5 = ON-LINE/REMOTE
6-63 Reserved
SV
CycleCtr 5() The number of machine cycles
during the lifetime of the
equipment. Non-resettable.
SV
SEMI E5-1104 © SEMI 1982, 2004 43
Name Format Description Values Class
DataSetName 20 The name of the Data Set that was
uploaded through S7F37, F39,
F41, F43; S15F49, F51
transactions that initiated Data Set
transfer of large process programs
and recipes
DVVAL
DowntimeAlarm 3(), 5() Identifier of the last alarm or
exception triggering an
equipment-initiated transition to
UNSCHEDULED DOWNTIME
from the PRODUCTIVE or
STANDBY states
SV
DowntimeAlarmText 20 Text associated with
DowntimeAlarm. 0–80
characters.
SV
DowntimeData 20 Equipment defined data
associated with transitions to, or
within, the SCHEDULED or
UNSCHEDULED DOWNTIME
states. For example, this may be
used to carry fault information,
the component serial number of a
repaired component, or comments
entered at the equipment’s control
panel.
0–256 characters.
SV
EngTime 5() Accumulation of time in
ENGINEERING reported in
minutes
ECV
EqpModel 20 Text string describing the
equipment model. 1–80
characters.
SV
EqpName 20 Text string containing a user-
assigned name for equipment. 1–
80 characters. Information in the
data item EQNAME is a subset of
EqpName.
ECV
EqpSerialNum 20 Text string describing the product
serial number assigned by the
manufacturer. 1–80 characters.
Information in the data item
MDLN is a subset of
EqpSerialNum.
SV
EstablishCommunications-
Timeout
52 The length of time, in seconds, of
the interval between attempts to
send S1F13 when establishing
communications
ECV
EventsEnabled 0 Contains the list of events
(CEIDs) enabled for reporting
(via Stream 6)
Structure:
L,n n = # of events enabled
1.<CEID
1
>
.
.
n.<CEID
n
>
SV
SEMI E5-1104 © SEMI 1982, 2004 44
Name Format Description Values Class
EventLimit 0, 10,
11, 20,
21, 3(),
4(), 5()
Used with the Limits Monitoring
capability, it contains the
LIMITID of the limit reached or
crossed by LimitVariable. Since
multiple zone transitions for a
variable may occur
simultaneously (e.g., due to
identical limit definitions or a
slow data sampling rate),
EventLimit has been defined to
allow for a list of LIMITIDs.
DVVAL
InterruptionCtr 5() The number of transitions to
UNSCHEDULED DOWNTIME
from PRODUCTIVE
ECV
LastPowerdown 20 Timestamp estimate of when the
last powerdown or reset occurred.
Uses format defined for CLOCK.
SV
LimitVariable This variable contains the VID for
the variable whose value changed
monitoring zones
DVVAL
MaxSpoolTransmit 54 The maximum number of
messages which the equipment
will transmit from the spool in
response to an S6,F23 “Transmit
Spooled Messages” request. If
MaxSpoolTransmit is set to zero,
no limit is placed on the messages
sent from the spool. Multi-block
inquire/grant messages are not
counted in this total.
ECV
NSTime 5() Accumulation of time in NON-
SCHEDULED TIME, reported in
minutes
ECV
OperatorCommand 5() This data variable is valid in the
event the operator issues a
command to the equipment. The
codes for this variable are
equipment-dependent.
DVVAL
OverWriteSpool 11 This Equipment Constant is used
to indicate to the equipment either
to overwrite data in the spool area
or to stop spooling whenever the
spool area limits are exceeded
= TRUE to overwrite spooled
data
= FALSE to stop spooling when
limits exceeded
ECV
PowerdownTime 20 This timestamp is periodically
updated based on an interval set
by the user. It is used to
determine the approximate time
that the equipment went down in
the event of a power loss. Uses
format defined for CLOCK.
SV
PowerupState 20 Specifies the powerup ARAMS
state when powerdown occurs
during manufacturing time.
Single text digit.
2 = STANDBY
5 = UNSCHEDULED DOWNTIME
SV