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SEMI E30-1103 © SEMI 1992, 2003 92 GEM Host CMP Equipment (GEM Compliant) Thickness Metrology Post-process Thickness Measurement Equipmen t Constant Send: Time Recip e Parameter Figure A.8.1 CMP Single Wafer “Polishing” …

SEMI E30-1103 © SEMI 1992, 2003

A8.2 Equipment Constants

A8.2.1 Incremental process parameter modification for

process and equipment control can be supported over a

GEM interface by using the Equipment Constants GEM

capability (see Section 4.5). With this capability, each

process parameter (or process parameter at a step) that

can be modified, e.g., for purposes of process control,

is associated with an equipment constant. Using the

Equipment Constant GEM scenarios (see Section 4.5.5)

the host can (1), send process parameters or parameter

modifications, (2), request current values of modifiable

recipe parameters, (3), retrieve name lists of equipment

constants associated with modifiable parameters, and

(4), be informed by the equipment when an operator

changes one of the modifiable process parameters.

A8.2.2 The equipment constants should represent the

actual values of the process parameters with which they

are associated. Depending on the equipment operation

and control application, the equipment constant could

represent the actual value of a process parameter at a

recipe step, or over the entire recipe. The equipment

constants could also be utilized to represent the

differentials of process parameters from nominal

values. However it is important to note that, when

using differential values to relate process parameter

modifications, any loss of synchronization between

equipment and host could result in an incorrect

assessment of the value of a process setpoint by the

host. Note also that, upon system startup, and whenever

the appropriate process parameters are modified, the

equipment constants should also be modified as

necessary to always reflect the (absolute or relative)

values of the associated process parameters.

A8.2.3 In order to maintain synchronization between

equipment and host, it is recommended that equipment

constants associated with recipe parameters be applied

to only override the currently selected and active recipe.

A selected recipe is considered to be active whenever

the equipment is in the “PROCESSING” state and the

recipe is the currently selected recipe (process

program). If multiple recipes are utilized during one

process event, e.g., cluster tool scenario, it is

recommended that separate equipment constants be

utilized for each recipe/process parameter pair.

A8.2.4 Note that timing and traceability issues

associated with utilizing the equipment constants

capability (for process control) are application specific

and beyond the scope of this application note.

Equipment that provides for recipe parameter overrides

though setting of Equipment Contstants should also

provide additional Equipment Constants for the set that

includes the name of the associated process program

and a Boolean variable to enable and disable the

override feature. In addition, the supplier should

document for each parameter: (1), the associated

Equipment Constant, and (2), any restrictions on the

state (active or not) or the recipe in which the parameter

may be modified. Also, since override of the process

setpoints may be provided by a Host controller

application element, it is recommended that the

equipment provide an event report whenever the

associated recipe has been modified.

A8.3 Example

A8.3.1 In the example of Figure A.8.1, a Chemical-

Mechanical Planarizer (CMP) single wafer “polishing”

system includes a GEM compliant planarizer

(equipment), a thickness metrology unit and a (host)

controller. The tool polishes a wafer to a target

thickness. The post-process thickness is measured by

the metrology unit and reported to the host controller.

The controller utilizes a feedback control algorithm to

determine the appropriate polish “time” recipe

parameter for the next wafer. This time should be

reported to the CMP equipment utilizing the

equipment’s GEM interface so that the information can

be utilized for the next wafer processing event.

A8.3.2 The mechanism described in this application

note could be utilized to implement process control as

follows. A settable equipment constant is associated or

“linked” with the “time” parameter on the equipment.

Equipment system documentation indicates the linkage

and the conditions under which the linkage is valid.

When the controller determines an appropriate “time”

parameter value for the next wafer to be polished, it sets

the equipment constant to this value (see Section 4.5).

The equipment is configured to accept this equipment

constant change and, if the equipment is in (or possibly

when the equipment reaches) the appropriate state, the

recipe parameter is modified.

SEMI E30-1103 © SEMI 1992, 2003

GEM Host

CMP

Equipment

(GEM Compliant)

Thickness

Metrology

Post-process Thickness

Measurement

Equipment Constant

Send: Time Recipe Parameter

Figure A.8.1

CMP Single Wafer “Polishing” System with Host Recipe Parameter Modification Capability

NOTICE: These standards do not purport to address

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Index

ABORT .........................................................................................................................................................14, 17, 36

AbortLevel.................................................................................................................................................................36

alarm................................................................................................................5, 17, 21, 31, 32, 33, 34, 35, 50, 62, 73

ALARM CLEAR.................................................................................................................................................32, 33

Alarm Management.......................................................................................................................1, 17, 31, 63, 67, 69

Alarm Report...........................................................................................................................................31, 34, 35, 65

ALARM SET.................................................................................................................................................31, 32, 33

alarm text...................................................................................................................................................................34

Alarm Text.................................................................................................................................................................34

AlarmID...............................................................................................................................................................62, 63

AlarmsEnabled ........................................................................................................................................31, 34, 62, 67

AlarmsSet ....................................................................................................................................31, 33, 34, 62, 63, 67

ALCD ............................................................................................................................................................31, 34, 62

ALCD

......................................................................................................................................................................33

ALID .......................................................................................................................................................32, 34, 62, 73

ALIDn ...................................................................................................................................................................1, 32

ALTX ..................................................................................................................................................................32, 34

Anytime Capabilities .............................................................................................................................................2, 71

button...................................................................................................................................................................45, 72

Button ........................................................................................................................................................................72

buttons ...................................................................................................................................................................5, 72

Buttons...................................................................................................................................................................2, 72

CEID..........................................................................................................................21, 26, 27, 28, 39, 41, 62, 63, 78

clock ..............................................................................................................................................................24, 50, 71

Clock .......................................................................................................................................1, 18, 50, 62, 63, 67, 69

COMMACK..................................................................................................................................8, 10, 11, 18, 19, 20

CommDelay.....................................................................................................................................................8, 10, 11

COMMUNICATING ......................................................................................9, 10, 11, 12, 18, 19, 20, 52, 53, 55, 72

communication failure.........................................................................................................5, 8, 10, 11, 15, 47, 52, 54

Communication failure..............................................................................................................................................11

communication fault........................................................................................................................................5, 10, 47

Communication Fault ..........................................................................................................................................47, 49

communication link.....................................................................................................................................................8

communications failure .........................................................................................................................................8, 55

compliance.............................................................................................................................................5, 6, 67, 68, 78

Compliance................................................................................................................................1, 2, 4, 5, 6, 67, 68, 69

Compliance Statement...............................................................................................................................................68

COMPLIANCE STATEMENT ................................................................................................................................69

compliant.............................................................................................................................................................68, 69

Compliant ..................................................................................................................................................................68

COMPLIANT............................................................................................................................................................69

connection transaction failure......................................................................................................................8, 9, 10, 18

Connection transaction failure...................................................................................................................................11

control......................................................................................4, 5, 6, 7, 12, 14, 25, 31, 35, 39, 54, 58, 59, 62, 76, 77

Control.........................................................................1, 2, 3, 5, 12, 15, 18, 26, 58, 59, 60, 61, 63, 64, 67, 68, 69, 76

CONTROL ....................................................................................................................1, 3, 12, 13, 14, 15, 58, 59, 76