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SEMI E109-0305 © SEMI 2001, 2005 59 Variable Name Descripti on Type Access Comment BufferPartitionInfo i The related information for the i th buffer partition. Structure of 4 items PartitionID i PartitionType i AvailPart…

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SEMI E109-0305 © SEMI 2001, 2005 58
20.9.2 Data required to be available for this event
ReticleID
20.10 ReticleTransferJob Complete Event
20.10.1 An event shall be generated whenever a ReticleTransferJob completes.
20.10.2 Data required to available for this event:
PodID
21 Variable Data
21.1 The purpose of this section is to define the list of variable data requirements for RPMS equipment. Values of
these variables are available to the host via collection event reports and host status queries. Some of the data items
listed are valid for internal buffer production equipment only, and are marked as such.
21.2 Variable Data Definitions
21.2.1 The following table defines variable data that shall be provided by the production equipment. Also, for the
objects defined by Reticle and Pod Management, the identifier of that object and all of the attributes of that object
shall be available for inclusion in event reports associated with that object. Subscripted variables are used either as
items within a list or to differentiate data representing different entities. Subscripted variables are always valid.
Table 56 Variable Data Definitions
Variable Name Description Type Access Comment
AccessMode
i
The access mode for the i
th
load port.
Enumerated:
MANUAL,
AUTO
RO
AlarmInfo The number of the error
ocurring.
List of 2 items
1. Alarm number
2. Alarm description
RO The supplier is free to add
additional errors beyond what
is defined in the Alarm
Information table, but the
support for alarms defined in
that table are required
#1
.
AvailPartitionCapacity The current available buffer
capacity for a logical
partition inside internal
buffer equipment
(PartitionCapacity # of
pods in partition).
Positive integer RO Only applicable to internal
buffer production equipment.
AvailPartitionCapacity
i
The AvailPartitionCapacity
for the i
th
PartitionID within
the internal buffer.
Positive integer RO Only applicable to internal
buffer production equipment.
BufferCapacityList The current PartitionType,
AvailPartitionCapacity, and
PartitionCapacity for all
logical buffer partitions.
List of n groups of items
1. BufferPartitionInfo
1
.
.
n. BufferPartitionInfo
n
RO Only applicable to internal
buffer production equipment.
BufferPartitionInfo The related information for a
logical buffer partition.
Structure of 4 items
PartitionID
PartitionType
AvailPartitionCapacity
PartitionCapacity
RO Only applicable to internal
buffer production equipment.
SEMI E109-0305 © SEMI 2001, 2005 59
Variable Name Description Type Access Comment
BufferPartitionInfo
i
The related information for
the i
th
buffer partition.
Structure of 4 items
PartitionID
i
PartitionType
i
AvailPartitionCapacity
i
PartitionCapacity
i
RO Only applicable to internal
buffer production equipment.
BypassReadID Enables or disables automatic
ID acceptance when the
PodID reader is unavailable.
Boolean RW If TRUE, the ID provided
with Bind is used
automatically.
PodID The ID of the pod. Text RO
PodID
I
The PodID at the i
th
locationID.
Text RO
PodLocationMatrix A list all the pods at/in the
equipment. Both internal to
the equipment, and on
equipment load ports.
List of n pairs of items
1. LocationID
1
PodID
1
.
.
n. LocationID
n
PodID
n
RO The PodID
i
shall be null if
there is no pod at the
locationID
i
. If a pod is at
LocationID
i
, but the PodID
i
is
not known, the value of
PodID
i
shall be
“UNKNOWN”.
LocationID The ID of a pod location. Text RO Pod locations are any location
at/in the production equipment
where a pod may rest.
LocationID
i
The LocationID
of the i
th
pod
location.
Text RO Pod locations are any location
at/in the production equipment
where a pod may rest.
PartitionCapacity The total PartitionCapacity
for a logical internal buffer
partition.
Positive integer RO Only applicable to internal
buffer production equipment.
PartitionCapacity
i
The PartitionCapacity for the
i
th
PartitionID of the internal
buffer.
Positive integer RO Only applicable to internal
buffer production equipment.
PartitionID The ID of a logical internal
buffer partition.
Text RO Used to identify separate
material types in an internal
buffer.
PartitionID
i
The ID of the i
th
logical
partition of the internal
buffer.
Text RO Used to identify separate
material types in an internal
buffer.
PartitionType The type of a logical partition
within an internal buffer.
Text RO Only applicable to internal
buffer production equipment.
Some examples of logical
buffer PartitionType are
Product, Dummy, Substrate,
and Seed.
PartitionType
i
The PartitionType
corresponding with the i
th
PartitionID.
Text RO Only applicable to internal
buffer production equipment.
Some examples of logical
buffer PartitionType are
Product, Dummy, Substrate,
and Seed.
PortAssociationState The association state of a
load port.
Enumerated:
ASSOCIATED,
NOT ASSOCIATED
RO
SEMI E109-0305 © SEMI 2001, 2005 60
Variable Name Description Type Access Comment
PortAssociationState
i
The association state of the i
th
load port.
Enumerated:
ASSOCIATED,
NOT ASSOCIATED
RO
PortAssociationState-
List
The current association state
for all load ports.
A list of n items
1. PortAssociationState
1
.
.
n. PortAssociationState
n
RO This can be used to re-
synchronize the host.
PortID ID of a load port. Positive integer RO
PortID
I
ID of the load port where the
pod transfer is taking place.
One PortID exists for each
load port.
Positive integer RO
PortStateInfo The PortAssociationState
combined with the
PortTransferState.
List of 2 items
PortAssociationState
PortTransferState
RO A combination of both port
states.
PortStateInfo
i
The PortAssociationState
combined with the
PortTransferState for the i
th
load port.
List of 2 items
PortAssociationState
i
PortTransferState
i
RO A combination of both port
states.
PortStateInfoList List of PortStateInfo for all
load ports.
List of n items
1. PortStateInfo
1
.
.
n PortStateInfo
n
RO A list of all the port states for
all the ports.
PortTransferState The current transfer state of a
load port.
Enumerated:
OUT OF SERVICE,
TRANSFER BLOCKED,
READY TO LOAD, READY
TO UNLOAD
RO Super states are not included,
only sub states.
PortTransferState
i
The current transfer state of
the i
th
load port.
Enumerated:
OUT OF SERVICE,
TRANSFER BLOCKED,
READY TO LOAD, READY
TO UNLOAD
RO Super states are not included,
only sub states.
PortTransferStateList The current Load Port
Transfer State for all load
ports.
A list of n items
1. PortTransferState
1
.
.
n. PortTransferState
n
RO This can be used to re-
synchronize the host.
Reason The reason for transition 15,
SLOT MAP NOT READ to
WAITING FOR HOST.
Enumerated:
VERIFICATION NEEDED,
VERIFICATION BY
EQUIPMENT
UNSUCCESSFUL,
READ FAIL,
IMPROPER WAFER
POSITION
RO Information to aid host in
deciding appropriate action.