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SEMI D17-0200 © SEMI 1998, 2000 14 A P PENDIX 1 NOT E: T he mate rial in this appendix is an offic ial par t of SEMI D 1 7 and was approv ed by full le tter ballot proce dures on Decem ber 15, 1999 by the North Am erican…

SEMI D17-0200 © SEMI 1998, 200013

Figure 7

Cassette Physical Alignment Interface – Type B

Roller Shape

SEMI D17-0200 © SEMI 1998, 2000 14

APPENDIX 1

NOTE: The material in this appendix is an official part of SEMI D17 and was approved by full letter ballot procedures on

December 15, 1999 by the North American Regional Standards Committee. Determination of the suitability of the material

herein is solely the responsibility of the user.

A1-1 Application Notes

A1-1.1 The shape of the teeth holding the substrates is not specified in this standard. The tooth surface that touches

the substrate should have a large radius to minimize stress on the substrate and tooth.

A1-1.2 Extra clearance (larger than the pitch) has been added below the bottom substrate (for non-random

sequential access to the substrates with a faster or less precise robot). To increase the stability of Type A Cassettes,

the points on the cassette bottom that are the most distant from the lines connecting each pair of coupling pins

should be made as close as practical to the horizontal datum plane so that the cassette cannot tip very far off of the

kinematic coupling.

NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for

any particular application. The determination of the suitability of the standard is solely the responsibility of the user.

Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant

literature respecting any materials mentioned herein. These standards are subject to change without notice.

The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted

material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position

respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this

standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and

the risk of infringement of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI D18-0299

SPECIFICATION FOR CASSETTES USED FOR HORIZONTAL

TRANSPORT AND STORAGE OF FLAT PANEL DISPLAY

SUBSTRATES

This specification was technically approved by the Flat Panel Display Equipment Committee and is the direct

responsibility of the North American Flat Panel Display Committee. Current edition approved by the North

American Regional Standards Committee on August 15, 1998. Initially available at www.semi.org

September 1998; to be published February 1999.

This document was editorially modified in October 2000 to correct a formatting error. Changes were made

to Figure 5.

1 Purpose

1.1 This standard specifies the cassettes used to

horizontally transport and store glass substrates 0.7

mm-1.1 mm thick (max) in a flat panel display (FPD)

manufacturing facility.

2 Scope

2.1 This standard is intended to set an appropriate

level of specification that places minimal limits on

innovation while ensuring modularity and inter-

changeability at all mechanical interfaces. Most of the

requirements given in this specification are in the form

of algebraic expressions defining maximum or

minimum dimensions referenced from the length and

width of the intended substrate with very few required

surfaces. Only the mechanical interfaces for cassettes

are specified; no materials requirements or micro-

contamination limits are given. However, this standard

has been written so that cassettes of various designs and

materials can be manufactured in conformance with it.

3 Referenced Standards

NOTE: As listed or revised, all documents cited shall be the

latest publications of adopted standards.

3.1 SEMI Standards

SEMI D3 — Quality Area Specification for Flat Panel

Display Substrates

SEMI D5 — Standard Size for Flat Panel Display

Substrates

SEMI D6 — Standard Edge Length and Thickness for

Flat Panel Display Mask Substrates

SEMI D9 —Definitions for Flat Panel Display

Substrates

SEMI D11 — Specification for Flat Panel Display

Glass Substrate Cassettes

SEMI D21 — Terminology for Flat Panel Display

Masks

SEMI E15 — Specification for Tool Load Port

SEMI E44 — Guide for Procurement and Acceptance

of Minienvironments

4 Terminology

4.1 bilateral datum plane — a vertical plane that

equally bisects the substrate and that is perpendicular to

both the horizontal and facial datum planes.

4.2 carrier capacity — the number of substrates that a

carrier holds.

4.3 cassette — (as defined in SEMI E44)

4.4 cassette bottom domain — volume (below z4

above the horizontal datum plane) that contains the

bottom of the cassette.

4.5 cassette bottom opening — an opening through the

cassette bottom domain that provides access to the glass

substrates for external roller drive mechanisms to move

substrates into/from the cassette.

4.6 cassette front — the area between the cassette top

and bottom domains through which substrates pass

during loading and unloading.

4.7 cassette rear — the area between the cassette top

and bottom domains opposite the cassette front.

4.8 cassette rear domains — volumes (from z4 above

the horizontal datum plane to z9 above the top

substrate) that contain rear columns which prevent the

substrates from exiting the cassette rear.

4.9 cassette placement sensing pads — surfaces on the

bottom of the cassette for triggering optical or

mechanical sensors.

4.10 cassette side domains — volumes (from z4 above

the horizontal datum plane to z9 above the top

substrate) that contain the mizo teeth and mizo plates

that support the substrates.