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SEMI E19-0697 © SEMI 1991, 2002 2 6.1.4 guide rail — a c omponent of a port pl ate that provides coars e location for placi ng the box on the port assembly. 6.1.5 latch cavities — spaces located in the port assembly guid…
SEMI E19-0697 © SEMI 1991, 2002 1
SEMI E19-0697 (Reapproved 0702)
STANDARD MECHANICAL INTERFACE (SMIF)
This standard was technically approved by the Global Physical Interfaces & Carriers Committee and is the
direct responsibility of the North American Physical Interfaces & Carriers Committee. Current edition
approved by the North American Regional Standards Committee on March 17, 2002. Initially available at
www.semi.org June 2002, to be published July 2002. Originally published in 1991; previously published June
1997.
NOTE: This standard has been purposely restricted to 100
mm (4 in.), 125 mm (5 in.), and 150 mm (6 in.) versions of
the SMIF port. This has been done to establish a base for
SMIF port standardization. Aspects of the 200 mm (8 in.)
version have been negotiated by interested parties and
published as SEMI E19.4.
1 Purpose
1.1 A standard interface is required for containers
intended to control the transport environment of
cassettes containing wafers or disks. The interface must
address the proper container orientation for material
transfer and maintain continuity between the container
and equipment environment in order to control
particulate matter.
2 Scope
2.1 This specification describes one approach to
interfacing a clean cassette transport box to a clean
environmental housing on a piece of semiconductor
processing equipment or to other clean environments.
The system concept involves mating a door on a
cassette container to a door on an equipment canopy
and transferring the cassette into, and out of, the
equipment without exposing the cassette and wafers to
outside contamination.
2.2 This standard does not purport to address safety
issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety health practices and determine the
applicability or regulatory limitations prior to use.
3 Impact
3.1 The incorporation of this standard requires
equipment designers to include the features of the
interface into the tool design. Spacing between open
cassette ports is inadequate for incorporation of this
interface. Designers are directed to the
recommendations made in SEMI E15 in this regard.
4 Limitations
4.1 This standard is specific to the size of the
designated wafer and references the appropriate SEMI
cassette and wafer diameter. A single numerical suffix
is assigned to this base standard number or each wafer
diameter. This specification focuses on applications in
which the interface port is positioned horizontally. The
standard is focused exclusively on the box-to-canopy
interface. Other considerations of box and equipment
design are purposely excluded.
NOTE 1: Hewlett-Packard has stated that it is seeking patent
coverage for this design and is offering non-exclusive licenses
on an equal basis to any company. Companies intending to
manufacture products to this standard should be aware of
Hewlett-Packard’s position.
NOTE 2: The user’s attention is called to the possibility that
compliance with this standard may require use of an invention
covered by patent rights. By publication of this standard,
Semiconductor Equipment and Materials International
(SEMI) takes no position with respect to the validity of any
patent rights asserted in connection with any item mentioned
in this document. Users of this document are expressly
advised that determination of any such patent rights and the
risk of infringement of such rights are entirely their own
responsibility.
5 Referenced Standards
5.1 SEMI Standards
SEMI E1 — Specification for 3 inch, 100 mm, 125
mm, and 150 mm Plastic and Metal Wafer Carriers
SEMI E15 — Specification for Tool Load Port
6 Terminology
(See Figure 1 for a pictorial depiction of most terms.)
6.1 Definitions
6.1.1 box — an environmentally controlled enclosure
for a cassette containing wafers or disks. For purposes
of this standard, a box has features that conform to the
specified interface. A box includes a box door and box
latches. (A box is also referred to as a container.)
6.1.2 box door — a removable bottom for the box that
contains a means (such as registration holes) for
properly positioning the wafer cassette.
6.1.3 box latches — mechanical latches that hold the
box door in position until activated by the latch pins.
Upon activation, a portion of each box latch engages a
latch cavity and smaller, thereby locking the box to the
port plate.
SEMI E19-0697 © SEMI 1991, 2002 2
6.1.4 guide rail — a component of a port plate that
provides coarse location for placing the box on the port
assembly.
6.1.5 latch cavities — spaces located in the port
assembly guide rails that accommodate the box latches
in the open position of the box door.
6.1.6 latch pins — pins that engage the box latches
and accomplish the lock/unlock functions. Latch pins
are on the port plate.
6.1.7 port — a port assembly appropriately sized for
the wafers or disks that are to be transferred. Three port
sizes are specified for the purposes of this standard: 100
mm (4 in.) for 100 mm (4 in.) wafer cassettes, 125 mm
(5 in.) for 125 mm (5 in.) wafer cassettes, and 150 mm
(6 in.) for 150 mm (6 in.) wafer cassettes.
6.1.8 port assembly — an assembly of the port plate
and port door that includes the guide rails, registration
pins, latch pins, and latch cavities.
6.1.9 port door — a door for the port plate opening
that provides a mating surface for the bottom of the box
door when the box is in place on the port plate. The port
door contains the registration pins.
6.1.10 port plate — a horizontal mating surface for the
base of the box that provides a seal surface to the
bottom surface of the box perimeter. The port plate
contains the guide rails and the latch pins.
6.1.11 registration holes — holes in the bottom of the
box door that fit over registration pins in the top of the
port door when the box is placed on the port door.
6.1.12 registration pins — pins that provide fixed
position and orientation between the port door and box
door and assist in final positioning of the box on the
port assembly. The registration pins fit into the
registration holes in the bottom of the box door.
7 Requirements
7.1 Cassette Sizes — The requirements and
dimensions for the design of mechanical interface
standard ports and boxes are given in this section. All
dimensions of the interface between box and port are
specified in reference to the port. Different sets of port
dimensions are standardized to accommodate the
following three cassette sizes:
100 mm (4 in.) per SEMI E1.2
125 mm (5 in.) per SEMI E1.3 and E.4
150 mm (6 in.) per SEMI E1.5
7.2 Port Design Requirements — The general design
of the port is shown in Figures 2 and 3. Specific
dimensions for the different cassette sizes are given in
SEMI E19.1, SEMI E19.2, and SEMI E19.3. Design
requirements for the interface components are provided
in Sections 7.2.1 through 7.2.5. The general design of
the port is shown in Figures 2 and 3. Specific
dimensions for the different cassette sizes are given in
SEMI E19.1, SEMI E19.2, and SEMI E19.3. Design
requirements for the interface components are provided
in Sections 7.2.1 through 7.2.5.
7.2.1 Port Door — Dimensions A1 through A3
specify the port door top view. The gap between port
door and port plate is not specified, but should be kept
to a minimum distance to restrict particle movement.
7.2.2 Guide Rails — The inside distance of the guide
rails on the four sides of the port is specified (B1 and
B2). The guide rail can be continuous or in sections. If
connected at the corners, the inside radius shall not
exceed B9. The maximum height of the rail is given by
B5. The guide rails include cavities. Two cavities are
provided for the 100 mm (4 in.) port size or four
cavities for the the 125 mm (5 in.) and 150 mm (6 in.)
port sizes.
7.2.3 Latch Pins — The 100 mm (4 in.) port requires
two latch pins (C5), located on the port center line at a
distance specified by C1 in the unactivated position.
The 125 mm (5 in.) and 150 mm (6 in.) ports require
four latch pins, positioned by C1 and C3. The
displacement to move the latch pins from the
unactivated (box door closed) to the activated (box door
unlatched) position is specified by the linear dimension
C2 . The minimum available force per pin to unlatch
and latch the box door is specified by F1 and F2. The
latch pins can move in a linear or circular motion as
long as the position of the activated pins falls within the
target area dimensioned by C8.
7.2.4 Registration Pins — The three registration pins
on the port door are located asymmetrically, and spaced
by dimensions D1 through D4. The size of the pins is
specified by D5 through D7.
7.2.5 The Box — The bottom surfaces of the box body
and box door shall conform to the specified port
dimensions. The upper part of the box body and top
surface of the box door must fit and hold in place the
wafer cassette specified by SEMI E1, for 100 mm (4
in.), 125 mm (5 in.), and 150 mm (6 in.) cassettes.
Although the box dimensions are not explicitly
specified by this standard, the following requirements
apply:
7.2.5.1 The bottom surface of the box door at its
perimeter shall match the dimensions of the port door
top (A1 through A3). The tolerances shall be chosen so
that the box door does not extend over the port door in
any instance, even when the port door is built to its
minimal acceptable dimensions and potential variance
SEMI E19-0697 © SEMI 1991, 2002 3
between registration pins and holes is considered. This
is to ensure interference free passage of the box door
through the port opening.
7.2.5.2 The base of the box body shall fit freely but
with close tolerance between the guide rails (B1, B2,
and B9), which not only hold the box in place while the
port is open, but also provide proper alignment for the
closure of the box at the end of the open/shut cycle.
7.2.5.3 The bottom surface of the box requires three
registration holes to engage with the registration pins on
the port. The registration pins shall be positioned in the
door bottom so that the registration pins prevent seating
of the box with the port in the event that the box is
improperly rotated by 180 degrees from the correct
orientation. The correct orientation is illustrated in
Figure 2.
7.2.5.4 The perimeter of the bottom surface of the box
body shall be continuous (except possibly at the latch
locations) and shall be positioned against the port
surface. This positioning assures the activation of an
optional limit switch placed in an unspecified location
along the port perimeter for the sensing of proper box
placement.
7.2.5.5 Each box door latch requires a hole to engage
its corresponding port latch pin. The hole shall be
elongated to provide a target area for the activated pin
(box door open) as shown by dimension C8. A
protrusion from each latch shall engage with its
corresponding cavity in the guide rail to prevent the
removal of the box while the port is open.
7.2.5.6 The center of the cassette crossbar shall
coincide with the center of the box door, with the
cassette orientated as shown in Figure 2. The top
surface of the box door requires registration bars that
hold the cassette in place. The horizontal cassette
movement is limited by the tolerances G2. The vertical
position of the cassette while located on the box door is
specified by the distance G1 between the top of the port
surface and the bottom surface of the cassette.
7.2.5.7 The external top of the box shall not exceed
the top of the cassette by more than two inches. This is
to prevent possible interference between the box and
the equipment.
8 References
The following articles describe the standard mechanical
interface concept:
8.1 “The Challenge to Control Contamination: A
Novel Technique for the IC Process,” The Journal of
Environmental Sciences (May/June 1984) , page 23.
8.2 “SMIF, A Technology for Wafer Cassette Transfer
in VLSI Manufacturing,” Solid State Technology (July
1984), page 111.