semi合集-English.pdf - 第668页
SEMI E85-0705 © SEMI 1999, 2005 22 A4 200 mm A10 130 mm A5 312 mm A11 112 mm A7 60 mm Figure 14 AMHS Interbay Loadport Opti on C’
SEMI E85-0705 © SEMI 1999, 2005 21
Option A
Option C
Over the Rail Type
Option C
Suspended Type
Stocker
Transport
vehicle
C
5
HDP is
inclined
T
3
HDP is inclined
Stocker
H
2
C
3
A
A
BDP is inclined
Stocker
Transport
vehicle
H
4
HDP is
inclined
C
5
D
10
H
2
T
3
BDP is inclined
BDP is inclined
A
A
A
A
NOTE: The cross section views (A-A) of the exclusion volumes are the same as the views shown in the FOUP
Figures 19.
Figure 13
Views Illustrating Open Cassette Options
SEMI E85-0705 © SEMI 1999, 2005 22
A4 200 mm A10 130 mm
A5 312 mm A11 112 mm
A7 60 mm
Figure 14
AMHS Interbay Loadport Option C’
SEMI E85-0705 © SEMI 1999, 2005 23
A4 200 mm A10 130 mm
A5 312 mm A11 112 mm
A7 60 mm
Figure 15
AMHS Interbay Loadport Option D’