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SEMI E26-92 © SEMI 1992, 2004 6 Figure R1-1 Example of Nonradial Cluster Tool Applicability Figure R1-2 Reach Space and Footprint Restrictions NOTICE: SEMI makes no warranties or representations as to the suitab ility of…
SEMI E26-92 © SEMI 1992, 2004 5
R1-7.2 Dependence on L — A transport module side
length (L) greater than the minimum value of 420.0 mm
will result in a larger restricted area by increasing the
half widths A
M
, A
R
, and a
beyond their respective
minimum values of 457.5 mm, 360.0 mm, and
10×cos[/2] mm (see Table 2).
R1-7.3 Restricted Area Temporary Residence —
Equipment such as roll-out drawers or swing-out
equipment may temporarily reside in the restricted area
(see Section 4.2).
R1-8 Restriction on Alpha
R1-8.1 The maximum value of alpha was based on an
N = 4 ( = 90º) regular polygon transport module
design (see Section 4.3).
R1-8.2 In order for a module manufacturer to
adequately design for access, some knowledge of the
adjacent modules must be available. This can be done
by setting a minimum value for alpha, which then
defines the adjacent footprint leading to the most
stringent "half" access area. For the purposes of the
standard, the minimum value of alpha was based on an
N = 10 ( = 36º) regular polygon transport module (see
Figure R1-2).
R1-9 Module Connect and Disconnect
R1-9.1 The number of components and the degree of
complexity at the interfaces of a radial cluster tool are
high. To ensure non-interference between modules, the
concept of an impenetrable wall at the interface plane
and adjacent module footprints should be used. Within
this area, requirements for module connect and
disconnect are the responsibility of the module
manufacturer (see Section 4.4).
Table R1-1 Module Footprint Dimensions and Transport Module Handler Extensions*
α(degrees)
a
α
(mm)
W1(mm) W2(mm) X1(mm) X2(mm) X3(mm) X4(mm) TMHE**(mm)
90 (N=4) 7.1 852.5 1234.4 226.3 725.4 916.3 1054.2 515.0
84 7.4 828.2 1188.6 237.8 764.7 965.4 1111.1 538.2
78 7.8 802.8 1142.6 248.7 808.4 1018.2 1173.1 564.3
72 (N=5) 8.1 776.2 1093.6 258.9 857.6 1076.0 1241.9 594.0
66 8.4 748.6 1042.7 268.4 914.0 1140.4 1319.4 628.4
60 (N=6) 8.7 720.0 990.0 277.1 979.8 1213.6 1408.6 668.7
56 8.8 700.5 954.0 282.5 1030.6 1269.0 1476.6 700.0
51.428 (N=7) 9.0 677.7 912.0 288.3 1097.3 1340.5 1585.2 741.1
48 9.1 660.3 879.8 292.3 1155.0 1401.6 1641.3 776.7
45 (N=8) 9.2 644.9 851.6 295.6 1212.2 1461.7 1716.5 812.0
42 9.3 629.4 822.9 298.7 1277.2 1529.3 1801.4 852.1
40 (N=9) 9.4 618.9 803.6 300.7 1325.8 1579.5 1864.6 882.0
38 9.5 608.4 794.2 302.6 1379.3 1634.5 1834.0 914.9
36 (N=10) 9.5 597.8 764.6 304.3 1438.5 1695.3 2010.8 951.3
* Calculated for L = 420 mm
** Transport Module Handler Extension
SEMI E26-92 © SEMI 1992, 2004 6
Figure R1-1
Example of Nonradial Cluster Tool Applicability
Figure R1-2
Reach Space and Footprint Restrictions
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer's instructions, product labels,
product data sheets, and other relevant literature,
respecting any materials or equipment mentioned
herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor
Equipment and Materials International (SEMI) takes no
position respecting the validity of any patent rights or
copyrights asserted in connection with any items
mentioned in this standard. Users of this standard are
expressly advised that determination of any such patent
rights or copyrights, and the risk of infringement of
such rights are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E26.1-92 © SEMI 1992, 2004 1
SEMI E26.1-92 (Withdrawn 1104)
RADIAL CLUSTER TOOL FOOTPRINT 300 mm STANDARD
This standard was technically approved by the Global Physical Interfaces & Carriers Committee and is the
direct responsibility of the North American Physical Interfaces & Carriers Committee. Current edition
approved by the North American Regional Standards Committee on August 16, 2004. Initially available at
www.semi.org September 2004; to be published November 2004. Originally published in 1992; last
published June 1999.
Minor editorial changes were made to this document to conform to editorial guidelines.
NOTICE: This document was balloted and approved
for withdrawal in 2004.
1 Introduction
1.1 The standard provides the requirements to extend
the limits of applicability of SEMI E26 from 200 mm
diameter wafers or smaller to 300 mm diameter wafers
or smaller.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the user of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
2 Referenced Documents
2.1 SEMI Documents
SEMI E26 — Radial Cluster Tool Footprint Standard
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
3 Requirements
3.1 Fixed Dimensions — Two of the fixed dimensions
given in SEMI E26 are changed (see Section R1-1):
The fixed distance along the interface plane is increased
from 400.0 mm (15.75 in.) to 500.0 mm (19.69 in.) and
the slant distance separating X2 and X3 (see Section
R1-2) is increased from 270.0 mm (10.63 in.) to 420.0
mm (16.54 in.).
3.2 Variables — The variables given in SEMI E26 are
restated in Table 1 to reflect the increase in fixed
dimensions (see Sections 3.1 and R1-3).
3.3 Restriction on Alpha — The values of alpha are
restricted to 45° 90° (see Section R1-4).
Table 1 Definitions of Module Footprint 300 mm
Variable (Units are in mm)
L
520.0
a
L
2
250.0
cos
2
A
R
360.0
L
2
260.0
cos
2
A
M
457.5
L
2
260.0
cos
2
W
1
640.0sin
2
500.0
W
2
1480.0sin
2
500.0
X
1
320.0 cos
2
X
2
360.0 cos
ec
2
L
2
250.0
cot
2
320.0cos
2
X
3
360.0cos
ec
2
L
2
250.0
cot
2
740.0 cos
2
X
4
457.5cos
ec
2
L
2
250.0
cot
2
740.0 cos
2