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SEMI E54.10-0600 © SEMI 2000 19 Table 23 A ssembl y -ISPM #1 Object Data List Data Inde x Source Objec t ID Source Attribu te ID Description 1 DM 1 A 12 Device Manag er Exceptio n Statu s 2 IS P MD16 SaiA16 Sensor-A I-Co…

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8.8.3.1.4 The value attributes for all Sensor-AI-Counter objects, shall be held at zero unless the device laser is on
and stable (i.e., Laser Status attribute of Device Manager Object has a value indicating “LASER ON AND
STABLE”). The value attribute of any Sensor-AI-Counter object may be cleared (to zero) in a counter sensor after
being read; the conditions under which this clearing behavior occurs may be further specified in the associated
Network Communication Standard or by the manufacturer. The value shall also be cleared (to zero) by a valid
“Clear Counts” service from the SAC object or the “Reset” service issued to the Sensor AI Class Object.
8.8.3.1.5 When attempting to set the “Upper Size” attribute to a value above the capability of the sensor, or to a
value equal to or below the current “Lower Size” attribute value, an error response shall be generated indicating an
invalid operation has been attempted. Similarly, an attempt to set the “Lower Size” attribute to a value below the
capability of the sensor, or to a value equal to or above the current “Upper Size” attribute value, an error response
shall be generated indicating an invalid operation has been attempted.
8.9 Assembly-ISPM Objects — Assembly-ISPM objects inherit attributes, services, and behavior from the
Assembly object. The Assembly object is the device component which provides a mechanism of grouping more than
one attribute from one or more objects into a single data structure for communication over the network.
8.9.1 Table 21 identifies the Assembly-ISPM objects defined for the ISPM device.
Table 21 Assembly List
Object Access
Network
Required Form
Assembly-ISPM#1 R Yes
Status and Counters (Counters ≤ 1024); Default Assembly
Assembly-ISPM#2 R No
Status, Count and Counters (Counters ≤ 1024)
Assembly-ISPM#3 R No
Status Diagnostics, and Counters (Counters ≤ 1024)
Assembly-ISPM#4 R No
Status, Tool State, Time Stamp, Duration, and Counters (Counters ≤ 1024)
Assembly-ISPM#5 R No Status, Tool State, Time Stamp, Duration, Diagnostics, and Counters
(Counters ≤ 1024)
Assembly-ISPM#6 R Yes Status
Assembly-ISPM#7 R No Exception Detail Alarm
Assembly-ISPM#8 R No Exception Detail Warning
Assembly-ISPM#9 R No Exception Detail Alarm and Exception Detail Warning
Assembly-ISPM#40 RW No Device Configuration
8.9.2 Assembly-ISPM Objects Attributes — Table 22 provides a list of attributes common to all Assembly-ISPM
object types.
Table 22 Assembly-ISPM Object Attributes
Attribute Name Attribute Identifier Access Network Required Form
Data (See NOTE 1.) A1 RW Yes Structure as defined below
NOTE 1: Inherited from the Assembly object as shown in Figure 1.
8.9.2.1 Data Attribute Format for Assembly-ISPM Objects — The Data attribute of all Assembly-ISPM objects is a
structured attribute containing an ordered list of attributes within its structure. In the following tables (23 through
31), the structure of the Data attribute for each of the Assembly-ISPM object types is defined.
SEMI E54.10-0600 © SEMI 200019
Table 23 Assembly-ISPM #1 Object Data List
Data Index Source Object ID Source Attribute ID Description
1 DM1 A12 Device Manager
Exception Status
2 ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #1
Value
3 ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #2
Value
. ISPMD16 SaiA16 Sensor-AI-Counter #3 to Sensor-AI-Counter-ISPM #N-1
Value
N≤1024
(See NOTE 1.)
ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #N
Value
NOTE 1: “N” is the value of the Sensor-AI-Counter object attribute “Number of Bins”. Note also that the number of bins reported in an assembly
is fixed throughout the life of the device, and is specified by the manufacturer.
Table 24 Assembly-ISPM #2 Object Data List
Data Index Source Object ID Source Attribute ID Description
1 DM1 A12 Device Manager
Exception Status
2 ISPMD2 SacA65 SAC
Number of Bins
3 ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #1
Value
4 ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #2
Value
. ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #3 to Sensor-AI-Counter-ISPM #N-1
Value
N≤1024
(See NOTE 1.)
ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #N
Value
NOTE 1: “N” is the value of the Sensor-AI-Counter object attribute “Number of Bins”. Note also that the number of bins reported in an assembly
is fixed throughout the life of the device, and is specified by the manufacturer.
Table 25 Assembly-ISPM #3 Object Data List
Data Index Source Object ID Source Attribute ID Description
1 DM1 A12 Device Manager
Exception Status
2 ISPMD3 SaiA16 Sensor-AI-LCS
Value (Laser Current Diagnostic)
3 ISPMD4 SaiA16 Sensor-AI-SLS
Value (Stray Light Diagnostic)
4 ISPMD5 SaiA16 Sensor-AI-MNS
Value (Median Noise Diagnostic)
5 – – Reserved (2 bytes)
6 ISPMD2 SacA65 SAC
Number of Bins
7 ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #1
Value
8 ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #2
Value
. ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #3 to Sensor-AI-Counter-ISPM #N-1
Value
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Data Index Source Object ID Source Attribute ID Description
N ≤ 1024
(See NOTE 1.)
ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #N
Value
NOTE 1: “N” is the value of the Sensor-AI-Counter object attribute “Number of Bins”. Note also that the number of bins reported in an assembly
is fixed throughout the life of the device, and is specified by the manufacturer.
Table 26 Assembly-ISPM #4 Object Data List
Data Index Source Object ID Source Attribute ID Description
1 DM1 A12 Device Manager
Exception Status
2 DM1 A35 Device Manager
Tool State
3 DM1 A41 Device Manager
Time Stamp
4 ISPMD2 SacA67 SAC
Duration
6 ISPMD2 SacA65 Sensor-AI-Counter
Number of Bins
7 ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #1
Value
8 ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #2
Value
. ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #3 to Sensor-AI-Counter-ISPM #N-1
Value
N ≤ 1024
(See NOTE 1.)
ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #N
Value
NOTE 1: “N” is the value of the Sensor-AI-Counter object attribute “Number of Bins”. Note also that the number of bins reported in an assembly
is fixed throughout the life of the device, and is specified by the manufacturer.
Table 27 Assembly-ISPM #5 Object Data List
Data Index Source Object ID Source Attribute ID Description
1 DM1 A12 Device Manager
Exception Status
2 DM1 A35 Device Manager
Tool State
3 DM1 A41 Device Manager
Time Stamp
4 ISPMD2 SacA67 SAC
Duration
5 ISPMD3 SaiA16 Sensor-AI-LCS
Value (Laser Current Diagnostic)
6 ISPMD4 SaiA16 Sensor-AI-SLS
Value (Stray Light Diagnostic)
7 ISPMD5 SaiA16 Sensor-AI-MNS
Value (Median Noise Diagnostic)
8 – – Reserved (2 bytes)
9 ISPMD2 SacA65 SAC
Number of Bins
10 ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #1
Value
11 ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #2
Value