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SEMI E81-0600 © 1999, 2 000 12 • Advanced Process C ontrol Com ponent • Material Transport and Storage Com ponent • Factory L abor Component 7.2 Funct ional Partitioning 7.2.1 This s ection overviews the fun c t io nal r…

6.4.12 As Figure 5 shows, the CIM Framework

specifies MES interfaces enabling integration between

MES components, that is integration within the MES.

The CIM Framework does not directly address

integration between the MES and external functions.

External functions, such as enterprise functions and

engineering functions, can interact with the MES using

the CIM Framework-specified intra-MES interfaces and

communications mechanisms. Interaction between MES

functions and manufacturing equipment can use

existing SEMI equipment integration standards such as

SECS II (SEMI E5), GEM (SEMI E30), ARAMS

(SEMI E58), RMS (SEMI E42), and MMMS (SEMI

E32). Equipment can also implement CIM Framework

components such as Production Machine and

Equipment Tracking and Maintenance within the

equipment, integrating with the MES (the equipment

host) through CIM Framework component interfaces.

6.4.13 The Object Management Group’s

Manufacturing Domain Task Force is adopting

standards for Enterprise, MES, Machine Control and

Engineering applications (MfgDTF). Other related

activity within the OMG includes its efforts regarding

workflow (Workflow) and component architectures.

SEMI tracks these through a liaison with the OMG.

6.4.14 The CIM Framework focuses on the common

software functions that serve to integrate MES. It

specifies components for factory resources, materials,

specifications and factory control, and it establishes a

functional and technical architecture so the components

can be assembled to meet many functional needs and

driven by company-specific business process,

workflows and operation rules. The CIM Framework

enables, but does not define, workflow and business

logic to drive component behavior, nor does it define

user interfaces (including decision support and

reporting). Workflow, business logic and user interface

are considered use-specific and thus outside an industry

consensus standard. In addition, the CIM Framework

specifies application interfaces to the MES functions,

but does not specify the implementation of those

functions.

6.4.15 What Is in the CIM Framework Specification

6.4.15.1 This section provides additional information

about the CIM Framework suite of documents. A brief

description of each document is given below.

6.4.15.2 Specification for CIM Framework Domain

Architecture (this document)

• Contains introductory information and an overview

of the CIM Framework specifications.

• Specifies the functional partitioning and functional

responsibilities of CIM Framework components.

• Specifies common architecture patterns that

functionally integrate CIM Framework

components.

• Provides graphical and textual specification

notation conventions for all CIM Framework

components.

• Provides citations for related specifications or

documents referenced within the CIM Framework.

6.4.15.3 SEMI E96, Guide for CIM Framework

Technical Architecture

• documents the CIM Framework component

interoperability architecture based on distributed

computing standards including OMG CORBA®

and Microsoft DCOM.

6.4.15.4 Additional documents detail the CIM

Framework specifications. The document structure will

reflect the functional partitioning of the domain

architecture. Except for reorganization, the details will

remain substantially the same as contained within the

CIM Framework Blue Ballots with some requested

extensions. The structure of these documents has been

influenced by SEMATECH’s CIM Framework

Specification [CIMFW]. These companion documents

represent the actual specification; whereas this

document serves primarily as their introduction.

7 Requirements

7.1 This section specifies the functional requirements

of CIM Framework components. It establishes a

functional partitioning of CIM Framework components

and it defines functional architectures for resource

tracking and maintenance and for factory control. It also

establishes the graphical and textual notations required

to specify the CIM Framework components. The list

below is a short overview of this section.

• Global and Abstract Definitions Group

• Factory Services Group

• Product Management Component

• Durables Management Component

• Consumables Management Component

• Specification Component

• Factory Operations Component

• Scheduling Component

• Equipment Tracking and Maintenance Component

• Production Machine Component

• Recipe Management Component

• Advanced Process Control Component

• Material Transport and Storage Component

• Factory Labor Component

7.2 Functional Partitioning

7.2.1 This section overviews the functional

responsibilities of the CIM Framework domain

components. Details of the responsibilities are specified

in the individual CIM Framework domain component

specifications.

7.2.2 The domain component responsibilities cover

two types of functions:

• Build-time, or configuration aspect of

manufacturing systems engineering in Figure 4,

which defines and configures the specific entities

in the component, such as the specific machines

and their state models or the wafer carriers and

their initial locations.

• Run-time, or the execution aspect of manufacturing

operations in Figure 4, which executes the

component behaviors, maintains inter-component

relationships, maintains component state and

history and provides run-time access to component

state and behavior.

7.2.3 The initial CIM Framework domain standards do

not address the build-time functions of the components.

These will be added as the standards move from

provisional status to full standards. However, this

functional partitioning section does identify build-time

responsibilities, permitting these build-time functions to

be properly allocated to the correct component as the

CIM Framework evolves.

7.2.4 The components partition CIM Framework

functionality. The components are designed to be

exclusive: no functionality exists in more than one

component. The only exception is that there are some

cross-system functions that are used, specialized or

implemented by most or all of the other components.

These cross-component domain functions are in

separate groups, called Global and Abstract Definitions

Group and Factory Services Group.

7.2.5 The list of responsibilities for a complete MES

solution is far more than the responsibilities of the CIM

Framework components. The CIM Framework focuses

on those functions that serve to integrate applications.

Suppliers and users will provide functional

responsibilities in addition to the standard

responsibilities. The CIM Framework component

responsibilities are also limited by focusing the scope of

the CIM Framework on the run-time needs for wafer

fabrication MES but to not cover the full scope of CIM

solutions for the full semiconductor manufacturing

process.

7.2.6 Sections 7.2.7 through 7.2.20 present the

responsibilities for each of the CIM Framework

components and the groups. Example terminology

specific to semiconductor manufacturing is provided for

clarity. It does not preclude application specialization

for other industries.

7.2.7 Responsibilities of Global and Abstract

Definitions Group

7.2.7.1 The Global and Abstract Definitions group

(defined in SEMI E97) specifies the definitions of

abstract data types and abstract interfaces used

throughout the CIM Framework. These specifications

are separated into a distinct group to enable them to be

specified once and then logically included or inherited

wherever they are subsequently needed.

7.2.7.2 Global Definition Responsibilities

• Provide type definitions for common data

structures to ensure consistent representation.

These items include data types for common

concepts such as coordinates, priorities,

timestamps, and sequences of basic data types.

• Provide type definitions for representations of

historical occurrences.

• Provide definitions for common exceptions used

consistently throughout the CIM Framework.

7.2.7.3 Abstract Interface Responsibilities

• Material architecture: the functions common to

identifying, grouping, moving, locating and

tracking material in the factory. The architecture is

specialized for product material, durables and

consumables. See Section 7.3.2.

• Factory resource architecture: the functions

common to defining, organizing, tracking usage of

and maintaining factory resources including

equipment, sensors, durables, and people. See

Section 7.3.3.

• Job architecture: the functions common to creating,

executing and managing work in the factory. The

job architecture is specialized for material

processing jobs, material transport jobs, resource

maintenance jobs and factory jobs that drive

product material through their process flows. See

Section 7.3.4.

7.2.8 Responsibilities of Factory Services Group

7.2.8.1 The Factory Services group (which is not

actually a component) specifies domain facilities to

support all domain components. The components can

separately implement these facilities for their own use,

they can share a common facility across components, or

use a combination of separate and shared

implementations.

7.2.8.2 Services in Factory Services Group

• Document management and version management:

functions common to creating, storing, retrieving,

and changing (under change control and version

management) documents such as process recipes,

process flow specifications, and maintenance

specifications.

• Event broker: support for components to publish,

subscribe to and filter events.

• Access security control: support for components to

limit access of system functions to authorized users

and applications.

• Component management: functions for CIM

Framework component registration, start-up,

shutdown, etc.

• History: supports the ability of factory objects to

configure and maintain histories (time-based

sequences of data and events) and to support access

to those histories.

• Data collection: the functions common to data

collectors, including equipment, sensors, and

manual data entry.

7.2.9 Responsibilities of Product Management

Component

7.2.9.1 The Product Management component captures

the state of all product material (work in progress). For

wafer fabrication, this includes wafer and die-level

tracking to support multiple products on a single wafer

and to track known-good-die through wafer probe. The

component also tracks engineering wafers and test

wafers, even though they may not become “product.”

The component implements the common material

architecture functions so product material can be

identified, grouped (product groups, lots, process

groups, transport groups), moved and located in the

factory.

7.2.9.2 Build-time Responsibilities of Product

Management Component

• Configure inventory regions.

• Configure product tracking histories, including

what data to store and data archival mechanisms.

7.2.9.3 Run-time Responsibilities of P roduct

Management Component

• Record and support access to current and historical

product information, including:

• Where material is (and has been) in its process

flow.

NOTE 2: The decision to advance material along its

process flow is in the Factory Operations component.

• Product state (processing, on hold, scrapped,

etc.).

• Material type (product, engineering, filler, etc.).

• User-defined product information.

• Genealogy, batching, allocation to product

requests, the number of times reworked, etc.

• Historical information on what equipment

processed the material, when, with what

process flow specification, recipe and durables,

and by what operator.

• Relations and history to related information in

other components, including material location,

material container, process flow specification,

inventory region, process run data, recipe, etc.

• Notify other components of material information

changes.

• Support creation, maintenance and historical

recording of product groups and relationships

among product groups (such as lots, transport

groups and process batches) including splits and

joins (and resulting product genealogy),

experiments (planned future splits and processing

changes), hold, rework, etc.

NOTE 3: The decision to split, join, batch, move,

rework, etc. is a responsibility outside of the Product

Management component. Product Management records

the results of the decisions.

• Record and support access to material location at

multiple levels of detail: an area, a specific

machine, a specific load port on a machine, a

specific zone in a stocker, a specific wafer slot in a

carrier, or a specific wafer coordinate of a die.

• Including reference to material containers

(cassettes, pods, etc.) holding the product (the

containers are managed by the Durables

Management component).

NOTE 4: Material location is served by the Product

Management component and the Material Transport

and Storage component. The Material Transport and

Storage component is responsible for physically

moving material and recording its location, and the