semi合集-English.pdf - 第2158页

SEMI E54.16-0705 © SEMI 2005 3 Standard Program ID Definitions , http://typ es.lonmark.org/spid, L ON M ARK International. SCPT Master List and Progr ammer’s Guide, http:// ty pes.lonmark.org/sc pt, L ON M ARK Internatio…

SEMI E54.16-0705 © SEMI 2005 2

NOTICE: This standard specification does not purport to address safety issues, if any, associated with its use. It is the

responsibility of the users of this standard specification to establish appropriate safety and health practices and determine the

applicability of regulatory limitations prior to use.

3 Limitations

3.1 This document specifies a semiconductor equipment SAN based solely on LONWORKS technology and is a

companion document to the ANSI/EIA/CEA-709.1 (LONWORKS) control networking protocol specification; thus, a

complete specification of this standard necessarily includes the LONWORKS specifications. There are other

semiconductor equipment SAN communications options. The specifications for these options are not included here.

3.2 This document specifies enhancements that provide additional capabilities over and above those currently

required by the LONMARK Interoperability Guidelines. In order to avoid document consistency problems,

information in the LONWORKS technology specifications that relate to this standard is not repeated in this document.

This document is limited to describing enhancements or limitations of LONWORKS technology and the LONMARK

interoperability guidelines that are imposed by this specification.

3.3 A complete specification of the conformance testing procedure shall include the applicable LONMARK

interoperability conformance testing specification. Conformance testing shall include enhancements to the

LONMARK interoperability guidelines required by this standard specification.

4 Referenced Standards and Documents

4.1 It must be noted that unless otherwise indicated, all documents cited below shall be the latest published

versions.

4.2 SEMI Standards

SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)

SEMI E39 — Object Services Standard: Concepts, Behavior, and Services

SEMI E54 – Sensor/Actuator Network Standard

SEMI E54.1 — Standard for Sensor/Actuator Network Common Device Model

SEMI E54.3 – Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device

SEMI E54.10 – Specification for Sensor/Actuator Network Specific Device Model for An In-Situ Particle Monitor

Device

SEMI E54.11 – Specification for Sensor/Actuator Specific Device Model for An Endpoint Device

4.3 ISO Standard

ISO 7498 — Basic Reference Model for Open Systems Interconnection

ISO/CEN EN14908 Specification for Control Networking Protocol

ANSI/EIA/CEA-709.1 (LONWORKS) Control Networking Protocol Specification, Rev B-2000

4.4 Other Documents

LONMARK Layers 1–6 Interoperability Guidelines, LONMARK International.

LONMARK Application Layer Interoperability Guidelines, LONMARK International.

Neuron Chip Data Book, Toshiba and Cypress Corporation.

Smart Transceiver Data Book, Echelon Corporation.

Neuron C Programmer’s Guide, Revision 2, Echelon Corporation

Neuron C Reference Guide, Revision 2, Echelon Corporation

Standard Device Resource Report, http://types.lonmark.org, LONMARK International.

1 International Organization for Standardization, 1 rue de Varembe, Case postale 56, CH-1211, Geneva 20, Switzerland

SEMI E54.16-0705 © SEMI 2005 3

Standard Program ID Definitions, http://types.lonmark.org/spid, LONMARK International.

SCPT Master List and Programmer’s Guide, http:// types.lonmark.org/scpt, LONMARK International.

SNVT Master List and Programmer’s Guide, http:// types.lonmark.org/snvt, LONMARK International.

5 Terminology

5.1 Terminology that is common to all of the documents in this SAN series may also be defined in the Sensor

Actuator Network Standard (see reference SEMI E54 §4.1). Terminology may be reproduced here which is defined

in other SEMI documents.

5.2 Abbreviations and Acronyms

5.2.1 APDU – Application Protocol Device Unit

5.2.2 CDM — Common Device Model

5.2.3 CP — Configuration Parameter

5.2.4 DM — Device Manager

5.2.5 DS — Device Status

5.2.6 NCS — Network Communications Standard

5.2.7 Neuron — Neuron Chip is the 8 bit hardware implementation of the ANSI/EIA/CEA-709.1 (L

ONWORKS)

Control Networking Protocol

5.2.8 NV — Network Variable

5.2.9 NVI — Network Variable Input

5.2.10 NVO — Network Variable Output

5.2.11 OSI — Open Systems Interconnect

5.2.12 OSS — Object Services Standard

5.2.13 RO — Read Only

5.2.14 RW — Read/Write

5.2.15 SAC — Sensor, Actuator, Controller (object)

5.2.16 SAN — Sensor/Actuator Network

5.2.17 SCPT — Standard Configuration Parameter Type

5.2.18 SDM — Specific Device Model

5.2.19 SNVT — Standard Network Variable Type

5.2.20 SPID — Standard Program ID

5.3 Device Component Definitions — As this standard defines the presentation or mapping of CDM data structure

and behavior over a network, it makes use of many of the terms in the SEMI E54.1 - CDM document. Table 1

provides a mapping of fundamental terminology of the CDM document into this document and the L

ONWORKS

definitions. The symbol “=” indicates that the definition is used exactly as specified on the CDM specification.

5.4 In the following sections, additional clarification of some of these terms is provided in the context of the

ANSI/EIA/CEA-709.1 (LONWORKS) protocol.

SEMI E54.16-0705 © SEMI 2005 4

Table 1 Mapping of CDM to NCS Terminology

CDM

Term

NCS Equivalent LONWORKS Equivalent

Device = Device or node

Device Model = Device interface

Object =, Class Functional profile, Class

Instance = Functional block

Attribute = Network variable or configuration property

Behavior = =

Service = Network variable function or application message

State Diagram = =

Byte = =

Nibble = =

Character String = String of ASCII characters or string of international characters

5.4.1 attribute — Attributes are either input network variables (NVI), output network variables (NVO), or

configuration properties (CP). Input and output network variables and configuration properties may be read and/or

written by the device itself, and all attributes may be polled over the network. Additionally, input network variables

and configuration properties may be updated over the network, and the receipt of such an update may cause an event

to be propagated to the device's application layer. This corresponds to a RW (Read and Write) attribute of the object

owning the network variable. Output network variables may not be updated over the network. This corresponds to a

RO (Read Only) attribute of the object owning the network variable. When the device itself updates one of its output

network variables, the value of that variable may be propagated over the network to destination addresses

determined at installation time. Finally, configuration properties are attributes typically stored in non-volatile

memory and preserved across device resets and power cycles.

5.4.2 behavior — Generic object behavior is specified by the L

ONMARK Application Layer Interoperability

Guidelines. Additional object-specific behavior is specified by means of functional profiles.

5.4.3 device — A device (or node) typically consists of one network transceiver which implements the physical

layer of the ANSI/EIA/CEA-709.1 (LONWORKS) protocol, one Neuron Chip with associated firmware which

implements the other layers of the LONTALK protocol, and input/output hardware implementing the physical

interface of the device to external sensor and/or actuator hardware. A LONWORKS device may optionally contain a

host processor and associated software or firmware which implements the application layer of the ANSI/EIA/CEA-

709.1 (LONWORKS) protocol.

5.4.4 device model — The device model comprises several elements which fully describe the external interface of

the device for an interoperable network. The interface is made of the following pieces: a Device Manager (DM)

object; a Sensor/Actuator/Controller (SAC) object; functional blocks such as sensors, actuators, and controllers;

individual network variables; and configuration properties.

5.4.5 instance — Real devices may have zero or more instances of each of the defined functional blocks. Object

instances are identified by means of an instance number within the device.

5.4.6 object — Functional blocks defined as a set of one or more network variable inputs and/or outputs,

implemented as Standard Network Variable Types, and a set of configuration properties, implemented as Standard

Configuration Property Types. Functional blocks form the basis of interoperability at the application layer. The

functional blocks describe standard formats for how information is input to, and output from, a device, and shared

with other devices on the network.

5.4.7 service — Request services are represented by ANSI/EIA/CEA-709.1input network variables (NVI) being set

and delivered to the device application. Notification services are represented by ANSI/EIA/CEA-709.1output

network variables being set by the device application and delivered over the network.