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SEMI E49.2-1104 © SEMI 1995, 2004 5 such that the te sts are representative of the Assembly performance. 9.1.6 For optimum resu lts, the distance between a sample port an d an instrum ent should be minimized. It is recom…

SEMI E49.2-1104 © SEMI 1995, 2004 4

7 Utility Recommendations

NOTE 3: These are minimum utility recommendations for

the media used during qualification of an Assembly.

7.1 Nitrogen

 Nitrogen quality should meet requirements of

SEMI C59.

 Particle filtration should be 99.99999% removal of

.003 micron particles.

7.2 Ultrapure Water

 Resistivity  18 Mohm-cm @ 25°C (77°F)

 TOC — < 10 ppb

 Silica — < 5 ppb

 Particles — (>

0.1 µm) < 500 particles/L

 Anions (F-, Cl-, NO2-, Br-, NO3-, HPO4-, SO4-) <

0.10 ppb

 Metals (Al, Ba, B, Ca, Cr, Cu, Fe, K, Li, Mg, Mn,

Na, Ni, Pb, Sr, Zn) < 0.05 ppb

 Bacteria — < 10 colonies/100 milliliter

NOTE 4: If testing requirements dictate, access to higher

quality Ultrapure Water may be appropriate. Additional

information related to Ultrapure Water facility design and

terminology may be obtained in SEMI F61, Guide for

Ultrapure Water System Used in Semiconductor Processing.

7.3 Clean Dry Air (CDA) or Oil Free Air — Uses

include pneumatic control and air actuation. CDA is

not recommended for use on cleaned wetted surfaces.

Nitrogen is recommended for drying cleaned wetted

surfaces because the purity level is clearly defined and

controlled.

8 Related Documents

8.1 International SEMATECH Documents

SEMASPEC 92010936B — Provisional Test Method

for Determining Leachable Trace Inorganics in Ultra

Pure Water Distribution System Components

SEMASPEC 92010937B — Provisional Test Method

for the Evaluation of Bulk Polymer Samples of Ultra

Pure Water Distribution System Components

SEMASPEC 92010949B — Provisional Test Method

for Determining Particle Contribution and Retention by

Ultra Pure Water Distribution System Components

3 International SEMATECH, 2706 Montopolis Drive, Austin, TX

78741, USA, Website: www.sematech.org

SEMASPEC 92010955B — Provisional Test Method

for Analyzing Plastic Surface Condition of Ultra Pure

Water Distribution System Components (SEM Method)

8.2 ASTM Documents

ASTM D5173-97  Standard Test Method for On-

Line Monitoring of Carbon Compounds in Water by

Chemical Oxidation, by UV Light Oxidation, by Both,

or by High Temperature Combustion Followed by

NDIR or by Electrolytic Conductivity

9 Sampling and Analysis Methodology

9.1 General Recommendations for all Tests

9.1.1 All test reports should include:

 Confidence intervals and detection or reporting

limits,

 All units of measure,

 As detailed a description as possible of the

Assembly tested including part number and

manufacturing date,

 Date of test and initials of person performing test,

 Additional information as specified in the specific

test recommendations within this document,

 Any and all relevant data collected during testing

should be summarized and included,

 Recording of Ultrapure Water and Nitrogen quality

used to perform test, and

 For Sections 9.3 through 9.5 inlet and outlet water

quality.

9.1.2 Trained and qualified personnel should perform

all sampling and testing.

9.1.3 All instrumentation shall be calibrated with

standards traceable to NIST or the equivalent national

standard where those standards exist. The type of

instrument(s) manufacturer, model #, serial # or I.D #,

and most recent calibration date should be available.

9.1.4 If using two separate online instruments for inlet

and outlet testing, determine any difference in the two

readings and include that in the final calculations.

9.1.5 Incoming and outgoing water should be sampled

as close as possible to the Assembly’s liquid supply

point and the Assembly’s delivery point respectively.

Where there are multiple inlets and/or outlets for an

Assembly, a single representative inlet and outlet

should be selected for this testing. However, all inlets

and outlets should be flushed in a consistent manner

SEMI E49.2-1104 © SEMI 1995, 2004 5

such that the tests are representative of the Assembly

performance.

9.1.6 For optimum results, the distance between a

sample port and an instrument should be minimized.

is recommended that components comply with SEMI

F57 and the assembly and design should be in

accordance with SEMI E49.7.

9.1.7 Operate valves to ensure there is no entrapment

and to displace any air prior to beginning a test.

9.1.8 Filter elements contained within the Assembly

under test should not be included during a test as they

may mask results and will need to be replaced

following the test.

9.1.9 Assemblies

should be dried with Nitrogen and

capped following any testing with ultrapure water and

prior to shipment.

9.2 Hydrostatic Pressure Test – This test is required

for every Assembly shipped directly to an end user.

This test may also be required periodically at other

points in the supply chain.

9.2.1 The intent of this test is to eliminate Assembly

leaks when an assembly is initially exposed to pressure

and temperature (up to and including the

manufacturer’s maximum recommended operating

pressure and temperature) at the end user’s facility.

The user of this test is encouraged to review

“Hydrostatic Pressure and Leak Testing of Polymer

Piping Systems Used in High-purity Water

Applications” (Mayer, Burkhart, Rydzewski) for a

thorough discussion of standards, and how the physical

properties of polymers impact testing practices.

9.2.2 The Hydrostatic Pressure Test conditions are the

manufacturer’s maximum recommended pressure at

ambient temperature. However, it is incumbent upon

the manufacturer to ensure that the assembly will be

leak free when exposed to maximum pressure and

maximum temperature at the end user’s facility. If the

test conditions recommended here do not result in

initial leak free operation for the end user, it is

incumbent upon the end user and manufacturer to agree

on appropriate corrective action(s) to comply with the

intent of this Hydrostatic Pressure Test. This may

include testing at elevated media temperatures.

9.2.3 Test Method

9.2.3.1 Test Media — Ultrapure Water at ambient

temperature.

9.2.3.2 Test Pressure — Manufacturer’s maximum

recommended operating pressure.

9.2.3.3 Test Procedure

 Flush system at maximum rated flow to remove

entrapped air.

 Keep assembly at constant temperature during test.

 Pressurize to the Manufacturer’s maximum

recommended operating pressure and wait 15

minutes.

 Repressurize to Manufacturer’s maximum

recommended operating pressure and wait 15

minutes.

 Repressurize to Manufacturer’s maximum

recommended operating pressure and wait 30

minutes.

 Repressurize to Manufacturer’s maximum

recommended operating pressure.

 Monitor the pressure for 15 minutes to ensure

compliance with Table 1 requirement of <

decay in pressure.

 Record pressure readings at the beginning and end

of each waiting period.

9.2.4 Hydrostatic Pressure Test Example

Hydrostatic Pressure Test Example

0 1530456075

Time (minutes)

Pressure (psig)

Figure 1

Hydrostatic Pressure Test Example

 Test Media: Ultrapure Water

 Test Media Temperature: 20C

 Manufacturer’s maximum recommended operating

pressure: 40 psig.

 Assembly is pressurized to 40 psig for 15 minutes.

 Assembly is repressurized to 40 psig for 15

minutes.

 Assembly is repressurized to 40 psig for 30

minutes.

SEMI E49.2-1104 © SEMI 1995, 2004 6

 Assembly is repressurized to 40 psig.

 During the next 15 minutes the Assembly pressure

is monitored to ensure that no visible leakage or

pressure loss in excess of 2 psi (5%) is observed.

9.2.5 As noted in Table 1, the requirement to pass this

test is no visible leakage and pressure decay of less than

5% of maximum recommended operating pressure.

The actual pressure decay and results of a visible

inspection should be noted on the test report.

9.3 Ultrapure Water Flush Test — This test consists of

resitivity and TOC tests and is required for every

Assembly shipped directly to an end user. These tests

may also be required periodically at other points in the

supply chain.

9.3.1 Resistivity Testing Recommendations

9.3.1.1 The test flow rate should be no less than the

manufacturer’s recommended minimum flow rate for

the instrument(s) being used. The test flow rate should

be no more than the maximum recommended flow for

the Assembly under test or the instrument(s) being

used.

9.3.1.2 Following recommended manufacturer

procedures, measure resistivity just prior to the

Assembly and at the Assembly outflow.

9.3.1.3 Allow the reading just prior to the Assembly to

stabilize until no change outside the precision of the

device is observed for at least 5 minutes and the

resistivity meets or exceeds the specification in section

7.2. Repeat the procedure at the Assembly outflow.

9.3.1.4 Temperature just prior to the Assembly must

not differ more than +/- 0.5 C when compared to the

temperature at the Assembly outflow. Otherwise, a

correction may need to be performed

9.3.1.5 Ensure that instrument connections are leak

tight to avoid positive bias from atmospheric CO

9.3.1.6 The inflow and outflow may be measured

simultaneously using a 2-channel/2-cell resistivity

meter.

9.3.1.7 As noted in Table 1, the requirement to pass

this test is a resistivity >

18 Mohm-cm @ 25°C (77°F)

and both inlet and outlet. The test report should include

inlet at outlet resistivity measurements.

9.3.2 TOC Testing Recommendations

9.3.2.1 The test flow rate should be no less than the

manufacturers recommended minimum flow rate for the

instrument(s) being used. The test flow rate should be

no more than the maximum recommended flow for the

Assembly under test or the instrument(s) being used.

9.3.2.2 Refer to ASTM Method D5997-96

(Reapproved 2000) when including UV persulfate

oxidation or ASTM 5173-97 when using UV without

persulfate. It should be noted which method is

incorporated.

9.3.2.3 Ensure that the instrument connections are leak

tight to avoid interference from atmospheric CO

Because TOC is determined by the difference of Total

Carbon (TC) and Total Inorganic Carbon (TIC), the

TOC detection limit can be no lower than 10% of the

TIC reading.

9.3.2.4 Allow the readings to stabilize until at least two

successive readings agree within +/- 5% and the TOC

adders are <

the value specified in Table 1.

9.3.2.5 The procedure should be performed just prior

to the Assembly and at the Assembly outflow.

9.3.2.6 As noted in Table 1, the requirement to pass

this test is TOC adders (ppb) of <

7.5. Both the inlet

and outlet TOC measurements should be included in the

test report.

9.4 Particle Testing Recommendations —

These tests

are required periodically to establish that the Assembly

design is typically capable of meeting the performance

criteria in Table 1.

9.4.1 The test flow rate should be no less than the

manufacturers recommended minimum flow rate for the

instrument(s) being used. The test flow rate should be

no more than the maximum recommended flow for the

Assembly under test or the instrument(s) being used.

9.4.2 Particle contribution will be determined without

valves being actuated. Active components such as

valves should be evaluated for particle performance at

the component level to supplement this test.

9.4.3 The water supplied to the Assembly under test

should be filtered with a maximum 0.05 micron filter

with a retention value such that filtered particle

concentration is <

10 particle/liter > 0.1 µm.

9.4.4 Particle contribution testing will measure the

Assembly outlet particle concentration and assumes all

particles are generated within the Assembly under test.

Periodic verification of the inlet particle concentration

specified in Section 9.4.3 should be performed and

reported in accordance with Section 9.1.1. Allowable

particle adders are outlined in Table 1.

9.4.5 Follow the manufacturer’s recommended

procedures for the optical particle counter.

9.4.6 Allow the reading to stabilize from rinse down

until there is no change within the expected noise for 2

or more intervals (i.e. no change in slope). An

appropriate sample interval should be chosen such that