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SEMI E89-1104 E © SEMI 1999, 2004 24 R6-3.11.1 In general, the equation for VC W is xx WL W r W W MS nVC VC VC nL   (R6-33) R6-3.12 Reproducibility is xx 0.4225 0.65 rr L r W L W VC VC VC VC       (R6-34) R6-3.…

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SEMI E89-1104
E
© SEMI 1999, 2004 23
R6-3.4.2 The calculation for SS
L
is

3
2
1
28 1.5336
Lj
j
SS Y Y


(R6-17)
where
j
Y

is the mean for the j
th
load and Y

the
grand mean.
R6-3.4.2.1 In general, the formula for SS
L
is

2
1
L
Lj
j
SS wn Y Y


(R6-18)
where w is the number of wafers, n the number of
repeats per load, and L the number of loads on each
wafer.
R6-3.4.3 The calculation for SS
r
is

37
2
11
4 7.9095
rjkj
jk
SS Y Y




(R6-19)
Where
j
k
Y
is the mean for the j
th
load, k
th
repeat.
R6-3.4.3.1 In general, the formula for SS
r
is

2
11
Ln
rjkj
jk
SS w Y Y




(R6-20)
where
j
k
Y
is the mean for each load-by-repeat
combination.
R6-3.4.4
Sum of Squares for Load by Wafer (SS
LxW
) is
the difference between SS
L
calculations in Equations
R6-4 and R6-15

34 3
22
x
11 1
728
3.0016
LW ij i j
ji j
SS Y Y Y Y




(R6-21)
where
ij
Y
is the mean for each load-by-wafer
combination and
i
Y

is the mean for each wafer.
R6-3.4.5 Sum of Squares for Repeat by Wafer (SS
rxW
)
is the difference between SS
L
calculations in Equations
R6-6 and R6-17
 
734 37
22
x
111 11
4
20.783
r W ijk ij jk j
kji jk
SS Y Y Y Y



 
(R6-22)
R6-3.5 Calculate the degrees of freedom for Wafer
(df
W
), w – 1, Load (df
L
), L – 1, Repeat (df
r
), L(n – 1),
Load by Wafer (df
LxW
), (L – 1)(w – 1), and Repeat by
Wafer (df
rxW
), L(n – 1) (w – 1).
R6-3.6 Calculate the Mean Squares for Wafer (MS
W
),
Load (MS
L
), Repeat (MS
r
), Load by Wafer (MS
LxW
), and
Repeat by Wafer (MS
rxW
) as the Sum of Squares divided
by degrees of freedom.
R6-3.7 The variance component for Repeat by Wafer
(VC
rxW
) is equal to MS
rxW
x
x
x
0.3849
rW
rW
rW
SS
VC
df
 (R6-23)
R6-3.8 The variance component for Repeat (VC
r
) is
x
0.01364
4
rrW
r
MS VC
VC
 (R6-24)
R6-3.8.1 In general, the equation for VC
r
is
xrrW
r
MS VC
VC
w
(R6-25)
If N is the total number of observations, then the
denominator is derived from
N
w
nL
(R6-26)
R6-3.9 The variance component for Repeat (VC
LxW
) is
xx
x
0.01649
7
LW rW
LW
MS VC
VC
 (R6-27)
R6-3.9.1 In general, the equation for VC
LxW
is
xx
x
L
WrW
LW
MS VC
VC
n
(R6-28)
The denominator is derived from
N
n
Lw
(R6-29)
R6-3.10
The variance component for Load (VC
L
) is
xx
74
28
0.00757
L
LW r rW
L
MS VC VC VC
VC

(R6-30)
R6-3.10.1 In general, the equation for VC
L
is
xx
L
LW r rW
L
MS nVC wVC VC
VC
nw

(R6-31)
R6-3.11 The variance component for Wafer (VC
W
) is
xx
7
688.78
21
WLWrW
W
MS VC VC
VC

 (R6-32)
SEMI E89-1104
E
© SEMI 1999, 2004 24
R6-3.11.1 In general, the equation for VC
W
is
xxWLWrW
W
MS nVC VC
VC
nL

(R6-33)
R6-3.12
Reproducibility is
xx
0.4225
0.65
rrLrWLW
VC VC VC VC

(R6-34)
R6-3.12.1 Typically, VC
W
is not included in
reproducibility because it is a function of true
differences on the measurand. If, however, the
measurands are known to be the same value, and
differences are associated with measurement variability,
it should be included in reproducibility.
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer's instructions, product labels,
product data sheets, and other relevant literature,
respecting any materials or equipment mentioned
herein. These standards are subject to change without
notice.
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Equipment and Materials International (SEMI) takes no
position respecting the validity of any patent rights or
copyrights asserted in connection with any items
mentioned in this standard. Users of this standard are
expressly advised that determination of any such patent
rights or copyrights, and the risk of infringement of
such rights are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E92-0302
E
© SEMI 1999, 2003 1
SEMI E92-0302
E
SPECIFICATION FOR 300 mm LIGHT WEIGHT AND COMPACT BOX
OPENER/LOADER TO TOOL-INTEROPERABILITY STANDARD
(BOLTS/LIGHT)
This provisional specification was technically approved by the Global Physical Interfaces & Carriers
Committee and is the direct responsibility of the Japanese Physical Interfaces & Carriers Committee. Current
edition approved by the Japanese Regional Standards Committee on December 3, 2001. Initially available at
www.semi.org January 2002; to be published March 2002. Originally published September 1999.
E
This document was editorially modified in January 2003 to reflect the withdrawal of SEMI E44. Changes
were made to Sections 4.1, 5.2.5, 5.2.9, 5.2.18, and 5.2.19.
1 Purpose
1.1 Provide Standard for Box Opener/Loader
Interoperability — This standard is intended to provide
standard specifications such as interfaces between the
component that opens the boxes and presents the boxes
to the equipment wafer handler for unloading and
loading 300 mm wafers (BOLTS/Light unit) and higher
level part of equipment and its functions to provide:
(see Figure 1)
• High level of interchangeability/ interoperability,
• Quick attachment/detachment capability with high
mechanical repeatability,
• Light weight, and
• Compactness.
1.1.1 In order to provide a high level of
interchangeability and interoperability, this standard
specifies not only interfaces but also some of the box
opener/loader’s functions that affect interoperability.
1.2 Usage of This Standard — Interoperability
specifications defined by this standard are intended to
be used as interfaces and functionality between
BOLTS/Light compliant box opener/loader and:
• A BOLTS/M compliant loadport unit (that would
conform to SEMI E63).
• An integrated loadport such as four box
opener/loader in one chassis.
• High-densely packaged equipment that uses the
space under the box opener/loader.
1.3 SEMI Standards Compatibility — This standard is
compatible with 300 mm SEMI standards including
SEMI E15.1, E47.1, E1.9, E62, E63 and E64.
1.4 Open Cassette Application — The BOLTS/Light
unit might be configured to handle boxes that would
conform to SEMI E47.1 and SEMI E62.
1.5 A similar unit may be compatibly designed which
does not have box opener capability, but facilitates
placement of an open cassette (that would conform to
SEMI E1.9).
1.6 Carrier Capacities — This standard defines one
interface for 13 or 25 carrier capacity box opener/
loaders.
1.7 The interface specified in this standard is designed
for equipment with a sealed mini-environment, but it is
not limited to such.
2 Scope
2.1 Items Specified — This standard is intended to set
an appropriate level of specification that places minimal
limits on innovation while ensuring modularity,
interchange-ability, and interoperability including:
• Box opener/loader functions that affect
interoperability.
• Mechanical interface features between the box
opener/loader and equipment.
2.2 This standard does not purport to address safety
issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
3 Limitations
3.1 This specification does not apply to the following
application:
• Direct insertion of open cassettes into load-lock
chambers.
4 Referenced Standards
4.1 SEMI Standards
SEMI E1.9 — Mechanical Specification for Cassettes
Used to Transport and Store 300 mm Wafers
SEMI E15 — Specification for Tool Load Port