semi合集-English.pdf - 第3084页

SEMI E123.1-0703 © SEMI 2003 7 7 Additional Alarm Management Requirements 7.1 Alarm Definition 7.1.1 SEMI E30 has a very restrictive defi nition of al arms conflicting with the SEMI E5. This standard requires the broader…

SEMI E123.1-0703 © SEMI 2003 6

Variable Name Description Class SECS-II Type

LinkPortStatus (3 = Input/Output linked,

2 = Input linked,

1 = Output linked,

0 = HANDLER not Linked)

SV U4, enumerated values as

indicated.

MediaID Media Serial Number. SV A[1..24]

MediaType Name of Media Type. SV A[1..24]

OperationType Current Operation Mode (i.e., maintenance, production). ECV A[1..24]

OperatorID Current Operator ID. ECV A[1..24]

QueueStatus PPID Queued to be run. SV U4

ReaderType Type of reader installed on handler. DVVAL A[1..24]

ReaderErrorType Type of error detected by the material reader. DVVAL A[1..24]

Process-Site Components

AlignmentCount Number of units since last alignment (i.e.,

Homing/Adjustment).

SV U4

InsertionForce Insertion-Force energy. DVVAL F8

InsertionForceSetpoint Insertion-Force set point (setpoint). ECV F8

MediaChangeTime Elapsed time to replace media and send ready. SV A[16]

MediaCount Number of media since last reset. SV U4

MediaCountInterval Event generated when number of media is completed. SV U4

PresentPositionActual Present position actual. ECV U4

PresentPositionSetpoint Present position set points (setpoint). ECV U4

ProcessSiteTemp Process-site temperature (setpoint). SV F8

ProcessSiteID ID of process-site in configuration. SV U4

ProcessSiteStatus Site

Availability (1 = enabled, 0 = disabled). List by

number of sites.

DVVAL L, n # n=number of sites

1. U4

2. U4

n. U4

ProcessSiteCount Total count of process sites. SV U4

ProcessSiteLoaded Site

loaded status, normally associated with UnitsReady

event. 0=No unit, 1=Loaded. List by number of sites.

L, n # n=number of sites

1. Loaded status of Site 1

2. Loaded status of Site 2

n. Loaded status of Site n

SV L, n # n=number of sites

1. U4

2. U4

n. U4

SkipCount Number of units skipped since last reset (Skip + Process =

Total).

SV U4

SkipCountInterval Event generated when number of units is skipped. SV U4

StartProcessPortID Start process source (i.e., hand, keyboard, host). SV U4

UnitCount Number of units since last reset. SV U4

UnitCountInterval Event generated when number of units is completed. SV U4

UnitPosition X, Y, Z media location of a unit. SV U4

UnitStatus (1 = Processed, 0 = Skipped) SV U4, enumerated values as

indicated.

SEMI E123.1-0703 © SEMI 2003 7

7 Additional Alarm Management Requirements

7.1 Alarm Definition

7.1.1 SEMI E30 has a very restrictive definition of alarms conflicting with the SEMI E5. This standard requires the

broader SEMI E5 definition.

7.1.2 Messages S5,F1 through S5,F8 of this section provide basic alarm messages. The messages S5,F9 through

S5,F18 provide extended capabilities for Exception Handling. When using messages F1–F8, alarms may be divided

into categories as follows:

Table 5 Alarm Code Mapping

Alarm Name ALCD Description

Personal Safety 1 Condition may be dangerous to people.

Equipment Safety 2 Condition may harm equipment.

Parameter Control Warning 3 Parameter variation outside of preset limits — may harm product.

Parameter Control Error 4 Parameter variation outside of reasonable control limits — may indicate an

equipment malfunction.

Irrecoverable Error 5 Intervention required before normal use of equipment can resume.

Equipment Status Warning 6 An unexpected condition has occurred, but operation can continue.

Attention Flags 7 A signal from a process program indicating that a particular step has been reached.

Data Integrity 8 A condition that may cause loss of data; usually related to Stream 6.

7.1.3 For messages F1 through F8, it will be the equipment’s responsibility to categorize the alarm. Some alarm

conditions may cause more than one type of alarm to be issued. For example, a parameter control error on over

temperature may also trip a protective device that makes the alarm irrecoverable without some intervention.

• Exceptions reported with an ALCD with a category of 1–3 and 5 should cause a transition to

ALARM_PAUSED.

7.2 Recoverable Exceptions

7.2.1 Any exception that may be programmatically recoverable should be reported as an exception using S5F9

Exception Post Notify (EXPN) with a minimum recovery action of RETRY.

7.2.2 If a machine reports recoverable exceptions it should implement the other S5 functions for Exception Clear,

Recovery Request, and Recovery Request Abort.

NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any

particular application. The determination of the suitability of the standard is solely the responsibility of the user.

Users are cautioned to refer to manufacturer' s instructions, product labels, product data sheets, and other relevant

literature, respecting any materials or equipment mentioned herein. These standards are subject to change without

notice.

By publication of this standard, Semiconductor Equipment and Materials International (SEMI) takes no position

respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this

standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and

the risk of infringement of such rights are entirely their own responsibility.

RELATED INFORMATION 1

NOTICE: This related information is not an official part of SEMI E123.1 and was derived from the work of the

originating committee. This related information was approved for publication by full letter ballot procedures.

R1-1 Scenarios

R1-1.1 The purpose of this section is to document possible HSEM-specific operational scenarios.

R1-1.2 Normal Run Scenario

R1-1.2.1 This is an error-free run of a single lot with a single test-site. All optional SEMI E30 events are turned off

by default.

COMMENT HOST EQUIPMENT COMMENT

Host selects process program. S2,F41-->

<--S2,F42 Equipment Ack

Setting Up

Setup Complete

<--S6,F11 Event : PPLoadOk

Host Ack S6,F12-->

Process

Process.SettingUp

Process.Ready

Host commands start S2,F41-->

<--S2,F42 Equipment Acks Start.

Handler cycles devices...

...until empty...

<--S6,F11 Event : Empty

Host Acks Event S6,F12-->

Host commands Purge. S2,F41-->

<--S2,F42 Handler acks Rmt.Cmd.

Stopping

<--S6,F11 Event : Lot Completed

Host Acks Event S6,F12-->

Idle