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SEMI P41-0304 E © SEMI 2004 11 CoordinateSystem ToolOriginPointInformation ToolOriginPoint ToolOriginPosition_X ToolOriginPosition_Y ToolStageCorrectionInformation ToolStageCorrection (unit) ToolStageCorrection_Y ToolSta…

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SEMI P41-0304
E
© SEMI 2004 10
+ Defect (defect_type,date_stamp)
DefectInformation (origin)
DefectPosition_X
DefectPosition_Y
DefectSize (unit)
DefectSize_Y
DefectSize_X
DefectJudgement
+ ImageData
DefectPosition (unit)
+ DefectRepair (date_stamp)
RepairRecipe (recipe_name)
RepairCondition
RepairResult
+ ImageData
+ DefectEvaluate (date_stamp)
EvaluateRecipe (recipe_name)
EvaluateCondition
EvaluateResult
+ ImageData
subsequent structures are in Figure 7.
subsequent structures are in Figure 7.
subsequent structures are in Figure 7.
Figure 4
Structure of Each Defect Section
SEMI P41-0304
E
© SEMI 2004 11
CoordinateSystem
ToolOriginPointInformation
ToolOriginPoint
ToolOriginPosition_X
ToolOriginPosition_Y
ToolStageCorrectionInformation
ToolStageCorrection (unit)
ToolStageCorrection_Y
ToolStageSkew (unit)
MaskOriginPointInformation
MaskOriginPoint
MaskOriginPosition_X
MaskOriginPosition_Y
ToolOffset_X
ToolOffset_Y
ToolStageAccuracy (unit)
ToolOriginPosition (unit)
ToolStageCorrection_X
ToolStageSkewCorrection
MaskOriginPosition (unit)
ToolOffset (unit)
Figure 5
Structure of Tool Coordinate Section
ReferenceMark
MarkRotation
MaskMirror
MaskFlip
Figure 6
Structure of Mask Direction Information Section
SEMI P41-0304
E
© SEMI 2004 12
ImageReferenceAddress
ImageInformation
ImageFormat
ImageMagnification
ImagePixelNumber_X
ImagePixelNumber_Y
ImagePixelSize (unit)
ImagePixelSize_X
ImagePixelSize_Y
ImageGrayLevel
ImageIllumination
ImageRotation
ImageMirror
ImageFlip
ImageConvertInformation
ImageContrast
ImageBrightness
ImageConversionParameter
ImageReference (origin)
ImageReferencePoint
ImageReferencePosition_X
ImageReferencePosition_Y
ImageTarget (origin)
ExpressionMark
ImageTargetPosition_X
ImageTargetPosition_Y
ImageReferencePosition(unit)
ImageTargetPosition (unit)
Figure 7
Structure of Image Data Section