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SEMI E116-0705 © SEMI 2002, 2005 22 FB T ype T A TB TC Equipment (Process Area) exit entrance IB T ype FIMS face CHM Figure R1-2 Carrier Handling Module In Diagram R1-2, the following translation app lies FB Type = Fixe …

SEMI E116-0705 © SEMI 2002, 2005 21

R1-4.2 The advantages of applying Equipment Performance Tracking to the Carrier Handling Module are as

follows:

 Any equipment, except certain specific ones such as an expose tool within a linked litho tool in the lithography

process, has one or more Carrier Handling Modules.

The state of the Carrier Handling Module leads to whole input and output of material to and from an equipment.

 Monitoring the Equipment Performance Tracking state of the Carrier Handling Module helps control loading to

or unloading from equipment on appropriate time.

 The state can reveal what related SEMI standards, i.e. SEMI E87 and SEMI E90, may not address.

 Estimation of capabilities about sub-components on a Carrier Handling Module is available with tracking the

state.

 Each component that makes up the Carrier Handling Module may experience mechanical failure. This can cause

the entire Carrier Handling Module to be in an out of service state. Tracking time between failures would be

valuable.

R1-5 Components to track performance of Carrier Handling Module

R1-5.1 Generally, a Carrier Handling Module has the following components.

 Carrier Handoff PIO (SEMI E84) Port

 Carrier Transfer Mechanism

 Carrier ID Reader

 Carrier ID Writer

 FOUP Opener

 Carrier Slot Mapper

R1-5.2 This section investigates the following composition to represent examples for Fixed Buffer type and Internal

Buffer type equipment. An example of a Carrier Handling Module is illustrated in Figure R1-2. Number of installed

components are listed in the Table R1-3.

Table R1-3 Typical Composition of Carrier Handoff Module

Number Installed Carrier Handoff

PIO

Carrier Transfer

Mechanism

Carrier ID

Reader

Carrier ID

Writer

FOUP

Opener

Slot Mapper

Internal Buffer Type 2 4 2 1 1 1

Fixed Buffer Type 2 2 2 2 2 2

Several Carrier Transfer Mechanisms are usually docking mechanism for Fixed Buffer type. For Internal Buffer type, one of them is a Carrier

Transfer Robot in internal buffer, one is a Docking Mechanism inside the internal buffer and the other one is Carrier Transfer Mechanism to pass

carrier between Load Port and the Internal Buffer.

SEMI E116-0705 © SEMI 2002, 2005 22

FB Type

TA TB TC

Equipment

(Process Area)

exit

entrance

IB Type

FIMS face

CHM

Figure R1-2

Carrier Handling Module

In Diagram R1-2, the following translation applies

FB Type = Fixed Buffer Type

IB Type = Internal Buffer Type

TA = Transport A

TB = Transport B

TC = Transport C

R1-6 Triggers of Transition for each Components of Carrier Handling Module

The following tables describe triggers to change the state of components for specific tasks.

Table R1-4 Triggers of Transitions for Specific Tasks of Carrier Handoff PIO

# Previous State Trigger New State Action(s) Comment

2 IDLE Receiving VALID

signal in SEMI E84.

BUSY Set off handoff

sequence

Loading or Unloading sequence.

Processing or moving wafers

between carrier and process

container before Unloading.

3 BUSY Receiving COMPT

signal in SEMI E84 or

Timeout in handoff

sequence.

IDLE Waiting

disconnected

Loading or Unloading sequence is

completed or terminated. Processing

or moving wafers between carrier

and process container after Loading.

Table R1-5 Triggers of Transitions for Specific Tasks of Carrier Transfer Mechanism on Loadport of Fixed

Buffer Type or FIMS Port of IB

# Previous State Trigger New State Action(s) Comment

2 IDLE Docking or Undocking

Started

BUSY None Carrier moving sequence before

docking. Processing or moving

wafers between carrier and process

container before undocking.

3 BUSY Docking or Undocking

Complete

IDLE None Processing or moving wafers

between carrier and process

container after docking.

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Table R1-6 Triggers of Transitions for Specific Tasks of Carrier Transfer Mechanism in Internal Buffer Unit

# Previous State Trigger New State Action(s) Comment

2 IDLE Transfer Started BUSY Moves carrier to

destination

3 BUSY Transfer Complete IDLE None Ready to unload or remove from

port.

Table R1-7 Triggers of Transitions for specific tasks of Carrier ID Reader

# Previous State Trigger New State Action(s) Comment

2 IDLE Reading Started BUSY None Carrier moving sequence before

reading.

3 BUSY Reading Complete IDLE Verification Processing or moving wafers

between carrier and process

container after opening.

Table R1-8 Triggers of Transitions for Specific Tasks of Carrier ID Writer

# Previous State Trigger New State Action(s) Comment

2 IDLE Writing Started BUSY None Processing wafers before writing.

3 BUSY Writing Complete IDLE Waiting next

writing or any

post writing

action

Carrier moving sequence after

writing.

Table R1-9 Triggers of Transitions for Specific Tasks of FOUP Opener

# Previous State Trigger New State Action(s) Comment

2 IDLE Opening or Closing

Started

BUSY None Carrier moving sequence before

opening.

3 BUSY Opening or Closing

Complete

IDLE None Processing or moving wafers

between carrier and process

container after opening.

Table R1-10 Triggers of Transitions for Specific Tasks of Slot Mapper

# Previous State Trigger New State Action(s) Comment

2 IDLE Scanning Started BUSY None Carrier moving sequence before

mapping.

3 BUSY Scanning Complete IDLE Waiting next

scan

Processing or moving wafers

between carrier and process

container after mapping.

Table R1-11 Triggers of Transitions Common for all Components of Carrier Handling Module

# Previous State Trigger New State Action(s) Comment

1 (no state) Initialization is

complete

IDLE None

7 BLOCKED Get Recovered IDLE None

8 IDLE Unable to do task BLOCKED None

9 BLOCKED Get another Fault BLOCKED None