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SEMI S21-1103 © SEMI 2003 5 7.2.7.2 Employers sh ould train their workers on proper implem entation of the program . 7.3 Chemical H andling and St orage NOTE 9: Information on chemicals used in the area and the facility-…
SEMI S21-1103 © SEMI 2003 4
6.10 Hazards should be controlled based on each job
category: installation, operation, maintenance and
service.
6.10.1 Installation
6.10.1.1 Prior to equipment installation, the installation
manual or other available documents should be checked
to ensure that the appropriate information is available,
including:
• Utilities connection diagram
• Electrical cabling information
• Hazardous energy isolation procedures
• Test procedures for safety features and
performance
• Chemical information
• Safety related detector types and locations
6.10.2 Operation
6.10.2.1 EMO and safety interlock features should not
be removed, bypassed or overridden during normal
operating periods.
6.10.2.2 The location and functionality of each safety
interlock feature and EMO feature should be verified
before initial start-up of any system.
6.10.2.3 Periodic testing and validation of EMO and
safety interlock features should be performed in
accordance with the supplier’s recommendations.
6.10.2.4 EMO and safety interlock systems should be
tested and validated following extended shutdown for
maintenance and service.
6.10.3 Maintenance and Service
6.10.3.1 Prior to maintenance or service, the worker
should check for the following. Worker should perform
their tasks in accordance with any identified procedures
or requirements including the following:
• Effects of the tasks on any safety systems
• Presence of active hazardous energy sources
• Hazardous energy source isolation (lockout/tagout)
requirements
• Verification of remaining hazardous energies after
energy isolation
• Procedure for removal or isolation of remaining
hazardous energies
• Necessity and procedures to override safety
interlocks
• Proper restoration of overridden safety interlocks
after completion of the work
• Personal protective measures required for the work
including the use of personal protective equipment
and training requirements
• Requirements to document the work
7 Chemical Hazards
7.1 The hazards of all work-related chemicals should
be identified. Hazard communication should be
provided for all known hazards of those chemicals.
7.2 Hazard Communication (HAZCOM)
7.2.1 The user should provide chemical safety data to a
designated supplier representative and all potentially
exposed persons. The supplier representative should be
the manager responsible for field service personnel.
7.2.2 Work associated with hazardous chemicals
should be performed only by personnel who have been
trained in safe handling techniques and the hazards
associated with exposure.
7.2.3 When performing work at the user’s site, the
supplier should provide the user information in advance
on any chemicals that the supplier brings onto the
user’s site. It is the responsibility of the supplier to
provide information in advance on supplier-specified
hazardous chemicals and the appropriate handling
procedures. It is the responsibility of the user to train
workers on user-specified hazardous chemicals.
7.2.4 Chemicals and gases should be handled with
special care based on specific handling instructions that
are described in MSDSs and equipment manuals.
7.2.5 Material Safety Data Sheets (MSDSs) for the
chemicals in use should be readily accessible while
work associated with the chemicals is being performed.
7.2.6 All chemical containers and pipes should be
labeled with contents and hazards according to
applicable codes or standards.
NOTE 7: Process piping that may carry varying contents
depending upon the timing or recipe may be labeled with the
generic contents of the piping provided the hazards and
protective measures can be easily identified from the label.
NOTE 8: Information about chemical labeling methods is
provided in SEMI F34 and OSHA 29 CFR 1910.1200.
7.2.7 A written program for controlling hazardous
chemicals should be developed by each employer.
7.2.7.1 This program should be periodically reviewed,
for adequacy, by employers.
SEMI S21-1103 © SEMI 2003 5
7.2.7.2 Employers should train their workers on proper
implementation of the program.
7.3 Chemical Handling and Storage
NOTE 9: Information on chemicals used in the area and the
facility-operator-required personal protective equipment
(PPE) is the responsibility of the facility operator and should
be available in the work area according to regulations for the
location.
NOTE 10: Persons providing transient workers into the
facility should coordinate to determine if there are any
differences between the facility requirements for PPE and the
worker employer requirements for PPE.
7.3.1 All workers should be trained on the chemical
hazards, the proper use of the PPE, and the limitations
of the PPE.
7.3.2 Chemical information should be presented to
workers during training in a clearly understandable
format (such as a table) and should include chemical
names, chemical formulas, hazardous properties
(flammable, corrosive), chemical states (solid, liquid, or
gas), and other hazard information.
NOTE 11: It is recommended that users of this document
refer to Section 12 Personal Protective Equipment for
additional information on protection from chemical exposure.
7.3.3 Further information on typical chemical
categories and their related hazards is provided in Table
A1-1 of Appendix 1.
7.3.4 When operation, maintenance, or service tasks
may include exposure to chemical mists, fumes, or
vapors, the tasks should be conducted with adequate
ventilation.
7.3.4.1 If there is a possibility of insufficient
ventilation, employers are responsible for ensuring that
their workers wear respiratory protective equipment.
7.3.5 If maintenance or service tasks require access to
chemically contaminated areas of the equipment, PPE
may be needed, and implementation of decontamination
procedures may be necessary.
7.3.6 Workers should be trained to know when it is
appropriate to clean up chemical spills. The amount that
may be cleaned up is completely dependent upon the
user’s site hazardous material policies.
7.3.7 Workers should not attempt to clean up large or
unknown spills without proper training. In these
circumstances, the ERT should be contacted.
7.4 Incompatible chemicals should not be mixed or
stored together in the same spill control area unless
adequate controls are provided to avoid mixing of
chemicals or creation of a risk of fire and explosion.
NOTE 12: Specific chemical separation requirements are
defined by local regulation.
7.4.1 Chemical containers should be stored in a
designated location based on hazard categories.
Containers should be segregated based on
incompatibility risks.
7.4.2 Compressed gas cylinders should be secured
upright at all times. When cylinders are not in use,
outlet and valve protective caps should be in place.
NOTE 13: Depending on the gas hazard, some jurisdictions
require non-combustible securing devices (e.g., chains).
NOTE 14: Cylinders within the semiconductor
manufacturing equipment may be installed horizontally if the
equipment manufacturer determines this is compatible with
the cylinder type to be used.
7.5 Protection Against Unexpected Release
7.5.1 Hazardous Energy Control or Lockout/Tagout
procedures should be used to protect workers from the
unexpected release of hazardous energies associated
with pressurized gas, pressurized liquid chemicals or
other (e.g., chemical reaction) energy. The Control of
Hazardous Energy section of this document applies to
all gaseous and liquid chemical energy during
maintenance and service tasks.
7.6 Oxygen Deficiency
7.6.1 If work is to be performed where oxygen
deficiency is possible, (e.g., inside a confined space,
near a high volume inert gas flow), the oxygen content
of the atmosphere should be monitored.
7.6.2 If a hazard exists, appropriate worker protection
measures should be implemented prior to entry.
If the
oxygen content decreases to below 19.5%, workers who
are not provided with supplied air respirators have to
leave.
7.6.3 If elimination of oxygen deficiency is not
practical, workers should use appropriate PPE as a
means of working safely in an oxygen deficient
environment.
7.6.4 The worker should be educated on the hazards
and the necessary protective measures associated with
oxygen deficient environments.
7.7 Chemical Waste
7.7.1 Spent chemical drains should be separated to the
extent that chemical reactions will not cause damage to
drain materials of construction or other chemical
reaction hazards. The user’s instructions should be
followed to avoid potential hazards.
7.7.2 Solid waste should be placed in the appropriate,
labeled waste container based upon user’s instructions.
SEMI S21-1103 © SEMI 2003 6
8 Control of Hazardous Energy
NOTE 15: Control of hazardous energy is commonly known
as lock and tag or Lockout/Tagout. US OSHA regulation: 29
CFR 1910.147 is one location where detailed information can
be found.
8.1 Hazardous Energy Control (lockout/tagout) is a
method for isolating sources of hazardous energy from
equipment and protecting workers from accidental
release of the energy.
8.2 Suppliers should identify all tasks that could be
affected by hazardous energy, (e.g., electrical,
chemical, mechanical, hydraulic, pneumatic, stored,
gravity or thermal) and should provide procedures for
effectively isolating such energy and safely restoring
the energy after performing each work task.
8.3 Safe De-Energized Work Procedures
8.3.1 Preparation
NOTE 16: This list is not intended to be in any specific order
and the order may be changed to reflect individual conditions.
a. Identify the task to be performed.
b. Identify all energy sources and the location of the
means of isolation for each source.
c. Notify potentially affected persons that the work
will be performed.
d. Locate hazardous energy control procedures for the
specific system and task.
e. Shut down equipment using normal shut down
procedures.
f. Isolate all appropriate energy sources in the order
and manner specified in the procedures.
NOTE 17: Certain procedures may require modification to
account for factory-located energy isolation devices and to
meet local regulatory requirements.
g. For electrical energy, turn off the power at the
appropriate disconnection point.
NOTE 18: If regulations have allowed multiple electrical
energy sources, (e.g., main power, emergency power, UPS
power) all sources of power must be identified. Each source
that may expose the worker should be isolated to ensure safe
working conditions.
h. Verify absence of hazardous voltage at the
equipment side of the disconnecting mechanism with an
appropriate test device.
• The test device should be checked for correct
operation before and after testing for the presence
of hazardous electrical energy.
i. Ensure that all energy is at zero state and that any
capacitors or other electrical energy storage devices are
fully discharged or isolated.
j. Follow any special steps needed to eliminate stored
energy (e.g., liquid or gas pressure, capacitors,
compressed springs, support of a raised mass).
k. Each person performing work should apply a
locking device (under exclusive control of the worker)
and a tag to each isolated energy source.
NOTE 19: Some jurisdictions allow for group lockout
capability. Entities creating procedures and persons
performing lockout should understand the procedures for the
location.
l. Verify that energy is no longer present (e.g., check
pressure, presence of liquid, weight, temperature)
8.3.2 Performing Work Tasks
8.3.2.1 Work may only be performed by persons who
are trained to work on the specific equipment.
8.3.2.2 De-energized work may only occur after the
person has isolated the energy and applied a lock and
tag to the energy isolation device.
8.3.2.3 Work continuing past shift change should be
provided with special lockout transfer procedures (that
are usually controlled by the user) to ensure locks are
applied by the workers on the new shift and that
workers on then previous shift have removed their
locks.
8.3.3 Restoration of Energy
8.3.3.1 Remove all hand tools, parts and other
miscellaneous items may have been inadvertently left in
the area during the work.
8.3.3.2 Ensure all safety devices have been restored.
8.3.3.3 Notify all personnel who could be affected by
the potential hazard.
8.3.3.4 Remove energy isolation devices (e.g., locks,
tags blinds, barriers) in the order specified in the task
procedures.
8.3.3.5 After verifying that all persons are clear, restart
the system.
8.3.3.5.1 Apply energy in the proper sequence for safe
restart (e.g., power to interlocks and controls before
main energy, power to interlocks before chemical re-
pressurization).
8.3.3.6 Verify equipment is operating properly.
8.3.3.7 Reset all outer enclosure interlocks and secure
outer enclosures.