semi合集-English.pdf - 第5526页
SEMI P10-0705 © SEMI 1990, 2005 21 [ MEASURED_PHASE_ANGLE_RANGE ] [ PHASE_ANGLE_MARK_FEATURE ] [ PHASE_ANGLE_MARK_LOCATION_DRAWING ] [ PHASE_ANGLE_MARK_DRAWING ] { MEASURED_PHASE_ANGLE_MARK_SITE_ID [ PHASE_ANGLE_MARK_LOC…
SEMI P10-0705 © SEMI 1990, 2005 20
{<defect_measurements>}
END_PATTERN_GROUP_RESULTS
<phase_shift_measurements> =
START_PHASE_SHIFT_MEASUREMENTS
PSM_WAVELENGTH
[
PHASE_SHIFT_QUALITY_ID]
[
START_TRANSMISSION_MEASUREMENTS
[
TRANSMISSION_MEASUREMENT_DATE]
[
TRANSMISSION_EQUIP_USED]
[
TRANSMISSION_MODE_USED]
[
TRANSMISSION_MEASUREMENT_FILE_NAME]
TRANSMISSION_TARGET
[TRANSMISSION_REFERENCE_ONLY]
[
TRANSMISSION_TOLERANCE]
[
TRANSMISSION_RANGE]
[
TRANSMISSION_ERROR]
[
MEASURED_TRANSMISSION_AVERAGE]
[
MEASURED_TRANSMISSION_TOLERANCE]
[
MEASURED_TRANSMISSION_RANGE]
[
TRANSMISSION_MARK_FEATURE]
[
TRANSMISSION_MARK_LOCATION_DRAWING]
[
TRANSMISSION_MARK_DRAWING]
{
MEASURED_TRANSMISSION_MARK_SITE_ID
[ TRANSMISSION_MARK_LOCATION ]
MEASURED_TRANSMISSION_MARK_LOCATION
MEASURED_TRANSMISSION
[
MEASURED_TRANSMISSION_ERROR]
END_MEASURED_TRANSMISSION_SITE }
END_TRANSMISSION_MEASUREMENTS ]
[
START_PHASE_ANGLE_MEASUREMENTS
[
PHASE_ANGLE_MEASUREMENT_DATE]
[
PHASE_ANGLE_EQUIP_USED]
[
PHASE_ANGLE_MODE_USED]
[
PHASE_ANGLE_MEASUREMENT_FILE_NAME]
PHASE_ANGLE_TARGET
[PHASE_ANGLE_REFERENCE_ONLY]
[
PHASE_ANGLE_TOLERANCE]
[
PHASE_ANGLE_RANGE]
[
PHASE_ANGLE_ERROR]
[
MEASURED_PHASE_ANGLE_AVERAGE]
[MEASURED_PHASE_ANGLE_TOLERANCE]
SEMI P10-0705 © SEMI 1990, 2005 21
[MEASURED_PHASE_ANGLE_RANGE]
[
PHASE_ANGLE_MARK_FEATURE]
[
PHASE_ANGLE_MARK_LOCATION_DRAWING]
[
PHASE_ANGLE_MARK_DRAWING]
{
MEASURED_PHASE_ANGLE_MARK_SITE_ID
[
PHASE_ANGLE_MARK_LOCATION ]
MEASURED_PHASE_ANGLE_MARK_LOCATION
MEASURED_PHASE_ANGLE
[
MEASURED_PHASE_ANGLE_ERROR]
END_MEASURED_PHASE_ANGLE_SITE }
END_PHASE_ANGLE_MEASUREMENTS ]
[
START_ETCH_DEPTH_MEASUREMENTS
[
ETCH_DEPTH_MEASUREMENT_DATE]
[
ETCH_DEPTH_EQUIP_USED]
[
ETCH_DEPTH_MODE_USED]
[
ETCH_DEPTH_MEASUREMENT_FILE_NAME]
ETCH_DEPTH_TARGET
[ETCH_DEPTH_REFERENCE_ONLY]
[
ETCH_DEPTH_TOLERANCE]
[
ETCH_DEPTH_RANGE]
[
ETCH_DEPTH_ERROR]
[
MEASURED_ETCH_DEPTH_AVERAGE]
[
MEASURED_ETCH_DEPTH_TOLERANCE]
[
MEASURED_ETCH_DEPTH_RANGE]
[
ETCH_DEPTH_MARK_FEATURE]
[
ETCH_DEPTH_MARK_LOCATION_DRAWING]
[
ETCH_DEPTH_MARK_DRAWING]
{
MEASURED_ETCH_DEPTH_MARK_SITE_ID
[
ETCH_DEPTH_MARK_LOCATION ]
MEASURED_ETCH_DEPTH_MARK_LOCATION
MEASURED_ETCH_DEPTH
[
MEASURED_ETCH_DEPTH_ERROR]
END_MEASURED_ETCH_DEPTH_SITE
}
END_ETCH_DEPTH_MEASUREMENTS ]
[OPERATOR]
END_PHASE_SHIFT_MEASUREMENTS
<registr_measurements> = START_REGISTR_MEASUREMENTS
[REGISTR_QUALITY_ID]
{REGISTR_EQUIP_REQD} {EQUIP_SITE_REQD} {REGISTR_REF_METHOD_REQD}
[REGISTR_STD_GRID] [REGISTR_ALGORITHM]
SEMI P10-0705 © SEMI 1990, 2005 22
[REGISTR_COMPENSATION_TEMPERATURE]
[REGISTR_EQUIP_USED] [EQUIP_SITE_USED] [REGISTR_REF_METHOD_USED]
[REGISTR_STD_GRID_USED] [REGISTR_ALGORITHM_USED]
[
REGISTR_MEASUREMENT_DATE]
[
REGISTR_REF_MASK_ID REGISTR_REF_MASK_SET_ID]
[REGISTR_ERROR] [REGISTR_SCALE [REGISTR_SCALE_REFERENCE_ONLY] ]
[REGISTR_RESIDUAL [REGISTR_RESIDUAL_REFERENCE_ONLY] ]
[REGISTR_THREE_SIGMA [REGISTR_THREE_SIGMA_REFERENCE_ONLY] ]
[REGISTR_RESIDUAL_THREE_SIGMA
[REGISTR_RESIDUAL_THREE_SIGMA_REFERENCE_ONLY] ]
[REGISTR_TOLERANCE]
[REGISTR_ORTHO [REGISTR_ORTHO_REFERENCE_ONLY] ]
[REGISTR_RELATIVE [REGISTR_RELATIVE_REFERENCE_ONLY] ]
{<
measured_registr_mark>}
[MEASURED_REGISTR_ERROR] [MEASURED_REGISTR_SCALE]
[MEASURED_REGISTR_THREE_SIGMA]
[MEASURED_REGISTR_RESIDUAL]
[MEASURED_REGISTR_RESIDUAL_THREE_SIGMA]
[MEASURED_REGISTR_TOLERANCE]
[MEASURED_REGISTR_MINIMUM] [MEASURED_REGISTR_MAXIMUM]
[MEASURED_REGISTR_ORTHO] [MEASURED_REGISTR_RELATIVE]
[
MEASURED_REGISTR_FILE_NAME]
[OPERATOR]
END_REGISTR_MEASUREMENTS
<measured_registr_mark> = START_MEASURED_REGISTR_MARK
MEASURED_REGISTR_MARK_ID
[ VENDOR_REGIGISTRATION_MARK_ID ]
[ MASK_REGISTR_MARK_LOCATION ]
MEASURED_REGISTR_MARK_LOCATION
[ MEASURED_REGISTR_MARK_ERROR ]
[ MEASURED_REGISTR_MARK_RESIDUAL ]
END_MEASURED_REGISTR_MARK
<closure_measurements> = START_CLOSURE_MEASUREMENTS
{REGISTR_CLOSURE_EQUIP_REQD} {EQUIP_SITE_REQD}
[REGISTR_CLOSURE_EQUIP_USED] [EQUIP_SITE_USED]
[
REGISTR_CLOSURE]
[REGISTR_CLOSURE_REFERENCE_ONLY]
MEASURED_REGISTR_CLOSURE
{ MEASURED_CLOSURE_READING [MEASURED_CLOSURE_LOCATION] }
[OPERATOR]