semi合集-English.pdf - 第1291页

SEMI E5-1104 © SEMI 1982, 2004 233 . . j. <SLOTID j > . . n. L,2 1. <CARRIERID n > 2. L,j [j = # of slots, may be implemented as an array] 1. <SLOTID 1 > 2. <SLOTID 2 > . . j. <SLOTID j > 3b…

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SEMI E5-1104 © SEMI 1982, 2004 232
Stream,Function Name (Mnemonic) Direction
S16,F15 PRJobMultiCreate M,H->E,reply
Description
Use this single message to Create Multiple Process Jobs, each of which may be unique in its association of material to process
recipe. If multi-block, this message must be preceded by the S16,F1/F2 transaction.
Structure
L,2
1. <DATAID>
2. L,p [p = # of process jobs being created]
1. L,6
1. <PRJOBID
1
>
2. <MF
1
>
3a. L,n [MF = carrier, n = # of carriers]
1. L,2
1. <CARRIERID
1
>
2. L,j [j = # of slots, may be implemented as an array]
1. <SLOTID
1
>
2. <SLOTID
2
>
.
.
j. <SLOTID
j
>
.
.
n. L,2
1. <CARRIERID
n
>
2. L,j [j = # of slots, may be implemented as an array]
1. <SLOTID
1
>
2. <SLOTID
2
>
.
.
j. <SLOTID
j
>
3b. L,n [MF = substrate, n = # of MID]
1. <MID
1
>
.
.
n. <MID
n
>
4. L,3
1. <PRRECIPEMETHOD
1
>
2. <RCPSPEC
1
>
3. L,m [m = # recipe parameters]
1. L,2
1. <RCPPARNM
1
>
2. <RCPPARVAL
1
>
.
.
m. L,2
1. <RCPPARNM
m
>
2. <RCPPARVAL
m
>
5. <PRPROCESSSTART
1
>
6. <PRPAUSEEVENT
1
>
.
.
p. L,6
1. <PRJOBID
p
>
2. <MF
p
>
3a. L,n [MF = carrier, n = # of carriers]
1. L,2
1. <CARRIERID
1
>
2. L,j [j = # of slots, may be implemented as an array]
1. <SLOTID
1
>
2. <SLOTID
2
>
SEMI E5-1104 © SEMI 1982, 2004 233
.
.
j. <SLOTID
j
>
.
.
n. L,2
1. <CARRIERID
n
>
2. L,j [j = # of slots, may be implemented as an array]
1. <SLOTID
1
>
2. <SLOTID
2
>
.
.
j. <SLOTID
j
>
3b. L,n [MF = substrate, n = # of MID]
1. <MID
1
>
.
.
n. <MID
n
>
4. L,3
1. <PRRECIPEMETHOD
p
>
2. <RCPSPEC
p
>
3. L,m [m = # recipe parameters]
1. L,2
1. <RCPPARNM
1
>
2. <RCPPARVAL
1
>
.
.
m. L,2
1. <RCPPARNM
m
>
2. <RCPPARVAL
m
>
5. <PRPROCESSSTART
p
>
6. <PRPAUSEEVENT
p
>
Exception
The list for specifying material (item 3a and 3b) is empty (L,0 instead of L,n), when no material is specified for the process job.
The form of data item 3(a or b) depends on the value in MF.
SEMI E5-1104 © SEMI 1982, 2004 234
Stream,Function Name (Mnemonic) Direction
S16,F16 PRJobMultiCreate Acknowledge S,H<-E
Description
This message acknowledges the request and reports any errors in the creation of a process job. ERRTEXT contains the identifier
of process jobs that were not created.
Structure
L,2
1. L,m [m = # jobs created]
1. <PRJOBID
1
>
.
.
m. <PRJOBID
m
>
2. L,2
1. <ACKA>
2. L,n
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
.
n. L,2
1. <ERRCODE
n
>
2. <ERRTEXT
n
>
Exception
If n = 0, no errors exist.
Stream,Function Name (Mnemonic) Direction
S16,F17 PRJobDequeue S,H->E,reply
Description
Used to remove process jobs from the equipment for jobs that have not begun processing.
Structure
L,m [m = # jobs to remove]
1. <PRJOBID
1
>
.
.
m. <PRJOBID
m
>
Exception
If m = 0, then de-queue all.