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SEMI D25-0600 E © SEMI 2000, 2003 20 Vacant box returned Figure A1-13 Vaca nt Box Retu rned Shipping Figure A1-14 Shipping

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SEMI D25-0600
E
© SEMI 2000, 2003 19
Vacant box
Customer
normal room
Customer clean room
Figure A1-11
Vacant box, from Customer Clean Room to Customer Normal Room
Figure A1-12
Vacant Box, Customer Normal Room
SEMI D25-0600
E
© SEMI 2000, 2003 20
Vacant box returned
Figure A1-13
Vacant Box Returned
Shipping
Figure A1-14
Shipping
SEMI D25-0600
E
© SEMI 2000, 2003 21
Vacant box received
Figure A1-15
Vacant Box Received
Supplier normal
Figure A1-16
Vacant Box, Supplier Normal Room