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SEMI E91-0600 © SEMI 1999 , 2000 6 No. Current St ate Trigger New State Action Comment 11 EXECUTING Process ing of the last wafer of a current lot comple ted. The prob er has received START comman d for next lot. SETT IN…

SEMI E91-0600 © SEMI 1999, 20005

5.2.4 PSEM Processing State Transition Table

Table 1 Processing State Transition Table

No. Current State Trigger New State Action Comment

1 Undefined After turning the power

on, the operator has

commanded the prober to

perform initialization.

INIT The prober executes

initialization.

None

2 INIT Initialization of all

probers completes without

an alarm or error.

IDLE The prober is waiting for

a command by the host or

the operator.

None

3 IDLE Prober Job has been

created, and the prober

has already received a

process program and

materials, then has

received START

command from the host or

the operator.

SETTING UP The prober is set up

according to the process

program.

None

4 SETTING UP All set-up performance

has completed.

EXECUTING The prober executes

wafer transfer and

measuring.

None

5 EXECUTING Material processing

completes.

IDLE None None

6 PROCESS The prober received

STOP command.

STOPPING The prober completes the

current wafer or the

current die under

EXECUTING state and

unloads it in accordance

with the setting of ECV

“StopUnit”.

The prober starts clearing

data. Whether or not

unloading is executed after

the completion of the

current wafer or the

current die depends on the

specification.

7 PROCESS The prober received

ABORT command from

operator, host or self

generated.

ABORTING The prober is placed in a

safe state.

Wafer data or lot data may

be invalid or not available.

8 PROCESS An alarm occurs. ALARM

PAUSED

PROCESS activity is

suspended, the prober is

waiting for all alarms to

be cleared, STOP or

ABORT command.

ALARM PAUSED is

PAUSE sub-state.

9 PROCESS The prober received

PAUSE command from

the host or the operator.

PAUSING PROCESS state is

suspended when the

processing can be

stopped.

All operations required to

put the prober in safe

condition are performed.

PAUSING is PROCESS

PAUSE sub-state.

10 CHECKING Parameter checking ends

normally.

PROCESS

state.

Processing re-starts from

the previously suspended

state.

None

SEMI E91-0600 © SEMI 1999, 2000 6

No. Current State Trigger New State Action Comment

11 EXECUTING Processing of the last

wafer of a current lot

completed.

The prober has received

START command for

next lot.

SETTING UP None None

12 STOPPING The prober completes

clearing of data and no

alarm remains.

IDLE None None

13 PAUSING The prober stopped the

processing of the current

wafer which was in

EXECUTING state at a

possible stop breakpoint

and attained a safe state.

PAUSED The prober is waiting for

command (RESUME,

STOP or ABORT).

None

14 ALARM

PAUSED

Alarm is cleared. PAUSED The prober is waiting for

command (RESUME,

STOP or ABORT).

None

15 PROCESS

PAUSE

An alarm occurs in the

prober.

ALARM

PAUSED

The prober is waiting for

all alarms to be cleared,

STOP or ABORT

command.

None

16 PAUSED RESUME command was

received.

CHECKING Verification of process

program parameters.

Before continuing

processing, the host or

operator is required to

issue RESUME command.

17 PAUSED The operator instructed a

state transition.

PAUSED

SETTING UP

Probe card replacement

or inker replacement is

carried out by operator’s

instruction.

None

18 PAUSED

SETTING UP

The operator instructed a

state transition.

PAUSED None None

19 PAUSE The prober received

STOP command.

STOPPING The prober starts clearing

data.

Data is saved and valid.

20 PAUSE The prober received

ABORT command.

ABORTING If possible, unsafe

condition is reset.

Wafer data or lot data may

be invalid or not available.

21 STOPPING The prober received

ABORT command.

ABORTING If possible, unsafe

condition is reset.

Wafer data or lot data may

be invalid or not available.

22 ABORTING An abort performance has

completed.

IDLE None Only a state transition to

IDLE is permitted.

23 IDLE An alarm occurs. IDLE with

ALARMS

The prober is waiting for

all alarms to be cleared.

None

24 IDLE with

ALARMS

All alarms were cleared. IDLE None The IDLE state is free of

alarms.

25 IDLE The operator instructed a

state transition.

MAINTEN-

ANCE

None Maintenance and

inspection of the prober

modules and creation,

change and deletion of

process programs are

possible.

26 MAINTEN-

ANCE

The operator instructed a

state transition.

IDLE None None

5.2.5 The Process Model Condition Table

5.2.5.1 Undermentioned Table 2 is an explanation of the transition condition of transition No. 10 in PSEM

Processing State Model diagram.

Table 2 The Process Model Condition Table

Conditions Next State

The check approves that the process program is changed. SETTING UP

The check approves that the process program is not changed.

The previous state was SETTING UP. SETTING UP

The previous state was EXECUTING. EXECUTING

5.3 Prober Job State Model

5.3.1 Purpose

5.3.1.1 The Prober Job state model is defined for the purpose of keeping track of its processing state of the material

to be processed by the prober in every material. The host can give instructions on how to process which material by

creating Prober Job to the equipment. Prober Job is created by the JOB CREATE command. Prober Job state exists

in each Prober Job. It occurs upon creation of Prober Job and is deleted upon its completion. The host can control

progress of material processing which is requested to the equipment according to an event report accompanied by

progress of Prober Job.

5.3.2 Prober Job State Model Diagram

JOB CREATED

JOB

STOPPING

JOB SET UP

JOB ACTIVE

JOB PROCESSING

Enter Processing

3 JOB Started

JOB

ABORTING

JOB

Canceled

Start Aborting

End

Aborting

Start

Stopping

End

Stopping

JOB Created

5 End Processing

Figure 3

Prober Job State Model Diagram

5.3.3 Description of Prober Job State

5.3.3.1 JOB CREATED — State where Prober Job is created to the equipment Prober Job has not processed yet. It

has nothing to do with whether material reached the equipment or not.

5.3.3.2 JOB ACTIVE — State where normal Prober Job processing operation is performed It consists of two sub-

states.

5.3.3.3 JOB SET UP (JOB ACTIVE Sub-state) — State that waits for condition to be ready for processing such as

Equipment preparation.

5.3.3.4 JOB PROCESSING (JOB ACTIVE Sub-state) — State where this processing is performed.