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SEMI E74-0301 © SEMI 1998 , 2001 8 6.3 Incoming Power Supply 6.3.1 Ta ble 8 and T able 9 s pecify th e re quired TMP in coming AC power s upply connector and pi n ass i gnmen ts. Table 8 Incomin g AC Power Supply Connect…

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SEMI E74-0301 © SEMI 1998, 20017
DC Voltage
DC Voltage
ToolTMP
(+)
(-)
(+)
(-)
TMP Tool
b
)
a
)
Figure 5
Schematic Example of TMP Input Signals
ToolTMP
DC Voltage
DC Voltage
DC Voltage
(+)
(-)
(+)
(-)
(+)
(-)
a
)
ToolTMP
ToolTMP
b
)
c
)
Figure 6
Schematic Example of TMP Output Signals
SEMI E74-0301 © SEMI 1998, 2001 8
6.3 Incoming Power Supply
6.3.1 Table 8 and Table 9 specify the required TMP incoming AC power supply connector and pin assignments.
Table 8 Incoming AC Power Supply Connector (pump side)
No. Items Connector Type Referenced Standard Pin Assignments Remarks
1 Single phase,
200V
AC
− 230V
AC
± 10%
50/60 Hz
Receptacle (male) SEMI S2 See Table 9
Table 9 Pin Assignment for Incoming Power Supply Connector
No. Pin No. Item Remarks
1 1 or A Hot AC
2 2 or B Cold single phase
3maximum or last
pin number in the
connector
Earth/Ground When using a connector that has a special grounding pin
not included in the standard pin arrangement, the last pin
becomes a blank pin. (See Related Documents for an
example of specification for this connector.)
7 Related Documents
NOTE 2: All documents cited will be the latest published versions.
7.1 DIN Standard
2
DIN VDE 0627 — Connectors and plug-and-socket devices; for rated voltages to 1000 V
AC
, up to 1200 V
DC
, and
rated currents up to 500 A for each pole
7.2 Military Standard
3
MIL-PRF-24308 — General Specification for Connectors, Electric, Rectangular, Non-Environmental, Miniature,
Polarized Shell, Rack, and Panel
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant
literature respecting any materials mentioned herein. These standards are subject to change without notice.
The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted
material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights, are entirely their own responsibility.
2 Deutsches Institut für Normung e.V., Beuth Verlag GmbH Burggrafenstrasse 4-10, D-10787 Berlin, Germany
3 Military Standards, Naval Publication and Form Center, 5801 Tabor Avenue, Philadelphia, PA 19120
SEMI E74-0301 © SEMI 1998, 20019
RELATED INFORMATION 1
APPLICATION NOTES
NOTE: This related information is not an official part of SEMI E74 and is not intended to modify or supercede the official
standard. This related information is optional and contains information that is not required to conform to this standard.
NOTE 1: While this standard was developed to specify
vacuum pumps installed with 300 mm equipment, the
standard should also be applied to vacuum pumps
installed with 200 mm equipment.
NOTE 2: ICF flange is available on request for inlet
flange.
NOTE 3: In order to save space and reduce cost, the
connector for the control and running status signals
should be a minimum size required for the number of
pins specified in the standard. If the additional signal
connections are required another connector should be
added to the pump.
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer’s instructions, product labels,
product data sheets, and other relevant literature
respecting any materials mentioned herein. These
standards are subject to change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.