semi合集-English.pdf - 第1132页

SEMI E5-1104 © SEMI 1982, 2004 74 Stream,Function Name (Mnemonic) Direction S2,F29 Equipment Constant Namelist Request (ECNR) S,H->E,reply Description This function allows the host to r e trieve basic inf ormation a b…

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SEMI E5-1104 © SEMI 1982, 2004 73
Stream,Function Name (Mnemonic) Direction
S2,F25 Loopback Diagnostic Request (LDR) S,H<->E,reply
Description
A diagnostic message for checkout of protocol and communication circuits. The binary string sent is echoed back.
Structure
<ABS>
Exception
None
Stream,Function Name (Mnemonic) Direction
S2,F26 Loopback Diagnostic Data (LDD) S,H<->E
Description
The echoed binary string
Structure
<ABS>
Exception
None
Stream,Function Name (Mnemonic) Direction
S2,F27 Initiate Processing Request (IPR) S,H->E,reply
Description
Host requests equipment to initiate processing of the identified material at the specified location in the machine using the
specified process program.
Structure
L,3
1. <LOC>
2. <PPID>
3. L,n
1. <MID
1
>
.
.
n. <MID
n
>
Exception
A zero-length PPID indicates no process program is being specified and the equipment is to take whatever action is appropriate
for it to determine the proper program to use. A zero-length MID list indicates no MID is to be associated with the material to be
processed.
Stream,Function Name (Mnemonic) Direction
S2,F28 Initiate Processing Acknowledge (IPA) S,H<-E
Description
Response by equipment to Initiate Processing Request. Returned status indicates whether or not the request was honored by the
equipment.
Structure
<CMDA>
Exception
None
SEMI E5-1104 © SEMI 1982, 2004 74
Stream,Function Name (Mnemonic) Direction
S2,F29 Equipment Constant Namelist Request (ECNR) S,H->E,reply
Description
This function allows the host to retrieve basic information about what equipment constants are available in the equipment.
Structure
L,n
1. <ECID
1
>
.
.
n. <ECID
n
>
Exception
A zero-length list means send information for all ECIDs.
Stream,Function Name (Mnemonic) Direction
S2,F30 Equipment Constant Namelist (ECN) M,H<-E
Description
Data Response
Structure
L,n (number of equipment constants)
1. L,6
1. <ECID
1
>
2. <ECNAME
1
>
3. <ECMIN
1
>
4. <ECMAX
1
>
5. <ECDEF
1
>
6. <UNITS
1
>
2. L,6
.
.
n. L,6
1. <ECID
n
>
2. <ECNAME
n
>
3. <ECMIN
n
>
4. <ECMAX
n
>
5. <ECDEF
n
>
6. <UNITS
n
>
Exception
Zero-length ASCII items for ECNAME
i
, ECMIN
i
, ECMAX
i
, ECDEF
i
, and UNITS
i
indicates that the ECID does not exist.
Stream,Function Name (Mnemonic) Direction
S2,F31 Date and Time Set Request (DTS) S,H->E,reply
Description
Useful to synchronize the equipment time with the host time base.
Structure
<TIME>
Exception
None
SEMI E5-1104 © SEMI 1982, 2004 75
Stream,Function Name (Mnemonic) Direction
S2,F32 Date and Time Set Acknowledge (DTA) S,H<-E
Description
Acknowledge the receipt of time and date.
Structure
<TIACK>
Exception
None
Stream,Function Name (Mnemonic) Direction
S2,F33 Define Report (DR) M,H->E,reply
Description
The purpose of this message is for the host to define a group of reports for the equipment.
The type of report to be transmitted is designated by a Boolean “Equipment Constant.” An “Equipment Constant Value” of
“False” means that an “Event Report”(S6,F11) will be sent, and a value of “True” means that an “Annotated Event
Report”(S6,F13) will be sent.If S2,F33 is Multi-block, it must be preceded by the S2,F39/S2,F40 Inquire/Grant transaction.
Structure
L,2
1. <DATAID>
2. L,a # reports
1. L,2 report 1
1. <RPTID
1
>
2. L,b # VIDs this report
1. <VID
1
>
.
.
b.<VID
b
>
a. L,2 report a
1. <RPTID
a
>
2. L,c # VIDs this report
1. <VID
1
>
.
.
c. <VID
c
>
Exception
1. A list of zero-length following <DATAID> deletes all report definitions and associated links. See S2,F35 (Link
Event/Report).
2. A list of zero-length following <RPTID> deletes report type RPTID. All CEID links to this RPTID are also deleted.
Stream,Function Name (Mnemonic) Direction
S2,F34 Define Report Acknowledge (DRA) S,H<-E
Description
Acknowledge or error If an error condition is detected the entire message is rejected (i.e., partial changes are not allowed).
Structure
<DRACK>
Exception
None