semi合集-English.pdf - 第406页

SEMI E52-0703 © SEMI 1995, 2003 42 MIXED GAS NAME SYMBOL CODE 2% TRICHLOROETHANE/NITROGEN 2% C2H3Cl3/N2 0506 2.5% DIBORANE/HYDROGEN 2.5% B2H6/H2 0825 2.5% METHANE/AIR 2.5% CH4/Air 0826 2.5% OXYGEN/5% CARBON DIOXIDE/NIT R…

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SEMI E52-0703 © SEMI 1995, 2003 41
MIXED GAS NAME SYMBOL CODE
15%CARBON DIOXIDE/NITROGEN 15%CO2/N2 0778
15%DIBORANE/ARGON 15%B2H6/Ar 0697
15%DIBORANE/HYDROGEN 15%B2H6/H2 0820
15%DIBORANE/NITROGEN 15%B2H6/N2 0580
15%GERMANIUM TETRACHLORIDE/OXYGEN 15%GeCl4/O2 0787
15%HYDROGEN/ARGON 15%H2/Ar 0694
15%HYDROGEN/NITROGEN 15%H2/N2 0545
15%NITRIC OXIDE/NITROGEN 15%NO/N2 0652
15%OZONE/OXYGEN 15%O3/O2 0641
15%PHOSPHINE/15%SILANE/NITROGEN 15%PH3/15%SiH4/N2 0581
15%PHOSPHINE/ARGON 15%PH3/Ar 0582
15%PHOSPHINE/HYDROGEN 15%PH3/H2 0583
15%PHOSPHINE/NITROGEN 15%PH3/N2 0500
15%PHOSPHINE/SILANE 15%PH3/SiH4 0584
15%SILANE/ARGON 15%SiH4/Ar 0821
15%SILANE/HELIUM 15%SiH4/He 0864
15%SILANE/NITROGEN 15%SiH4/N2 0519
16%CARBON DIOXIDE/NITROGEN 16%CO2/N2 0543
17%OXYGEN/CARBON TETRAFLUORIDE(FREON-14) 17%O2/CF4 0585
17.4%GERMANIUM TETRACHLORIDE/HYDROGEN 17.4%GeCl4/H2 0891
18.4%PHOSPHORUS OXYCHLORIDE/OXYGEN 18.4%POCl3/O2 0893
2%ARSINE/HYDROGEN 2%AsH3/H2 0703
2%ARSINE/NITROGEN 2%AsH3/N2 0586
2%ARSINE/SILANE 2%AsH3/SiH4 0663
2%DIBORANE/ARGON 2%B2H6/Ar 0587
2%DIBORANE/NITROGEN 2%B2H6/N2 0695
2%DISILANE/HELIUM 2%Si2H6/He 0764
2%GERMANE/ARGON 2%GeH4/Ar 0740
2%HYDROGEN SULFIDE/NITROGEN 2%H2S/N2 0903
2%HYDROGEN/NITROGEN 2%H2/N2 0588
2%METHYSILANE/HYDROGEN 2%CH6Si/H2 0717
2%NITRIC OXIDE/NITROGEN 2%NO/N2 0822
2%NITROGEN DIOXIDE/NITROGEN 2%NO2/N2 0904
2%NITROGEN/3%CARBON MONOXIDE/17%CARBON
DIOXIDE/HYDROGEN 2%N2/3%CO/17%CO2/H2 0788
2%OXYGEN/ARGON 2%O2/Ar 0863
2%OZONE/OXYGEN 2%O3/O2 0569
2%PHOSPHINE/ARGON 2%PH3/Ar 0539
2%PHOSPHINE/NITROGEN 2%PH3/N2 0640
2%PHOSPHINE/SILANE 2%PH3/SiH4 0696
2%SILANE/ARGON 2%SiH4/Ar 0823
2%SILANE/HELIUM 2%SiH4/He 0589
2%SILANE/HYDROGEN 2%SiH4/H2 0544
2%SILANE/NITROGEN 2%SiH4/N2 0653
2%SULFUR DIOXIDE/NITROGEN 2%SO2/N2 0824
SEMI E52-0703 © SEMI 1995, 2003 42
MIXED GAS NAME SYMBOL CODE
2%TRICHLOROETHANE/NITROGEN 2%C2H3Cl3/N2 0506
2.5%DIBORANE/HYDROGEN 2.5%B2H6/H2 0825
2.5%METHANE/AIR 2.5%CH4/Air 0826
2.5%OXYGEN/5%CARBON DIOXIDE/NITROGEN 2.5%O2/5%CO2/N2 0866
2.7%ETHYLENE/HELIUM 2.7%C2H4/He 0897
20%ARGON/SILANE 20%Ar/SiH4 0540
20%ARSINE/HYDROGEN 20%AsH3/H2 0590
20%CARBON DIOXIDE/HYDROGEN 20%CO2/H2 0507
20%CARBON TETRAFLUORIDE/NITROGEN 20%CF4/N2 0728
20%DIBORANE/HELIUM 20%B2H6/He 0908
20%DIBORANE/SILANE 20%B2H6/SiH4 0591
20%DISILANE/HELIUM 20%Si2H6/He 0648
20%DISILANE/HYDROGEN 20%Si2H6/H2 0713
20%FLUORINE/HELIUM 20%F2/He 0677
20%FLUOROFORM/OXYGEN 20%CF4/O2 0827
20%HELIUM/OXYGEN 20%He/O2 0687
20%HYDROGEN/CARBON MONOXIDE 20%H2/CO 0592
20%NITROGEN/HYDROGEN 20%N2/H2 0880
20%OXYGEN/ARGON 20%O2/Ar 0875
20%OXYGEN/CARBON TETRAFLUORIDE(FREON-14) 20%O2/CF4 0513
20%OXYGEN/HELIUM 20%O2/He 0536
20%OXYGEN/NITROGEN 20%O2/N2 0736
20%OZONE/NITROGEN 20%O3/N2 0723
20%OZONE/OXYGEN 20%O3/O2 0869
20%PHOSPHINE/HYDROGEN 20%PH3/H2 0593
20%PHOSPHINE/NITROGEN 20%PH3/N2 0767
20%PHOSPHINE/SILANE 20%PH3/SiH4 0530
20%SILANE/ARGON 20%SiH4/Ar 0541
20%SILANE/HELIUM 20%SiH4/He 0529
20%SILANE/HYDROGEN 20%SiH4/H2 0577
20%SILANE/NITROGEN 20%SiH4/N2 0502
20%TRICHLOROSILANE/HYDROGEN 20%SiHCI3/H2 0522
20%TRIMETHYLALUMINUM(TMAI)/HYDROGEN 20%(CH3)3AI/H2 0525
21%OXYGEN/NITROGEN 21%O2/N2 0594
21%SILANE/4%PHOSPHINE/ARGON 21%SiH4/4%PH3/Ar 0520
21.6%CARBON DIOXIDE/32.4%NITROGEN/HYDROGEN 21.6%CO2/32.4%N2/H2 0882
22%OXYGEN/HELIUM 22%O2/He 0828
22%PHOSPHINE/SILANE 22%PH3/SiH4 0678
25%AMMONIA/HYDROGEN 25%NH3/H2 0638
25%CARBON MONOXIDE/HYDROGEN 25%CO/H2 0829
25%FLUORINE/ARGON 25%F2/Ar 0755
25%FLUORINE/HELIUM 25%F2/He 0758
25%FLUORINE/NITROGEN 25%F2/N2 0746
25%HELIUM/ARGON 25%He/Ar 0737
25%HEXAFLUOROETHANE/OXYGEN 25%C2F6/O2 0770
SEMI E52-0703 © SEMI 1995, 2003 43
MIXED GAS NAME SYMBOL CODE
25%PHOSPHINE/SILANE 25%PH3/SiH4 0517
25%PROPANE/PROPYLENE 25%C3H8/C3H6 0830
25%TRICHLOROSILANE/HYDROGEN 25%SiHCI3/H2 0680
3%AMMONIA/NITROGEN 3%NH3/N2 0831
3%ARSINE/ARGON 3%AsH3/Ar 0688
3%ARSINE/HYDROGEN 3%AsH3/H2 0665
3%BORON TRICHLORIDE/HYDROGEN 3%BCl3/H2 0832
3%DIBORANE/5%SILANE/NITROGEN 3%B2H6/5%SiH4/N2 0659
3%DIBORANE/HYDROGEN 3%B2H6/H2 0657
3%DIBORANE/NITROGEN 3%B2H6/N2 0595
3%ETHYLENE/HELIUM 3%C2H4/He 0878
3%HYDROGEN/ARGON 3%H2/Ar 0833
3%HYDROGEN/HELIUM 3%H2/He 0596
3%HYDROGEN/NITROGEN 3%H2/N2 0597
3%NITROGEN/HYDROGEN 3%N2/H2 0672
3%OXYGEN/HELIUM 3%O2/He 0598
3%OZONE/AIR 3%O3/Air 0599
3%PHOSPHINE/5%SILANE/NITROGEN 3%PH3/5%SiH4/N2 0671
3%PHOSPHINE/ARGON 3%PH3/Ar 0534
3%PHOSPHINE/HELIUM 3%PH3/He 0834
3%PHOSPHINE/NITROGEN 3%PH3/N2 0600
3%PHOSPHINE/SILANE 3%PH3/SiH4 0601
3%PROPANE/HYDROGEN 3%C3H8/H2 0872
3%SILANE/HELIUM 3%SiH4/He 0602
3%SILANE/HYDROGEN 3%SiH4/H2 0870
3.5%CARBON DIOXIDE/HELIUM 3.5%CO2/He 0835
3.5%HYDROGEN/NITROGEN 3.5%H2/N2 0768
30% ISOBUTANE/HELIUM 30%CH(CH3)3/He 0836
30%CARBON DIOXIDE/AIR 30%CO2/Air 0508
30%GERMANE/ARGON 30%GeH4/Ar 0837
30%HELIUM/OXYGEN 30%He/O2 0603
30%NITROGEN TRIFLUORIDE/NITROGEN 30%NF3/N2 0661
30%OXYGEN/HELIUM 30%O2/He 0604
30%OXYGEN/HYDROGEN 30%O2/H2 0637
30%PHOSPHINE/SILANE 30%PH3/SiH4 0896
30%PROPANE/BUTANE 30%C3H8/C4H10 0885
30%SILANE/ARGON 30%SiH4/Ar 0838
30%SILANE/NITROGEN 30%SiH4/N2 0839
30%TRICHLOROSILANE/HYDROGEN 30%SiHCl3/H2 0877
30%TRIMETHYLSILANE/HYDROGEN 30%(CH3)3SiH/H2 0874
32%SILICON TETRACHLORIDE/HYDROGEN 32%SiCl4/O2 0892
33.3%HYDROGEN/CARBON MONOXIDE 33.3%H2/CO 0840
35%PHOSPHINE/SILANE 35%PH3/SiH4 0841
4%DIBORANE/NITROGEN 4%B2H6/N2 0605
4%HELIUM/NITROGEN 4%He/N2 0738