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SEMI M29-1296 © SEMI 1996, 2003 11 5.5.2 Rear Retainer — Dimensions of a rear retainer are show n in Figure 1 5 and Table 5. Figure 15 Rear Retainer Table 5 Dimensions of Rear Retainer Unit: mm Standardized Dimension Loc…
SEMI M29-1296 © SEMI 1996, 2003 10
Unit: mm
Standardized Dimension
Location
13 Wafers 25 Wafers
B27 45° ←
B28 45° ←
B29 133 ± 1 ←
B30 148 ± 1 ←
B31 14 ± 1 ←
5.5 Retainer
5.5.1 Front Retainer — Dimensions of a front retainer are shown in Figure 14 and Table 4.
NOTE 1: Usually, this part is made of an elastic material, and hence, it is difficult to show its form or to measure it. Here, the
front view of this part shows the dimensions in the status fitted with a cassette.
Figure 14
Front Retainer
Table 4 Dimensions of Front Retainer
Unit: mm
Standardized Dimension
Location
13 Wafers 25 Wafers
FR1 220 ± 1 ←
FR2 183 ± 1 303 ± 1.5
FR3 178 ± 1 298 ± 1.5
FR4 153.5 ± 1 273.5 ± 1.5
FR5 11 ± 0.5 ←
FR6 13 ± 0.5 ←
FR7 12.5 ± 0.5 ←
FR8 59 ± 2 ←
FR9 187 ± 1 307 ± 1.5
SEMI M29-1296 © SEMI 1996, 2003 11
5.5.2 Rear Retainer — Dimensions of a rear retainer are shown in Figure 15 and Table 5.
Figure 15
Rear Retainer
Table 5 Dimensions of Rear Retainer
Unit: mm
Standardized Dimension
Location
13 Wafers 25 Wafers
RR1 110 ± 1 ←
RR2 184 ± 2 304 ± 3
RR3 157 ± 2 ←
RR4 19.5 ± 1 ←
RR5 27 ± 1 ←
RR6 10 ± 0.5 ←
RR7 20 ± 0.5 ←
RR8 23 ± 2 ←
RR9 25 ± 1 ←
RR10 15 ± 5 ←
RR11 5 ± 0.5 ←
SEMI M29-1296 © SEMI 1996, 2003 12
5.6 Clamp — Dimensions of a clamp are shown in Figure 16 and Table 6.
Figure 16
Clamp
Table 6 Dimensions of Clamp
Unit: mm
Standardized Dimension
Location
13 Wafers 25 Wafers
CL1 100 ± 10 ←
CL2 95 ± 2 ←
CL3 45 ± 2 ←
CL4 25 ± 1 ←
CL5 10 max ←
CL6 20 ± 5 ←
CL7 40 ± 10 ←
5.7 Gasket — A gasket is a part to be mainly designed with maker’s know-how regarding its material and form. In
addition, this is frequently revised for increase of quality.
5.7.1 Since there is no practical problem so long as its position is decided, the gasket is not defined. However, it
should be provided in the area defined in Sections 5.3.3 and 5.4.3.