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SEMI E88-1104 E © SEMI 1999, 2004 54 > > > R1-2 Parallel Interfac e for Carrier Handoff POD Ceiling Raised Floor Over head V ehicle (OHV) Product ion or AMHS Equipmen t (Side View) Photocoupled Par allel I/O Dev…

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© SEMI 1999, 2004 53
RELATED INFORMATION 1
STOCKER SEM UNIQUE CAPABILITIES
NOTICE: This related information is not an official part of SEMI E88, but was approved for publication by full
letter ballot procedures.
R1-1 Transfer Command Message Example (SML Format)
R1-1.1 Variable data values specified in the following example TRANSFER command have been chosen arbitrarily
for the purpose of demonstrating message structure/content.
S2,F49
<L [4]
<U2 0> /* DATAID */
<A[0] “”> /* OBJSPEC */
<A[8] “TRANSFER”> /* RCMD */
<L [2]
<L [2]
<A[11] “COMMANDINFO”> /* CPNAME
1
*/
<L[2]
<L[2]
<A[9] “COMMANDID”> /* CPNAME */
<A[6] “111111”> /* CPVAL */
>
<L[2]
<A[8] “PRIORITY”> /* CPNAME */
<U2 5> /* CPVAL */
>
>
>
<L [2]
<A[12] “TRANSFERINFO”> /* CPNAME
2
*/
<L[3]
<L[2]
<A[9] “CARRIERID”> /* CPNAME */
<A[6] “123456”> /* CPVAL */
>
<L[2]
<A[6] “SOURCE”> /* CPNAME */
<A[0] “”> /* CPVAL */
>
<L[2]
<A[4] “DEST”> /* CPNAME */
<A[5] “SHELF”> /* CPVAL */
>
>
SEMI E88-1104
E
© SEMI 1999, 2004 54
>
>
>
R1-2 Parallel Interface for Carrier Handoff
POD
Ceiling
Raised Floor
Overhead Vehicle (OHV)
Production
or
AMHS
Equipment
(Side View)
Photocoupled Parallel
I/O Devices
Floor
running
AGV/RGV
Automated or Rail
Guided Vehicle (AGV/RGV)
Female Connector Plug
Photocoupled Parallel
I/O Devices
A-1.1.1.2 Figure R1-1
A-1.1.1.3 Carrier Handoff Example Diagram for OHV/AGV/RGV
A-1.1.1.4
A-1.1.1.5
A-1.1.1.6 Figure R1-2
A-1.1.1.7 Carrier Handoff Example Diagram for DWC
A-1.1.1.8
SEMI E88-1104
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© SEMI 1999, 2004 55
A-1.1.1.9
R1-3 Hardware Architecture
Factory Host
SC
1
Stocker
Unit 1
...
Stocker SEM
GEM
HSMS-SS
LAN
...
SC
N
...
Key Characteristics
• SC provides a single communication connection to Host
• One-to-many(one or more) mapping of SC’s to stocker units
• Interbay and Intrabay controls decoupled from Stocker controls
SC
Stocker Units
Stocker
Unit M
Stocker
Unit 1
Stocker
Unit M
A-1.1.1.10 Figure R1-3
A-1.1.1.11 SC Architecture (Logical View)
A-1.1.1.12