semi合集-English.pdf - 第634页

SEMI E84-0305 © SEMI 1999, 2005 32 1 2 14 15 16 3 4 5 6 7 8 9 10 11 12 13 17 18 19 20 21 22 23 24 25 OUT1 OUT2 OUT3 OUT4 OUT5 OUT6 OUT7 OUT8 NC (See NOTE 1) Reserved (Se e NOTE 2) Reserved ( See NO TE 2) Reserved ( See N…

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SEMI E84-0305 © SEMI 1999, 2005 31
Figure 33
Optoisolated Implementation Using Hardwired Connection
Input
Output
Output
Input
VA L I D
CS_0
CS_1
AM_AVBL*
TR_REQ
BUSY
COMPT
CONT
L_REQ
U_REQ
VA *
READY
VS_0*
VS_1*
HO_AVBL
ES
3
4
5
1
2
6
7
8
2
3
4
5
6
7
8
1
3
4
5
3
4
5
1
2
6
7
8
2
3
4
5
6
7
8
1
3
4
5
VA L I D
CS_0
CS_1
TR_REQ
BUSY
COMPT
CONT
L_REQ
U_REQ
READY
HO_AVBL
ES
Active Passive
AM_AVBL*
VA *
VS_0*
VS_1*
* This signal is for interbay passive OHS vehicle use only.
Figure 34
Bit Assignments for Interlock Signal between Passive and Active
SEMI E84-0305 © SEMI 1999, 2005 32
12
141516
345678910111213
171819202122232425
OUT1
OUT2
OUT3
OUT4
OUT5
OUT6
OUT7
OUT8
NC (See NOTE 1)
Reserved (See NOTE 2)
Reserved (See NOTE 2)
Reserved (See NOTE 2)
NC (See NOTE 1)
Signal COM
Power COM
Power
NC (See NOTE 1)
IN8
IN7
IN6
IN5
IN4
IN3
IN2
IN1
NOTE 1: NC = Not Connected
NOTE 2: Reserved = The pin may be used to support the signal required for a type of any interface unit. It cannot be used for
current or future implementations of this specification.
Figure 35
Pin Assignments for Connector of Passive Equipment Side (Pin Side View)
12
14 15 16
345678910111213
17 18 19 20 21 22 23 24 25
OUT8
OUT7
OUT6
OUT5
OUT4
OUT3
OUT2
OUT1
NC (See NOTE 1)
Reserved (See NOTE 2)
Power COM
Signal COM
Power
IN1
IN2
IN3
IN4
IN5
IN6
IN7
IN8
Reserved (See NOTE 2)
Reserved (See NOTE 2)
NC (See NOTE 1)
NC (See NOTE 1)
Figure 36
Pin Assignments for Connector of Active Equipment Side (Pin Side View)
SEMI E84-0305 © SEMI 1999, 2005 33
H < 100 mm
D < 25 mm
W < 150 mm
Figure 37
Size of Interface Sensor Unit
Table 11 Pin Assignments for Connector of Passive Equipment Side
Pin # Passive Side (connector
A) Signal Name
(See Figure 16)
Active Side (connector
B) Signal Name
(See Figure 16)
Symbol Direction Remarks
1 OUT 1 IN 1 L_REQ P -> A
2 OUT 2 IN 2 U_REQ P -> A
3 OUT 3 IN 3 VA P -> A Interbay AMHS (used with
passive OHS, stockers).
4 OUT 4 IN 4 READY P -> A
5 OUT 5 IN 5 VS_0 P -> A Interbay AMHS (used with
passive OHS, stockers).
6 OUT 6 IN 6 VS_1 P -> A Interbay AMHS (used with
passive OHS, stockers).
7 OUT 7 IN 7 HO_AVBL P -> A
8 OUT 8 IN 8 ES P -> A
9 NC
#1
NC
#1
NC
#1
10 Reserved
#2
Reserved
#2
11 Reserved
#2
Reserved
#2
12 Reserved
#2
Reserved
#2
13 NC
#1
NC
#1
NC
#1
14 IN 1 OUT 1 VALID A -> P Not for interbay AMHS (used
with passive OHS, stockers).
15 IN 2 OUT 2 CS_0 A -> P Not for interbay AMHS (used
with passive OHS, stockers).
16 IN 3 OUT 3 CS_1 A -> P Not for interbay AMHS (used
with passive OHS, stockers).
17 IN 4 OUT 4 AM_AVBL A -> P Interbay AMHS (used with
passive OHS, stockers).
18 IN 5 OUT 5 TR_REQ A -> P
19 IN 6 OUT 6 BUSY A -> P
20 IN 7 OUT 7 COMPT A -> P
21 IN 8 OUT 8 CONT A -> P
22 NC
#1
Power not applicable For wire based communication,
power is isolated.