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SEMI E54.4-0704 © SEMI 1997, 2004 1 SEMI E54.4-0704 STANDARD FOR SENSOR /ACTUATOR NETWORK COMMUNICATIONS FOR DEVICENET This standard was technically approved by the Globa l Informat ion & Control Committee and is the…
SEMI E54.3-0698 © SEMI 1998, 2004 22
8.13.1.1 Data — An attribute with the following list of attributes within its structure:
Table 35 Assembly-MFC Data List
Data Index Source Object ID Source Attribute ID Description
1 DM1 A12 Device Manager
Exception Status
2 MFD8 A1 Controller
Status
3 MFD3 A4 Sensor-AI-MF
Value
4 MFD8 A4 Controller
Setpoint
5 MFD8 A6 Controller
Control Variable
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SEMI E54.4-0704 © SEMI 1997, 2004 1
SEMI E54.4-0704
STANDARD FOR SENSOR/ACTUATOR NETWORK
COMMUNICATIONS FOR DEVICENET
This standard was technically approved by the Global Information & Control Committee and is the direct
responsibility of the North American Information & Control Committee. Current edition approved by the
North AmericanRegional Standards Committee on April 22, 2004. Initially available at www.semi.org June
2004; to be published July 2004. Originally published September 1997.
1 Purpose
1.1 This standard defines a communication
specification based on the DeviceNet protocol to enable
communications between intelligent devices on a
sensor/actuator network (SAN) that operate according
to SEMI- specified device models (common and device
specific) in a semiconductor manufacturing tool.
1.2 Background and Motivation — DeviceNet provides
for networking between simple industrial devices (e.g.,
sensors and actuators) and higher level devices such as
controllers. DeviceNet provides:
• A solution to low-level device networking.
• Access to intelligence present in low-level devices.
• Master/Slave and Peer-to-Peer capabilities.
1.2.1 DeviceNet is based on the Controller Area
Network (CAN) technology. CAN defines a Media
Access Control (MAC) methodology and physical
signaling characteristics. DeviceNet wraps a
communication model and protocol as well as a
complete Physical Layer definition around CAN to
provide a complete network definition.
1.3 This document enables communications between
intelligent devices on a SEMI-compliant SAN by
providing a presentation mapping of common and
specific device network visible structure and behavior
to a DeviceNet network.
2 Scope
2.1 This document specifies the protocol and services
that compliant intelligent devices must support to
interchange information over this semiconductor
equipment sensor/actuator network.
2.2 This document specifies the utilization of the
DeviceNet protocol to present externally visible device
structure and behavior, specified in the Common
Device Model (CDM) and appropriate Specific Device
Models (SDM' s), on a DeviceNet network.
2.3 This document is used in conjunction with a SEMI
standard SAN Common Device Model specification
and one or more SEMI standard-specific device model
specifications (e.g., for a mass flow controller).
Together, they describe the externally visible data
structure and behavior of devices using the DeviceNet
networking capability in a SEMI-compliant SAN
system.
2.4 This standard, together with a sensor/actuator
network interoperability guideline, the sensor/actuator
network common device model, one or more
sensor/actuator network specific device model
documents, and the DeviceNet specifications, form a
complete interoperability standard. The general
sensor/actuator network document architecture is
shown in the Sensor/Actuator Network Common
Device Model document in Figure 1.
SEMI E54.4-0704 © SEMI 1997, 2004 2
Figure 1
Sensor/Actuator Network Related Documents
2.5 Document Structure — The DeviceNet network
communication standard complies with the SEMI SAN
NCS template document structure; this structure is
shown in Figure 2. The standard document is composed
of two main parts. The first part (Sections 1 through 8)
specifies the SAN enabling protocol as well as the
presentation (i.e., mapping) of CDM object structure
and behavior onto the network (referred to as the
“CDM mapping”). The second part (Section 9)
specifies the presentation (i.e., mapping) of SDM object
structure and behavior onto the network for each SEMI-
specified SDM (referred to as the “SDM mapping”).
CDM
Mapping
(DeviceNet NCS)
SDM
Mappings
(M F C , P article C ounter,
Resig. Gas Anal., etc.)
{
This
Document
•
•
•
(Other NCS
Standards)
Figure 2
DeviceNet NCS Document Structure
2.6 Adding SDM Mappings — SDM mappings added
to part two of this document are considered document
additions and are balloted as such. An SDM mapping
may only be balloted for addition to this document if
the corresponding SEMI SDM has been standardized or
is in the process of being balloted for standardization.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Limitations
3.1 This document specifies a semiconductor
equipment SAN based solely on DeviceNet and is a
companion document to the DeviceNet specification;
thus, a complete specification of this standard
necessarily includes the DeviceNet specifications.
There are other semiconductor equipment SAN
communications options. The specifications for these
options are not included here.
3.2 This standard specifies enhancements that provide
additional capabilities over and above those currently
required by DeviceNet. In order to avoid document
consistency problems, information in the DeviceNet
specification that relates to this standard is not repeated
in this document. This document is limited to
describing enhancements or limitations to the
DeviceNet specification that are imposed by this
standard.
3.3 A complete specification of the conformance
testing procedure shall include the DeviceNet protocol
conformance testing specification. Conformance testing
shall also include enhancements and limitations to the
DeviceNet specification required by this standard.