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SEMI E54.10-0600 © SEMI 2 000 2 intended for higher level applications and thus are not applied to the In-Situ Particle Monitor Device Model. 3.5 Operation over the entire rang e speci fied for an attribute wi thin a s p…

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SEMI E54.10-0600 © SEMI 20001
SEMI E54.10-0600
SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC
DEVICE MODEL FOR AN IN-SITU PARTICLE MONITOR DEVICE
This specification was technically approved by the Global Information & Control Committee and is the direct
responsibility of the North American Information & Control Committee. Current edition approved by the
North American Regional Standards Committee on March 2, 2000. Initially available at www.semi.org May
2000; to be published June 2000.
1 Purpose
1.1 This specification is part of a suite of standards
that specify the implementation of SEMI standards for
the Sensor/Actuator Network. The specific purpose of
this specification is to describe a network independent
application model comprised of device objects that are
common to all In-Situ Particle Monitor Devices on a
semiconductor equipment Sensor/Actuator communica-
tions network.
2 Scope
2.1 An In-Situ Particle Monitor (ISPM) is a device
that measures and counts particles. These devices clas-
sify by size and count, particles in the environment
(gaseous, liquid, or vacuum) utilizing a technique such
as detecting light from a sample region of the environ-
ment’s space. These counts are accumulated in bins and
then reported. The number of bins varies by vendor and
model.
2.2 This specification specifically addresses the
minimum attributes, services, and behavior an In-Situ
Particle Monitor (ISPM) device must support to be
interoperable on the Sensor/Actuator Network.
2.3 This specification is intended to ensure a high-
degree of device interoperability on the Sensor/Actuator
Network, while still allowing flexibility for product
differentiation and technology evolution.
2.4 The model specified in this specification is used in
conjunction with SEMI E54.1 (Standard for Sensor/
Actuator Network Common Device Model (CDM)) to
completely describe the ISPM as it appears from the
network interface.
2.5 This specification, together with SEMI E54, SEMI
E54.1, and one of the Sensor/Actuator Network
Communication Specifications, form a complete
interoperability specification for the ISPM.
2.6 To comply with this specification, a device must
implement and support, at a minimum, the required
attributes, services, and behavior identified in these
documents. Support for optional attributes, services,
and behavior is not required to be compliant to this
specification. Optional attributes, services, and behavior
are specified in these documents to promote further
device interoperability as features evolve and are
adopted by more manufacturers. If optional attributes,
services, and behavior are implemented for this device
they must be implemented as identified in this
document.
2.7 This specification does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this specification to estab-
lish appropriate safety and health practices and deter-
mine the applicability of regulatory limitations prior to
use.
3 Limitations
3.1 This specification is a companion to a suite of spe-
cifications that together make up the Sensor/Actuator
Network Communication standard. Therefore, using
portions of this specification that relate to network
communications necessarily requires an understanding
of the associated network specification.
3.2 As this document is a specification for the In-Situ
Particle Monitor Device Model, it does not contain any
definition of objects, attributes, services, or behavioral
descriptions that are already defined in SEMI E54.1.
Additional attributes, attribute assignments, services,
and/or service parameters that are ISPM Device speci-
fic and/or implementation specific are contained in this
specification.
3.3 While this specification is sufficient to completely
describe the ISPM as it appears from the network, it
does not fully describe behavior of the ISPM which is
not visible from the network. This allows flexibility in
implementation techniques and product differentiation
between manufacturers. Manufacturer specific objects
may be defined by the manufacturer but are, by
definition, outside the scope of this standard.
3.4 This specification is compatible, but not compliant
with SEMI E39. This means that although this
specification does not require compliance with SEMI
E39, it is extensible such that implementations may be
developed that are fully compliant with both standards.
Note that the concepts and terminology of this
specification are compatible with those of SEMI E39.
However, SEMI E39 has specific requirements that are
SEMI E54.10-0600 © SEMI 2000 2
intended for higher level applications and thus are not
applied to the In-Situ Particle Monitor Device Model.
3.5 Operation over the entire range specified for an
attribute within a specific object is not a requisite for
compliance with this specification.
4 Referenced Standards
4.1 SEMI Standards
SEMI E39 — Object Services Standard: Concepts,
Behavior, and Services
SEMI E54 — Sensor/Actuator Network Standard
SEMI E54.1 — Standard for Sensor/Actuator Network
Common Device Model
NOTE 1: As listed or revised, all documents cited shall be the
latest publications of adopted standards.
5 Terminology
5.1 Abbreviations and Acronyms
5.1.1 LCS — an ISPM sensor named the Laser Current
Sensor.
5.1.2 MNS — an ISPM sensor named the Median
Noise Sensor.
5.1.3 SLS — an ISPM sensor named the Stray Light
Sensor.
5.2 Terminology Defined in This Document
5.2.1 In-Situ Particle Monitor (ISPM) — a self-con-
tained device, consisting of a laser that generates light,
a light detector, counters, diagnostics and control and
signal-processing electronics, commonly used in the
semiconductor industry to measure and count particles
in a specific area.
5.3 This document inherits the terminology defined by
SEMI E54.1 [3].
5.3.1 Attribute
5.3.2 Behavior
5.3.3 Boolean
5.3.4 Byte
5.3.5 Character
5.3.6 Common Device Model (CDM)
5.3.7 Data Type
5.3.8 Data Units
5.3.9 Device
5.3.10 Device Manager (DM) Object
5.3.11 Device Model
5.3.12 Double Integer (DINT)
5.3.13 Enumerated Byte
5.3.14 Full Scale Range
5.3.15 Instance
5.3.16 Last Valid Value (LVV)
5.3.17 Long Integer (LINT)
5.3.18 Long Real (LREAL)
5.3.19 Manufacturer
5.3.20 Nibble
5.3.21 Null Character
5.3.22 Object
5.3.23 Real (REAL)
5.3.24 S, A, and C Objects
5.3.25 Sensor Actuator Controller (SA C) Object
5.3.26 Service
5.3.27 Short Integer (SINT)
5.3.28 Signed Integer (INT)
5.3.29 State Diagram
5.3.30 Test String
5.3.31 Unsigned Double Integer (UDINT)
5.3.32 Unsigned Double Long Integer (UDLINT)
5.3.33 Unsigned Integer (UINT)
5.3.34 Unsigned Long Integer (ULINT)
5.3.35 Unsigned Short Integer (USINT)
6 Requirements and Specifications
6.1 In order to implement this standard in an In-Situ
Particle Monitor Device, it is necessary to also
implement SEMI E54.1 and one of the Sensor/Actuator
Network Communication Standards [2]. See Section 1.1
for more information on a complete interoperability
standard.
6.2 This specification also requires the implementation
of a Date_And_Time data structure used to represent
the current device Date and Time. Table 1 defines the
format of the Date_And_Time data type.
Table 1 Date_And_Time Format
Data Item Description Range
1 Number of milli-seconds
since midnight
Unsigned Double
Integer (UDINT)
2 Number of days since Unsigned Integer
SEMI E54.10-0600 © SEMI 20003
Data Item Description Range
1/1/72 (UINT)
7 Conventions
7.1 This document embraces the conventions and
notations stated in Section 6 of SEMI E54.1 [3].
8 Device High Level Structu re
8.1 General Description
8.1.1 The high-level object view of an In-Situ Particle
Monitor (ISPM) Device is shown in Figure 1.
8.1.2 Note that the “ISPM” device object is depicted
in Figure 1 only for the purposes of illustrating a high
level view of the device and its component objects. In
the context of this document, this object is not
addressable, does not have addressable attributes, does
not have accessible services, and does not exhibit any
defined behavior.
8.1.3 In the remainder of this section, this document
defines in detail all of the component objects unique to
the ISPM device. References, rather than definitions,
are included for the DM, the SAC, and other objects
defined in SEMI E54.1 [3].
8.1.4 Many of the objects defined in this document
inherit properties from other objects. The properties
inherited include attribute, services, and behavior
definitions. These other objects are specified here or in
SEMI E54.1 [3].
8.1.5 This document provides for future extensions as
well as manufacturer specific enhancements by
reserving object attribute identifiers and object service
identifiers. Specifically, all object definitions in this
document specify or reserve the first 64 attribute
identifiers (A1 through A64) and the first 64 service
identifiers (S1 through S64) allowing manufacturers to
specify identifiers beyond these ranges. Additionally,
byte enumerated attributes are specified or reserved
from 0 to 63 allowing manufacturers to specify an
enumeration beyond this range (64 to 255).
8.1.6 In-Situ Particle Monitor (ISPM) Device
Description
8.1.6.1 An In-Situ particle Monitor device profile is
composed of the component objects and object
relationships shown in Figure 1.
1+
ISPM Device
Sensor-AI-LCS
Reading Valid
Full Scale
Alarm Settling Time
Warning Settling Time
Sensor-AI
(defined in CDM)
Sensor-AI-SLS
Reading Valid
Full Scale
Alarm Settling Time
Warning Settling Time
Sensor-AI-MNS
Reading Valid
Full Scale
Alarm Settling Time
Warning Settling Time
SAC (See NOTE 1)
Number of Bins
Count Mode
Duration
-----------
Clear Counts
DM (See NOTE 1)
Gain
Filter Bandwidth
Tool State
Laser Status
Flow Path
Volume
Volume Units
Leak Status
Time Stamp
----------------
Laser On
Laser Off
Assembly
(defined in CDM)
Assembly-ISPM #1
Sensor-AI-Counter
Reading Valid
Full Scale
Alarm Settling Time
Warning Settling Time
Upper Size
Low Size
Assembly-ISPM #2
Assembly-ISPM #9
•
•
•
Assembly-ISPM #48
(See
NOTE
2)
NOTE 1: The DM and SAC are taken from the CDM. Additional attributes and services are added to support the ISPM device.
NOTE 2: Assembly-ISPM #1 and Assembly-ISPM #6 objects are required. Other Assembly-ISPM objects are optional.
Figure 1
In-Situ Particle Monitor Device High Level Structure