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SEMI E140-0305 © SEMI 2005 6 Row #1 Parameter Units Example Value TA27 Fab-Specific Data TA28 Value of Wafer Entering Pi ece of Equipment $/wafer 1,422 TA29 Value of Wafer Exiting Piece of Equipment $/wafer 2,244 TA30 Co…

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SEMI E140-0305 © SEMI 2005 5
RELATED INFORMATION 1
COST OF OWNERSHIP
NOTICE: This related information is not an official part of SEMI E140 and was derived from North American
Metrics Committee. This related information was approved for publication by full letter ballot on December 10,
2004.
R1-1 Sample Input to Model
R1-1.1 To effectively illustrate use of the COO model, it was run with a hypothetical set of input data. This input
data is listed in Table 1. When studying this example, the user should remember that parameter values are for the
gas delivery system only, not the entire process piece of equipment.
R1-2 Sample Model Output
R1-2.1 The model calculates each term in the numerator of Equation 2 and then sums these results and divides by
the denominator to get COO. To enhance the user’s understanding of the components of COO, Tables 2, 3, 4, and 5
and the spreadsheet show interim results. For the set of inputs listed in Table 1, F$ are shown in Table 2, R$ are
shown in Table 3, and Y$ are shown in Table 4. Each of these terms is calculated from the cost factors listed in
SEMI E35. The italicized rows in Tables 2, 3, and 4 correspond to these cost factors and show the subtotal for that
cost factor. The breakdown for each cost factor is shown in the rows below it.
R1-2.2 Tables 2, 3, and 4 show costs for years 1 through 7. The last year is based on user input. It is the longest of
useful life or depreciable life. In the example shown, depreciable life was set to 7 years and useful life was set to 5
years. The depreciable life was deliberately made longer than the useful life to illustrate the feature of the
spreadsheet that allows these two parameter values to differ. This often occurs in practice since a piece of
equipment is sometimes “obsoleted” before it is fully depreciated. The user can enter any value up to 10 for these
two parameters.
R1-2.3 Table 5 shows the COO results.
Table 1 Input Data for COO Model
Row
#1
Parameter Units Example Value
TA8 This Section Contains Equipment Procurement Cost Data
TA10 Equipment Cost Data
TA11 For Straight Line Depreciation, input SLN. For Fixed Declining Balance
Depreciation, input DB. For Double Declining Balance Depreciation, input
DDB.
not applicable SLN
TA12 Floor Space Rental Rate $/m
2
/yr 2691
TA13 Gas Box (or Stick or Component) Purchase Price $ 100,000
TA14 Gas Box (or Stick or Component) Depreciable Life (Must be 10 or Less) yrs 7
TA15 Gas Box (or Stick or Component) Scrap Value $ 1,000
TA16 Gas Box (or Stick or Component) Useful Life (Must be 10 or Less) yrs 5
TA17 Cost Foot Print or Floor Space Required for Gas Box (or Stick or
Component)
m
2
0.23
TA18 Support Equipment Purchase Price $ 5,000
TA19 Support Equipment Depreciable Life (must be same as Gas Box
Depreciable Life for purposes of COO)
yrs 7
TA20 Support Equipment Scrap Value $ 100
TA21 Support Equipment Useful Life (must be same as Gas Box Useful Life for
purposes of COO)
yrs 5
TA22 Floor Space Required for Piece of Support Equipment m
2
0.093
TA23 This Section Contains Data Specific to the Process Equipment and Costs Specific to a Particular Fab
TA25 Equipment-Specific Data
TA26 Equipment Throughput wafers/hr 33
SEMI E140-0305 © SEMI 2005 6
Row
#1
Parameter Units Example Value
TA27 Fab-Specific Data
TA28 Value of Wafer Entering Piece of Equipment $/wafer 1,422
TA29 Value of Wafer Exiting Piece of Equipment $/wafer 2,244
TA30 Cost of Test Wafer $/wafer 500
TA31 Scheduled Production Hours per Year hrs/yr 8,400
TA32 Inflation Rate % 3
TA33 Burdened Equipment Engineering Salary $/yr 111,000
TA34 Burdened Process Engineering Salary $/yr 111,000
TA35 Burdened Supervision Salary $/yr 111,000
TA36 Burdened Operator Rate $/hr 25.00
TA37 Burdened Maintenance Technician Rate $/hr 35.00
TA38 OEM Field Service Rate Billed to Fab $/hr 175.00
TA39 OEM Field Process Rate Billed to Fab $/hr 45.00
TA40 Electricity Charge $/kWh 0.10
TA41 DI Water Charge $/m
3
1.00
TA42 Chilled Water Charge $/m
3
1.00
TA43 Purge Gas Charge $/m
3
1.00
TA44 Waste/Exhaust Charge $/m
3
1.00
TA45 This Section Contains Data Related to Equipment Installation
TA47 Initial Training Data (One-Time Training at Installation. On-Going Training is Accounted for under
Maintenance.)
TA48 Time Required for Training hrs/person 8.0
TA49 Hourly Rate Paid for Training $/hr 200.00
TA50 Number of Equipment Engineers Trained person 2.0
TA51 Number of Process Engineers Trained person 2.0
TA52 Number of Supervisors Trained person 2.0
TA53 Number of Operators Trained person 6.0
TA54 Number of Maintenance Technicians Trained person 6.0
TA55 Materials Consumed for Training $ 2,000
TA56 Installation Data
TA57 Fab Costs Incurred to Move/Rearrange A Piece of Equipment to
Accommodate Gas Box
$ 30,000
TA58 Equipment Engineering Time Required for System Installation hrs 200
TA59 Process Engineering Time Required for System Installation hrs 2.0
TA60 Supervision Time Required for System Installation hrs 2.0
TA61 Operator Time Required for System Installation hrs 2.0
TA62 Maintenance Technician Time Required for System Installation hrs 6.0
TA63 OEM Field Service Time Required for System Installation hrs 6.0
TA64 OEM Field Process Time Required for System Installation hrs 6.0
TA65 Qualification Data
TA66 Equipment Engineering Time Required for System Prove-In hrs 40.0
TA67 Process Engineering Time Required for System Prove-In hrs 40.0
TA68 Supervision Time Required for System Prove-In hrs 2.0
TA69 Operator Time Required for System Prove-In hrs 2.0
TA70 Maintenance Technician Time Required for System Prove-In hrs 2.0
TA71 OEM Field Service Time Required for System Prove-In hrs 6.0
TA72 OEM Field Process Time Required for System Prove-In hrs 6.0
TA73 Materials Consumed for System Prove-In $ 2,000
SEMI E140-0305 © SEMI 2005 7
Row
#1
Parameter Units Example Value
TA74 This Section Contains Data for Routine Operation of the Piece of Equipment
TA76 Materials Used During Operation of the Piece of Equipment
TA77 Unit Volume of Purge Gas Consumed m
3
/wafer 1.00×10
-4
TA78 Unit Volume of Waste Generated m
3
/wafer 2.00×10
-4
TA79 Test/Filler Wafers number/wafer 1.00×10
-6
TA80 Electricity Consumed on an Ongoing Basis kWh/wafer 0.067
TA81 DI Water Consumed on an Ongoing Basis $/m
3
0.00
TA82 Chilled Water Consumed on an Ongoing Basis $/m
3
0.00
TA83 Consumables (Parts that are Worn Out During Normal Operation and Require Replacement after Less than
One Year of Operation)
TA84 Consumable Purchase Price $ 1,200
TA85 Consumable Life yrs 1.0
TA86 Labor Required to Operate the Piece of Equipment
TA87 Operator hrs/wafer 0.0033
TA88 Labor Required to Support the Piece of Equipment
TA89 Equipment Engineering hrs/wafer 0.0
TA90 Process Engineering hrs/wafer 0.0
TA91 Supervision hrs/wafer 0.0
TA92 Maintenance Technician hrs/wafer 0.0
TA93 OEM Field Service hrs/wafer 0.0
TA94 OEM Field Process hrs/wafer 0.0
TA95 Support Services
TA96 Annual ESH Charge $/yr 500.00
TA97 Other Annual Charge $/yr 100.00
TA98 This Section Contains Data Related to Reliability, Availability, and Maintainability (RAM)
TA100 RAM Data
TA101 Scheduled Maintenance Downtime hrs/week 0.0
TA102 Mean Time Between Failure hrs 4,200
TA103 Average Response Time hrs 0.3
TA104 Mean Time to Repair hrs 7.0
TA105 Mean Time to Test hrs 0.3
TA106 Mean Time to Restart Production hrs 1.3
TA108 Standby Time (independent of process equipment standby time) hrs/week 0.0
TA109 Process Engineering Time hrs/week 2.0
TA110 Non-Personnel Maintenance Costs
TA111 Service Contract $/yr 0.00
TA112 Spares Inventory Cost to Fab $/yr 3,800
TA113 Repair Parts $/maintenance event 5.0
TA114 Electricity Consumed Solely during Maintenance kWh/maintenance event 1,000
TA115 On-Going Training
TA116 Frequency of Training events/yr 1.0
TA117 Time Required for Training hrs/person 8.0
TA118 Hourly Rate Paid for Training Per Student $/hr 200.00
TA119 Number of Equipment Engineers Trained person 2.0
TA120 Number of Process Engineers Trained person 2.0
TA121 Number of Supervisors Trained person 0.0
TA122 Number of Operators Trained person 6.0
TA123 Number of Maintenance Technicians Trained person 6.0