semi合集-English.pdf - 第1170页
SEMI E5-1104 © SEMI 1982, 2004 112 Stream,Function Name (Mnemonic) Direction S4,F35 Handoff Cancel Ready ( HCR) P<->S Description Sent by either tr ansfer partner to cancel a previou s Handoff Re ady message. This …
SEMI E5-1104 © SEMI 1982, 2004 111
Stream,Function Name (Mnemonic) Direction
S4,F31 Handoff Command Complete (HCC) S,P<-S
Description
Completion status of the micro command. This is sent from the secondary to the primary transfer partner when the command is
completed or terminated.
Structure
L,3
1. <TRLINK> [Atomic Transfer identifier]
2. <MCINDEX> [Links to specific micro command (S4,F31)]
3. L,2
1. <HOACK> [success or failure]
2. L,n [n = # errors reported]
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
.
n. L,2
1. <ERRCODE
n
>
2. <ERRTEXT
n
>
Exception
None
S4,F32 Not Used
Stream,Function Name (Mnemonic) Direction
S4,F33 Handoff Verified (HV) P<->S
Description
Sent by the primary transfer partner to inform the secondary that no more micro commands will be issued for this atomic transfer
and to request a verification that the transfer is complete and successful. Also sent by the secondary partner following the receipt
of this message to verify that the transfer is complete and successful (or to report problems).
Structure
L,2
1. <TRLINK>
2. L,2
1. <HOACK> [success or failure]
2. L,n [n = # errors reported]
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
.
n. L,2
1. <ERRCODE
n
>
2. <ERRTEXT
n
>
Exception
None
S4,F34 Not Used
SEMI E5-1104 © SEMI 1982, 2004 112
Stream,Function Name (Mnemonic) Direction
S4,F35 Handoff Cancel Ready (HCR) P<->S
Description
Sent by either transfer partner to cancel a previous Handoff Ready message. This message is valid only before the handoff has
begun.
Structure
<TRLINK>
Exception
None
S4,F36 Not Used
Stream,Function Name (Mnemonic) Direction
S4,F37 Handoff Cancel Ready Acknowledge (HCA) P<->S
Description
Sent by the receiver of the Handoff Cancel Ready message to accept or deny the cancel. The cancel request is denied if the
handoff process has begun.
Structure
L,2
1. <TRLINK>
2. <HOCANCELACK>
Exception
None
S4,F38 Not Used
Stream,Function Name (Mnemonic) Direction
S4,F39 Handoff Halt (HH) P<->S
Description
Sent by either transfer partner to cause all transfer related activity of the other to cease immediately. It is used when the
equipment or material is at risk of damage.
Structure
<TRLINK>
Exception
None
S4,F40 Not Used
SEMI E5-1104 © SEMI 1982, 2004 113
Stream,Function Name (Mnemonic) Direction
S4,F41 Handoff Halt Acknowledge (HHA) P<->S
Description
Sent to equipment’s transfer partner following completion of halt activities resulting from a previously received S4,F39.
Structure
L,2
1.<TRLINK>
2.<HOHALTACK>
Exception
None
S4,F42 Not Used
10.9 Stream 5 Exception Handling — This stream contains messages regarding binary and analog equipment
exceptions. Exceptions are classified into two categories: errors and alarms. Messages S5,F1 through S5,F8 of this
section provide basic alarm messages. The messages S5,F9 through S5,F18 provide extended capabilities for
Exception Handling. When using messages F1–F8, alarms may be divided into categories as follows:
1. personal safety — Condition may be dangerous to people.
2. equipment safety — Condition may harm equipment.
3. parameter control warning — Parameter variation outside of preset limits — may harm product.
4. parameter control error — Parameter variation outside of reasonable control limits — may indicate an
equipment malfunction.
5. irrecoverable error — Intervention required before normal use of equipment can resume.
6. equipment status warning — An unexpected condition has occurred, but operation can continue.
7. attention flags — A signal from a process program indicating that a particular step has been reached.
8. data integrity — A condition which may cause loss of data; usually related to Stream 6.
10.9.1 For messages F1 through F8, it will be the equipment’s responsibility to categorize the alarm. Some alarm
conditions may cause more than one type of alarm to be issued. For example, a parameter control error on over
temperature may also trip a protective device that makes the alarm irrecoverable without some intervention.
Stream,Function Name (Mnemonic) Direction
S5,F0 Abort Transaction (S5F0) S,H<->E
Description
Same form as S1,F0.
Structure
Exception