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SEMI S7-96 © SEMI 199 4, 1996 1 SEMI S7-96 SAFETY GUIDELINES FOR ENVIRONM ENTAL, SAFETY, A ND HE A L TH (ESH) EVALUA TION OF SEM ICONDUCTOR M A NUF ACTURING EQUIPMENT NOTICE: This sa fety guideline does not p urport to a…

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SEMI S6-93 © SEMI 1993, 1996 10
SEMI S6-93 © SEMI 1993, 1996 Copyright by SEMI®
(Semiconductor Equipment and Materials International),
3081 Zanker Road, San Jose, CA 95134. Reproduction of the
contents in whole or in part is forbidden without express
NOTICE: This guideline does not purport to address
all of the safety issues associated with its use. It is the
responsibility of the user of this guideline to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
SEMI makes no warranties or representations as to the
suitability of the guideline set forth herein for any
particular application. The determination of the
suitability of the guideline is solely the responsibility of
the user. Users are cautioned to refer to manufacturer’s
instructions, product labels, product data sheets, and
other relevant literature respecting any materials
mentioned herein. This guideline is subject to change
without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
SEMI S7-96 © SEMI 1994, 19961
SEMI S7-96
SAFETY GUIDELINES FOR ENVIRONMENTAL, SAFETY, AND HEALTH
(ESH) EVALUATION OF SEMICONDUCTOR MANUFACTURING
EQUIPMENT
NOTICE: This safety guideline does not purport to
address all of the safety issues associated with its use. It
is the responsibility of the user of this guideline to
establish appropriate safety and health practices and
determine the applicability of regulatory limitations
prior to use.
NOTE: This entire document was revised in 1995.
1 Purpose
1.1 The purpose of this document is to provide
guidance to the equipment manufacturer or supplier, the
evaluator, and the user to define responsibilities and to
ensure the objective evaluation of designs and
equipment.
1.2 Preservation of employee safety and conformance
to environmental regulations are important criteria
when selecting semiconductor manufacturing
equipment. A basic expectation is that the equipment
manufacturer will design and build inherently safe (to
the operator, facility, and environment) equipment and
will provide documentation that the equipment has been
evaluated against a specific set of criteria, verifying
conformance thereto.
1.3 A safety evaluation is important for a variety of
reasons, including: operator safety, equipment
reliability, conformance to regulatory (e.g., OSHA,
EPA, local fire and building codes) and insurance
requirements. These are intended to ensure a safe and
environmentally responsible workplace.
2 Scope
2.1 This document defines the requirements for ESH
evaluation of equipment design and operation.
2.2 These guidelines include:
• Purpose
• Scope
• Referenced Documents
• Terminology
• Codes, Regulations, and Standards
• Requirements for Third Party Evaluators
• Contracting with an Evaluator
• Documentation Provided to the Evaluator by the
Supplier
• Evaluation Methods
• Contents of Reports
• Provision of Reports to Potential Users
2.3 The evaluation program is designed to be used in
addressing the ESH aspects of new, refurbished, or
resold process tools prior to the tool being delivered to
the user.
2.4 The evaluator may be within the supplier’s
organization. As some equipment suppliers do not
maintain a comprehensive ESH equipment evaluation
program in-house, third party contractor(s) may be
used. In either case, the evaluator should meet the
requirements listed in Section 6.
3 Referenced Documents
NOTE: All documents cited shall be the latest published
versions.
3.1 SEMI Document
SEMI S2 — Safety Guidelines for Semiconductor
Manufacturing Equipment
3.2 ANSI Document
1
Z34.1 — Third Party Certification Program
4 Terminology
4.1 supplier — The party providing the equipment to,
and communicating directly with, the user. It may be
the manufacturer or an equipment representative or
distributor. The supplier has the responsibilities of
obtaining the required information from the
manufacturer or other sources and of providing it to the
evaluator.
4.2 user — The purchaser of semiconductor
manufacturing who will use the equipment.
5 Codes, Regulations, and Standards
5.1 Semiconductor equipment should conform to the
applicable codes, regulations, and standards. The
1
American National Standards Institute, 1430 Broadway, New York,
NY 10018
SEMI S7-96 © SEMI 1994, 1996 2
evaluation should include accordance with the codes,
guidelines, and the local regulations of potential users.
To assist in this, the supplier should provide the
evaluator with a list of jurisdictions in which the
supplier intends to market the equipment.
6 Requirements for Third Pa rty Evaluators
6.1 The evaluator should have at least five years’
experience in the semiconductor equipment or
fabrication or similar industry and:
a. be established in accordance with ANSI Z34.1,
Third Party Certification Program; or
b. consist of individual(s) who are registered or
certified professional(s) in the discipline(s) in
which the evaluations were performed; or
c. consist of individual(s) with baccalaureate or
higher degrees in related technical discipline(s)
(engineering or science).
NOTE: In the United States, the United Kingdom, and several
other countries, the “baccalaureate” or “bachelor of science”
degree is awarded upon completion of a technical course of
study, typically of four years, at a college or university. It is
the degree prerequisite for professional registration in most
U.S. states and for study towards a master’s degree or
doctorate.
7 Contracting with an Evalu ator
7.1 The supplier initiates the evaluation by providing a
“scope of work” to the evaluator. This scope should
define the services to be provided, including the
standards and guidelines that will be used to evaluate
the equipment and the responsibilities of each party.
7.2 The evaluator is responsible only to the supplier.
7.3 Changes made to the equipment to bring it into
accord with codes, regulations, and guidelines are the
responsibility of the supplier.
8 Documentation Provided to the Evaluator
by the Supplier
8.1 Any previous evaluations of equipment related to
the included documents, with all appropriate
documentation.
8.2 Material Safety Data Sheets (MSDS’s) for all
chemicals used in the maintenance of the equipment
and for those used in baseline and known, user-intended
processes.
8.3 When information is known for user intended or
baseline process(s), the evaluator should be provided
the estimated consumption of raw materials and the
amount(s) of by-products generated as described in
Section 20.2.1 of SEMI S2.
8.4 Copies of the equipment’s installation,
maintenance, and operation manuals.
8.5 Copies of any hazard analysis or safety reviews of
the subject equipment.
8.6 A list of all assemblies and sub-assemblies.
8.7 Design drawings and schematics.
9 Evaluation Methods
9.1 The evaluator should ensure the review of the
supplier's documents (listed above) and the outlining of
deficiencies with corrective and/or improvement
recommendations.
9.2 The ESH testing and evaluation may proceed
concurrently with the document review by agreement of
the parties.
9.3 After the supplier has addressed all deficiencies
noted in the third party report, the supplier should
review the actions taken with the evaluator. If
appropriate, the evaluator may re-evaluate some or all
of the areas addressed.
10 Contents of Reports
10.1 An interim report should be provided to the
supplier after evaluator has performed the agreed
services. It should include an overview of the services
performed, the standards, guidelines, and codes against
which the equipment was evaluated, and the evaluator’s
findings. Items found in conformance with the
documents should be documented as well as those
found to be deficient.
10.2 The evaluator’s final report should be provided
after the supplier and the evaluator have agreed that the
changes made have brought the equipment into
conformance with the applicable documents. This
report should be attached to the supplier's bid to a
potential user.
10.3 If the evaluator and the supplier differ in their
interpretation of requirements of the applicable
documents, the creator of the document in question
should be consulted for an interpretation. If the
difference remains unresolved, the evaluator should
include this and any other unresolved issues in its final
report.
10.4 The final report should be signed by the evaluator
and should contain at least the following sections:
10.4.1 Management Summary — A brief description
of the evaluation, recommendations, and results. A
statement that the equipment does or does not conform
(with noted exceptions) with the ESH specifications,
guidelines, and codes that were used for the evaluation.