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SEMI E130-1104 © SEMI 2003, 2004 52 R1-1.11.2. 6 Unload Correlation Substrate — Unloading the correlation substrate tr iggers the prob er to restore the substrates to the state that existed prior to the host issuin g the…

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SEMI E130-1104 © SEMI 2003, 2004 51
R1-1.11.2.5 Process Correlation Substrate — The substrates in the pipeline are returned to the source FOUP.
Substrate SubstPJ01.01 is suspended and remains in the IN PROCESS state.
Host Prober
LOAD-TEST-SUBST(SubstLoc: AUX Tray)
PS: AWAITING COMMAND to HANDLING MATERIAL()
CarrierA.02: UNOCCUPIED to OCCUPIED
SubstPJ01.02: AT WORK to AT SOURCE
Pre-align: OCCUPIED to UNOCCUPIED
CarrierA.01: UNOCCUPIED to OCCUPIED
SubstPJ01.01: AT WORK to AT SOURCE
Chuck: OCCUPIED to UNOCCUPIED
AUX Tray: OCCUPIED to UNOCCUPIED
Pre-align: UNOCCUPIED to OCCUPIED
Pre-align
SubstAUX: AT SOURCE to AT WORK()
Load Substrate on Chuck
Align and Profile
Unload SubstPJ01.02 from Pre-align()
Chuck: UNOCCUPIED to OCCUPIED
SubstAUX: AT WORK to AT WORK()
SubstAUX: NEEDS PROCESSING to IN PROCESS()
Pre-align: OCCUPIED to UNOCCUPIED
Process Correlation Substrate
PS: HANDLING MATERIAL to AWAITING COMMAND
1
2
3
5
6
AT SOURCE
4
8
7
9
AT WORK
AT DESTINATION
10
11
NEEDS PROCESSING
IN PROCESS
PROCESSING COMPLETE
C
PROCESSED
ABORTED
STOPPED
12
Subst PJ01. 02
1
2
3
56
AT SOURCE
4
8
7
9
AT WORK
AT DESTINATION
10
11
NEEDS PROCESSING
IN PROCESS
PROCESSING COMPLETE
C
PROCESSED
ABORTED
STOPPED
12
Subst PJ01. 01
Unload SubstPJ01.01 from the Chuck()
Load SubstAUX on Pre-align()
Figure R1-26
Correlation Substrate Processing Scenario
SEMI E130-1104 © SEMI 2003, 2004 52
R1-1.11.2.6 Unload Correlation Substrate — Unloading the correlation substrate triggers the prober to restore the
substrates to the state that existed prior to the host issuing the LOAD-TEST-SUBST command.
Host Prober
UNLOAD-TEST-SUBST(SubstLoc: AUX Tray)
PS: AWAITING COMMAND to HANDLING MATERIAL
SubstAUX: IN PROCESS to PROCESSED
AUX Tray: UNOCCUPIED to OCCUPIED
SubstAUX: AT WORK to AT DESTINATION
Chuck: OCCUPIED to UNOCCUPIED
Unload Correlation Substrate()
Pre-align: UNOCCUPIED to OCCUPIED()
SubstPJ01.01: AT SOURCE to AT WORK()
CarrierA.01: OCCUPIED to UNOCCUPIED()
Pre-align()
Move SubstPJ01.01 to Pre-align()
Chuck: UNOCCUPIED to OCCUPIED()
SubstPJ01.01: AT WORK to AT WORK()
Pre-align: OCCUPIED to UNOCCUPIED()
Move SubstPJ01.01 to Chuck()
Align and Profile Move SubstPJ01.02 to Pre-align()
Pre-align: UNOCCUPIED to OCCUPIED
SubstPJ01.02: AT SOURCE to AT WORK()
CarrierA.02: OCCUPIED to UNOCCUPIED()
Pre-align()
PS: HANDLING MATERIAL to AWAITING COMMAND(X:refX, Y:refY)
Figure R1-27
Unload Correlation Substrate Scenario
R1-1.11.2.7 Post-Conditions — The prober has restored the substrates to their original condition that preceded the
host issuing the LOAD-TEST-SUBST command. SubstPJ01.01 is on the chuck. The chuck is positioned at the
coordinates: refX,refY.
R1-1.11.2.7.1 If a control map is being used, the control map is reset and the chuck is positioned on the first site
contained in the map.
R1-2 Additional Non-Standardized Behaviors
This section contains a list of behaviors that are desirable but outside the scope of the PSEM300 standard.
R1-2.1 Off-Board Inspection
R1-2.1.1 When the need exists to remove a substrate for external inspection, the prober should remember that the
substrate has been removed from the equipment. The Process Job pertaining to the given substrate should not
terminate until the substrate has been returned to the correct carrier substrate location as designated in the Control
Job’s MtrlOutSpec (or to the source location if the MtrlOutSpec was not provided).
R1-2.1.2 Support for off-board inspection is not part of this specification due to the challenge of tracking a substrate
that has been removed from the tool. However, this feature can be requested as a user defined feature. No guidance
is available within this specification regarding the tracking of the substrate or the related impact on the PJ/CJ and
Carrier states.
SEMI E130-1104 © SEMI 2003, 2004 53
Pre-Align Chuck
PJ02
PJ01
SubstPJ01.01
SubstPJ01.02
AUX Tray
Pre-Align Chuck
PJ02
PJ01
SubstPJ01.03SubstPJ02.01
AUX Tray
Pre-Align Chuck
PJ02
PJ01
SubstPJ02.01
SubstPJ02.02
AUX Tray
Pre-Align Chuck
PJ02
PJ01
SubstPJ02.02
SubstPJ02.03
AUX Tray
Pre-Align Chuck
PJ02
PJ01
SubstPJ02.03
AUX Tray
Pre-Align Chuck
PJ02
PJ01
AUX Tray
Pre-Align Chuck
PJ02
PJ01
SubstPJ01.01
AUX Tray
Pre-Align Chuck
PJ02
PJ01
AUX Tray
Pre-Align Chuck
PJ02
PJ01
SubstPJ01.01
SubstPJ01.02
AUX Tray
SubstPJ01.03
SubstPJ01.01
Inspection
1
2
3
56
AT SOURCE
4
8
7
9
AT WORK
AT DESTINATION
10
11
NEEDS PROCESSING
IN PROCESS
PROCESSING COMPLETE
C
PROCESSED
ABORTED
STOPPED
12
Sub s tPJ0 1. 01
?
External
Inspection
Equipment
Figure R1-28
Off-Board Inspection Scenario