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SEMI E127-0705 © SEMI 2003, 2005 47 Parameter Req/Ind R sp/Con f Description (list of 0+) RetentionRules M — New list of rules, or empt y list to clear all rules . Status — M Status of request. 18.3.7 TransferPathCalibra…

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SEMI E127-0705 © SEMI 2003, 2005 46
18.3.2 ClientDisconnect Service — This service is used by a current client to gracefully terminate a connection.
Table 31 defines the parameters for the ClientDisconnect service.
Table 31 ClientDisconnect Service Parameters
Parameter Req/Ind
R
sp/Con
f
Description
ClientID M M(=) Identifier for the requestor.
ClientConnectStatus — M Indicates the success or the specific errors.
18.3.3 RequestRetentionConditions — A client may request its current set of retention conditions for a Raw Data
Table Object or Converted Data Table Object by sending the RequestRetentionRules request at any time. Table 32
defines the parameters for the RequestRetentionConditions service.
Table 32 RequestRetentionConditions Service Parameters
Parameter Req/Ind
R
sp/Con
f
Description
ClientID M M(=) Identifier for the requestor.
TableType M — Identifies the type of table affected.
(list of 0+) retention rules — M Current list of rules, or empty list if no rules.
Status — M Status of request.
18.3.4 ChangeService — The Control Client may request a change in the IMM Service state at any time. The
actual state change from IN SERVICE to OUT OF SERVICE may be delayed until a currently active process job
completes. Parameters for the Service service are defined in Table 33.
Table 33 Parameters for ChangeService
Parameter Req/Ind Rsp/Con
f
Description
ServiceState M — New Service state requested.
Status — M Status of request.
18.3.5 SetAutoTableSend — A client may enable or disable the automatic sending of any or all of the IMM Data
Table subtypes through the SetAutoTableSend service. Table 34 defines the parameters of the SetAutoTableSend
service.
Table 34 SetAutoTableSend Service Parameters
Parameter Req/Ind
R
sp/Con
f
Description
ClientID M M(=) Identifier for the requestor.
AutoSendRawData M — Enables or disables automatic sending for Raw Data Tables.
AutoSendConvertedData M — Enables or disables automatic sending for Converted Data Tables.
AutoSendCalibrationData M — Enables or disables automatic sending for Calibration Data Tables.
Status — M Status of request.
18.3.6 SetRetentionConditions — A client may set, change, or clear its current set of retention conditions at any
time through the SetRetentionConditions service. Table 35 defines the parameters of the SetRetentionConditions
service.
Table 35 SetRetentionConditions Service Parameters
Parameter Req/Ind
R
sp/Con
f
Description
ClientID M M(=) Identifier for the requestor.
TableType M — Identifies the type of table affected.
SEMI E127-0705 © SEMI 2003, 2005 47
Parameter Req/Ind
R
sp/Con
f
Description
(list of 0+) RetentionRules M — New list of rules, or empty list to clear all rules.
Status — M Status of request.
18.3.7 TransferPathCalibration Service — This service is sent by the Control Client to request a STPO to perform
an automatic calibration. Its parameters are defined in Table 36.
Table 36 TransferPathCalibration Service Parameters
Parameter Req/Ind
R
sp/Con
f
Description
ObjID M M(=) Identifier of the STPO.
OrientationIn C — Expected orientation of substrate loaded.
OrientationOut C — Expected orientation of substrate unloaded.
Deltas M An ordered list of changes in the load plane in the x-, y-, and z-position of the
center of the substrate in millimeters respectively.
Status M Status of request.
18.3.8 XfrCmdListRequest — This service provides the Control Client with an ordered list of necessary micro
commands required during a substrate transfer that effect either a Load or Unload operation. Table 37 defines the
parameters of this service. The individual micro commands are then passed to the STPO in the XfrCommand
service below. These micro commands are proprietary, with the exception of two required micro commands, and
need not be understood by the Control Client but must be used in the order in which they appeared in the list.
Table 37 XfrCmdListRequest Service Parameters
Parameter Req/Ind
R
sp/Con
f
Description
ObjID M M(=) Identifies the SubstrateTransferPath object.
XfrType M M Identifies the request is for either a load or unload operation.
XfrCmdList — M List of 0+ micro commands.
18.3.9 XfrCommand Service Parameters — This service is used to effect an actual substrate transfer with the IMM
object. Parameters for the XfrCommand service are defined in Table 38.
Table 38 XfrCommand Service Parameters
Parameter Req/Ind
R
sp/Con
f
Description
ObjID M — Identifies the STPO.
XfrLink M M(=) Identifies the specific transfer.
XfrCmdName M — Specific micro command to be executed.
XfrStatus — M Reports the success or failure of the micro command. If failure, supplies error
detail.
18.3.10 XfrHalt Service Parameters — The XfrHalt service may be sent by either the Control Client or the IMM to
effect an immediate halt. Parameters for the XfrHalt service are defined in Table 39.
Table 39 XfrHalt Service Parameters
Parameter Req/Ind
R
sp/Con
f
Description
XfrLink M M(=) Identifies the specific transfer.
XfrHaltAccept M M True if halt accepted. May be denied only if the specified transfer does not
exist.
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18.3.11 XfrVerify Service Parameters — This service is used to verify to the partner that the substrate transfer was
completed successfully from the point of view of the sender. Parameters for the XfrVerify service are defined in
Table 40.
Table 40 XfrVerify Service Parameters
Parameter Req/Ind
R
sp/Con
f
Description
XfrLink M M(=) Identifies the specific transfer.
XfrStatus M M Reflects the transfer status from the point of view of the sender of the request.
19 Services Provided by Client
19.1 List of Client Services
19.1.1 In addition to the services defined in §19, the client is also expected to provide specific services. These are
listed in Table 41. The column labeled Defined identifies the standard where the service is defined. The column
labeled Control indicates if the message is only sent to the Control Client.
Table 41 List of Client Services
Operation Description Defined Control*
UpdateSubstrateObject Used by the STPO when unloading a substrate to provide
information about the substrate.
E90 Y
TableSend Used by the IMM for the AutoTableSend capability. E58 —
20 IMMC Compliance
20.1 Overview of Requirements
20.1.1 An Integrated Measurement Module may be said to be fully compliant to IMMC if and only if all
fundamental IMMC requirements, as shown in Table 42 Compliance below, are fully implemented as specified in
the cited sections. All object attributes, state models, events, and event data shall be implemented.
20.1.2 Additional capabilities, specified in Table 42, are optional for the IMM supplier. If implemented, then they
shall be fully implemented as specified in the cited sections.
20.1.3 Further capabilities, not covered in this standard, may be provided. However, they shall not contradict those
capabilities that are specified here.
20.1.4 IMM Data Table Objects may be implemented by independent software modules for the purpose of allowing
conversion of data in an IMM Raw Data Table, producing an IMM Converted Data Table. Such objects may be
termed IMMC-compliant IMM Data Table Objects. Such an implementation that is not part of a fully IMMC-
compliant Integrated Measurement Module shall not term itself as an IMMC-compliant IMM object.
20.1.5 Table 42 shows the sections that are required for IMMC Compliance.
Table 42 IMMC Compliance
Fundamental IMMC Requirements IMMC Section Level of Compliance
SEMI E40, SEMI E90, and SEMI E116 7.2
Full Partial Not Implemented
Basic Capabilities: Clock, Events, Alarms,
Exceptions, Recipes
7.3
Full Partial Not Implemented
State Models 7.4
Full Partial Not Implemented
Objects and SEMI E39 7.5
Full Partial Not Implemented
Communication Ports and Clients 9–all
Full Partial Not Implemented
IMM Object 11–all
Full Partial Not Implemented