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SEMI S4-0304 © SEMI 1992, 2004 7 RELATED INFORMATION 2 REGIONAL INFORMATION NOTICE : This rel ated inform ation is not an official part of SEM I S4 and was derived from task force members' knowledge and various refe…

Table R1-2 Classifications, sorted by

Classifications

Classifications Chemicals

CA Hydrogen Chloride

CA-F-UR Trichlorosilane

CA-HT-OHH-WR Arsenic Pentafluoride

CA-O-T Chlorine

CA-P-T-WR Dichlorosilane

CA-P-UR-WR Diethyl Zinc

CA-P-UR-WR Dimethyl Zinc

CA-T Hydrogen Fluoride

CA-T-WR Boron Trifluoride

CA-T-WR Phosphorous Pentafluoride

CA-T-WR Silicon Tetrafluoride

CA-T-WR Tungsten Hexafluoride

CA-WR Boron Trichloride

CA-WR Silicon Tetrachloride

CB-F Ammonia

F Hydrogen

F-HT-OHH Arsine

F-IRR Methyl Chloride

F-IRR Methyl Fluoride

F-IRR-T-UR Germane

F-T Trimethyl Antimony

F-T Trimethyl Arsine

F-T Trimethyl Phosphine

HT-IRR-P-WR Diborane

HT-P Phosphine

I Argon

I Carbon Dioxide

I Halocarbon 14 (tetrafluoromethane)

Classifications Chemicals

I Halocarbon 116 (hexafluoroethane)

I Helium

I Nitrogen

I Perfluoropropane

I Sulfur Hexafluoride

I Halocarbon 11

(trichlorofluoromethane)

I Halocarbon 12

(dichlorodifluoromethane)

I Halocarbon 13

(chlorotrifluoromethane)

I Halocarbon 13B1

(bromotrifluoromethane)

I Halocarbon 23 (fluoroform)

I Halocarbon 115

(chloropentafluoroethane)

IRR-O Nitrogen Trifluoride

IRR-O-T Nitric Oxide

O Nitrous Oxide

O Oxygen

OHH Carbon Tetrachloride

P Silane

P Triethyl Aluminum

P Trimethyl Aluminum

P Trimethyl Gallium

P Trimethyl Indium

P-IRR Diethyl Telluride

T-F-IRR Hydrogen Sulfide

SEMI S4-0304 © SEMI 1992, 2004 7

RELATED INFORMATION 2

REGIONAL INFORMATION

NOTICE: This related information is not an official part of SEMI S4 and was derived from task force members'

knowledge and various references. This related information was approved for publication by letter ballot on

December 4, 2003.

R2-1 Purpose of this Related Information

R2-1.1 This Related Information was intended, at the

time of original publication, by the EHS Committee to

provide additional information and references on the

separation of chemicals, as practiced or regulated in

specific geographical regions.

R2-1.2 It is envisioned that the EHS Committee in

each Region of the SEMI Standards Program will

provide the appropriate text for its geographical region.

R2-2 North America

R2-2.1 Requirements for the separation of chemicals

can be found, for example, in both the International

Building Code (IBC) and the International Fire Code

(IFC). These requirements deal with the segregation of

incompatible chemicals in separate cabinets and

separation by barriers/distance in storage rooms. These

requirements can be found in the 2000 IBC section

415.9.5.9 and Table 415.9.5.9 and in the 2000 IFC

sections 2703.8.5 and 2703.9.8.

R2-3 Japan

R2-3.1 In Japan, requirements for the separation of

incompatible gases can be found in the High Pressure

Gas Safety law and related notifications from Ministry

of Economy and Industry, such as in section 11 of

“Notification regarding technical standards for

Location, Construction, and Facility of Manufacturing

Plant”.

NOTICE: SEMI makes no warranties or

representations as to the suitability of the safety

guidelines set forth herein for any particular

application. The determination of the suitability of the

safety guidelines is solely the responsibility of the user.

Users are cautioned to refer to manufacturer' s

instructions, product labels, product data sheets, and

other relevant literature, respecting any materials or

equipment mentioned herein. These safety guidelines

are subject to change without notice.

By publication of this safety guideline, Semiconductor

Equipment and Materials International (SEMI) takes no

position respecting the validity of any patent rights or

copyrights asserted in connection with any item

mentioned in this safety guideline. Users of this

guideline are expressly advised that determination of

any such patent rights or copyrights, and the risk of

infringement of such rights are entirely their own

responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI S5-0703 © SEMI 1993, 2003 1

SEMI S5-0703

SAFETY GUIDELINE FOR SIZING AND IDENTIFYING FLOW LIMITING

DEVICES FOR GAS CYLINDER VALVES

This safety guideline was technically approved by the Global Gases Committee and is the direct

responsibility of the North American Gases Committee. Current edition approved by the North American

Regional Standards Committee on April 11, 2003. Initially available at www.semi.org June 2003; to be

published July 2003. Originally published in 1993.

NOTICE: This document was completely rewritten in

2003.

1 Purpose

1.1 The purpose of this safety guideline is to provide a

method to size and identify flow limiting devices that

limit the rate of release of hazardous gases from the gas

cylinder valve during transportation, storage, and use.

2 Scope

2.1 This safety guideline provides a method to identify

flow limiting devices by size, and to calculate

maximum and minimum flow rates so that the size

required can be determined. Specific SAFETY

WARNINGS are contained in Section 3.

2.2 This safety guideline pertains to flow limiting

devices for valves on cylinders containing hazardous

gases. These devices are intended to limit the flow rate

of uncontrolled releases of gases at or downstream of

the valve outlet. This guideline does not pertain to gas

releases caused by failure of the cylinder, the valve

connection to the cylinder, actuation of the cylinder

pressure relief device, or some failures of the valve.

2.3 This safety guideline pertains to flow limiting

devices operating at critical flow rates that result from

cylinder pressures greater than 103 kPa (15 psig).

Generally,

flow limiting devices are not used for

cylinders pressurized less than 103 kPa (15psig)

because the size required to provide adequate flow for

the process is so large that flow reduction resulting

from the flow limiting device would be minimal.

NOTICE: This safety guideline does not purport to

address all of the safety issues associated with its use.

It is the responsibility of the user of this guideline to

establish appropriate safety and health practices, and

determine the applicability of regulatory limitations

prior to use.

3 SAFETY WARNINGS

3.1 Installation  Only the gas supplier or cylinder

owner should install, remove, or otherwise service the

flow limiting device. Special equipment and

procedures may be required to perform any installation

or service operation safely. No other person should

install, remove, replace, clean, adjust, or otherwise alter

the flow limiting device unless authorized by the

cylinder owner.

3.2 Verification — When a flow limiting device is

required, the user should always verify that the size is

identified by tag, label or marking on the cylinder or

cylinder valve exterior, and that the device size

indicated matches the requirement. If a required flow

limiting device is missing, the cylinder should be

rejected prior to use.

3.3 Purging  The addition of a flow limiting device

in the cylinder valve may restrict gas flow during

purging. The user should assure that adequate purging

methods are used to prevent plugging the flow limiting

device. As a minimum, the operator should purge the

valve outlet after use with the same procedure used for

purging the valve outlet just after installation of the

cylinder. This is important to prevent contamination in

the valve outlet and reduce the probability of creating a

hazard at the cylinder supplier’s plant.

3.4 Blockage  Under certain conditions, some

hydrides such as diborane can polymerize and cause

obstruction or total blockage of flow limiting devices.

Care should be taken with cylinders that seem to be

empty, but may contain product.

4 Referenced Standards

4.1 SEMI Standard

SEMI S2 — Environmental, Health, and Safety

Guideline for Semiconductor Manufacturing Equipment

4.2 NFPA Document

NFPA 704  Standard System for the Identification of

Fire Hazards of Materials

NOTICE: As listed or revised, all documents cited

shall be the latest publications of adopted standards.

Regional standards may be substituted provided they

are equivalent. Equivalent international standards if

adopted, will be referenced in the next revision of this

guideline.

1 National Fire Protection Association, Batterymarch Park, Quincy,

MA 02269 Website: www.nfpa.org