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SEMI E54.7-0999 © SEMI 1999 11 Table 17 A ssembl y -MFM Object Instanc e Attributes and Serv ices Assembly-MFM Class I D = 131, Ins tance ID = 01 through r Attributes ID Attribute Name SDM Tag -- No addi tional attribute…

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SEMI E54.7-0999 © SEMI 1999 10
8 Protocol Compliance
8.1 A method of testing protocol compliance is
required to verify implementation conformance to the
standard. The Seriplex Technology Organization
(STO)
3
has established a mechanism for self
certification of devices on a Seriplex network. This
certification includes procedures and reporting
mechanisms to demonstrate conformance testing and
interoperability testing of devices.
9 Specific Device Model Mappings
9.1 This section provides for the mapping of network
visible specific device structure and behavior, specified
in a SEMI standard SDM specification, to the Seriplex
network. Each subsection is devoted to a single SDM
specification. Additional SDM mappings are added as
sub-sections to this NCS specification according to
SEMI guidelines and the guidelines of the SEMI SAN
Interoperability standard.
9.2 Specific Device Model For Mass Flow Device
9.2.1 This section details the network mapping
required to support the Specific Device Model For
Mass Flow Devices. Table 14 summarizes the Mass
Flow Device Object types. Subsequent tables 15 to 24
details the attributes and services associated with each
Mass Flow Device object type.
Table 14 Mass Flow Device Object Types
SDM Object
Identifier
Object Name Seriplex
Class ID
MFD1 (DM) Device Manager 1
MFD2 (SAC) Sensor Actuator Controller 2
MFD3 Sensor-AI-MF 129
MFD4 Sensor-AI-AT 130
MFD5 Assembly-MFM 131
MFD6 Sensor-AI-Aux 132
MFD7 Actuator-AO-MF 133
MFD8 Controller 39
MFD9 Local Link 4
MFD10 SISO 134
MFD11 SISO-Setpoint 135
MFD12 Assembly-MFC 136
9.3 Sensor-AI-MF –– The presentation of the Sensor
Analog Input Mass Flow (Sensor-AI-MF) object
instance attributes and services are as indicated in Table
15.
3 Seriplex Technology Organization, P.O. Box 27446, Raleigh, NC
27611, www.seriplex.org
Table 15 Sensor-AI-MF Object Instance Attributes
and Services
Sensor-AI-MF
Class ID = 129, Instance ID = 1 through r
Attributes
ID Attribute Name SDM Tag
128 Flow Totalizer A1
129 Flow Hours A2
130 Zero Offset Mode A5
131 Zeroing Status A6
132 Autorange Status A7
Services
ID Service Name SDM Tag
129 Perform Zero Offset S1
131 Query-Supported Gas Types S2
133 Selected Programmed Gas Type S3
135 Insert Gas Type S4
137 Delete Gas Type S5
139 Get Gas Calibration Data Value S6
141 Set Gas Calibration Data Value S7
143 Autorange S8
9.4 Sensor-AI-AT –– The presentation of the Sensor
Analog Input Ambient Temperature (Sensor-AI-AT)
object instance attributes and services are as indicated
in Table 16.
Table 16 Sensor-AI-AT Object Instance Attributes
and Services
Sensor-AI-AT
Class ID = 130, Instance = 01 through r
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined --
Services
ID Service Name SDM Tag
-- No additional services defined --
9.5 Assembly-MFM The presentation of the Assembly
Mass Flow Meter (Assembly-MFM) object instance
attributes and services are as indicated in Table 17.
SEMI E54.7-0999 © SEMI 199911
Table 17 Assembly-MFM Object Instance
Attributes and Services
Assembly-MFM
Class ID = 131, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined --
Services
ID Service Name SDM Tag
-- No additional services defined --
9.6 Sensor-AI-Aux–– The presentation of the Sensor
Analog Input Auxiliary (Sensor-AI-Aux) object
instance attributes and services are as indicated in Table
18.
Table 18 Sensor-AI-Aux Object Instance
Attributes and Services
Sensor-AI-Aux
Class ID = 132, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined --
Services
ID Service Name SDM Tag
-- No additional services defined --
9.7 Actuator-AO-MF –– The presentation of the
Actuator Analog Output Mass Flow (Actuator-AO-MF)
object instance attributes and services are as indicated
in Table 19.
Table 19 Actuator-AO-MF Object Instance
Attributes and Services
Actuator-AO – MF
Class ID = 133, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
128 Valve Type A1
129 Override A2
Services
ID Service Name SDM Tag
-- No additional services defined --
9.8 Controller –– The presentation of the Controller
(Ca) object instance attributes and services are as
indicated in Table 20.
Table 20 Controller Object Instance Attributes
and Services
Controller
Class ID = 39, Instance ID = 01 through q
Attributes
ID Attribute Name SDM Tag
128 Alarm Settling Time CaA21
129 Warning Settling Time CaA24
Services
ID Service Name SDM Tag
-- No additional services defined --
9.9 Local Link –– The presentation of the Local Link
(Lnk) object instance attributes and services are as
indicated in Table 21.
Table 21 Local Link Object Instance Attributes
and Services
Local Link
Class ID = 4, Instance ID = 01 through j
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined --
Services
ID Service Name SDM Tag
-- No additional services defined --
9.10 SISO –– The presentation of the Single Input
Single Output (SISO) object instance attributes and
services are as indicated in Table 22.
Table 22 SISO Object Instance Attributes and
Services
SISO
Class ID = 134, Instance = 01
Attributes
ID Attribute Name SDM Tag
128 Input A1
129 Output A2
130 Data Type A3
Services
ID Service Name SDM Tag
-- No additional services defined --
SEMI E54.7-0999 © SEMI 1999 12
9.11 SISO-Setpoint –– The presentation of the Single
Input Single Output Setpoint (SISO-Setpoint) object
instance attributes and services are as indicated in Table
23.
Table 23 SISO-Setpoint Object Instance
Attributes and Services
SISO-Setpoint
Class ID = 135, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
161 Ramp Type A33
162 Ramp Rate A34
163 Ratio A35
Services
ID Service Name SDM Tag
--- No additional services defined --
9.12 Assembly-MFC –– The presentation of the
Assembly Mass Flow Controller (Assembly-MFC)
object instance attributes and services are as indicated
in Table 24.
Table 24 Assembly-MFC Object Instance
Attributes and Services
Assembly-MFC
Class ID = 136, Instance ID = 01 through r
Attributes
ID Attribute Name SDM Tag
-- No additional attributes defined --
Services
ID Service Name SDM Tag
-- No additional services defined --
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