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SEMI E47-0301 © SEMI 1995 , 2001 3 Table 1 Handlin g Dimensions for 1 50 mm (6 in.) Pod Handling Dime nsions for 2 00 mm (8 in.) Pod Handle: A 1 215.0 mm ± 0.5 mm (8.464" ± 0.019") 305.0 m m ± 0.5 mm ( 12.008&q…

SEMI E47-0301 © SEMI 1995, 2001 2

6.6 An optional handle to be placed at the top of the pod is specified in SEMI E47.1 (Section 6.9, Figure 12, and

Table 1). If used for 150 mm or 200 mm pods, this “top robotic handling flange” has to meet the required

dimensions as specified in SEMI E47.1 (see Figure 12 of SEMI E47.1). Its center is to be placed above the center of

the cassette in the pod with the two orientation notches at the side where the cassette is accessed to remove wafers.

The orientation possibilities of the pod are then the same as described in Section 6.5 above and Table 2.

Figure 1

Pod Handling Terminology and Dimensions

SEMI E47-0301 © SEMI 1995, 20013

Table 1

Handling Dimensions for 150 mm (6 in.) Pod Handling Dimensions for 200 mm (8 in.) Pod

Handle: A1 215.0 mm ± 0.5 mm (8.464" ± 0.019") 305.0 mm ± 0.5 mm (12.008" ± 0.019")

A2 107.50 mm ± 0.25 mm (4.232" ± 0.01") 152.50 mm ± 0.25 mm (6.004" ± 0.01")

A3 6.0 mm ± 0.2 mm (0.236" ± 0.008") 5.65 mm ± 0.2 mm (0.222" ± 0.008")

A4 90° ± 0.2° 90° ± 0.2° (90° ± 0.2°)

A5 14 mm min. (0.551" min.) 20 mm min. (0.787" min.)

A6 30 mm ± 0.2 mm (1.181" ± 0.008") 30.0 mm ± 0.2 mm (1.181" ± 0.008")

A7 50 mm ± 0.2 mm (1.969" ± 0.008") 50.0 mm ± 0.2 mm (1.969" ± 0.008")

A8 148 mm min., 215 mm max. (A1)

(5.827" min., 8.464" max.)

148 mm min., 305 mm max. (A1)

(5.827" min., 12.008" max.)

Handle Height: B1 158 mm ± 1.0 mm (6.220" ± 0.039") 150.4 mm ± 1.0 mm (5.921" ± 0.039")

Handling Area: B2 30 mm min. (1.181" min.) 30 mm min. (1.181" min.)

Table 2

Orientation # Orientation Notch

1void

2 ON a

3 ON b

4 ON a+b

Figure 2

Orientation Possibilities

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