semi合集-English.pdf - 第3328页
SEMI E130-1104 © SEMI 2003, 2004 42 Host Prober Load Substrate PS: AWAITING LOAD to HAND LING MATERIAL Load substrate on Chuck Move next substrate to Pre-align Align and Profile Move substrate to Pre-align PS: HANDLING M…
SEMI E130-1104 © SEMI 2003, 2004 41
R1-1.5 Scenario V – Processing Material using Control Maps — Control maps can be used for identifying the sites
to be probed per substrate. The specification for the download of maps is outside the scope of this specification.
The format of the maps is user defined.
R1-1.5.1 Example Settings — For the sake of demonstration, the control map pertaining to the substrate in this
example is communicated using the SEMI G85 map format. The recipe parameter “USE CONTROL MAP” is set to
true.
Site Selection List
Die Number Row Col
1 16 3
2 16 4
3 16 5
4 16 6
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
123456789101112131415161718
Legend:
Location specified in Control Map
Location Probed - Passed
Location Probed - Failed
<
?xml version="1.0"?>
<
Map xmlns:semi="http://www.semi.org"
WaferId="39211USEC4"
FormatRevision="G85-1101">
<Device
ProductId="Example300"
ProductCode="xx"
LotId="1234567890"
Orientation="0"
WaferSize="300"
DeviceSizeX="15968.77"
DeviceSizeY="15968.77"
StepSizeX="15968.77"
StepSizeY="15968.77"
Rows="18"
Columns="18"
SupplierName="xx"
OriginLocation="3"
CreateDate="2002100815124800"
Status="70"
BinType="Decimal"
NullBin="2">
<Bin BinCode="1" BinCount="4" BinQuality="Good" BinDescription="Test Site"/>
<Bin BinCode="0" BinCount="240" BinQuality="Good" BinDescription="Non Test Site"/>
<Bin BinCode="2" BinCount="80" BinQuality="Fail" BinDescription="Non Testable Site"/>
<Data MapName="PSEM300 Example" Version="1">
<Row><![CDATA[2 2 2 2 2 2 0 0 0 0 0 0 2 2 2 2 2 2]]></Row>
<Row><![CDATA[2 2 2 2 2 2 0 0 0 0 0 0 2 2 2 2 2 2]]></Row>
<Row><![CDATA[2 2 0 0 0 0 0 0 0 0 0 0 0 0 0 0 2 2]]></Row>
<Row><![CDATA[2 2 0 0 0 0 0 0 0 0 0 0 0 0 0 0 2 2]]></Row>
<Row><![CDATA[2 2 0 0 0 0 0 0 0 0 0 0 0 0 0 0 2 2]]></Row>
<Row><![CDATA[2 2 0 0 0 0 0 0 0 0 0 0 0 0 0 0 2 2]]></Row>
<Row><![CDATA[0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0]]></Row>
<Row><![CDATA[0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0]]></Row>
<Row><![CDATA[0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0]]></Row>
<Row><![CDATA[0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0]]></Row>
<Row><![CDATA[0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0]]></Row>
<Row><![CDATA[0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0]]></Row>
<Row><![CDATA[2 2 0 0 0 0 0 0 0 0 0 0 0 0 0 0 2 2]]></Row>
<Row><![CDATA[2 2 0 0 0 0 0 0 0 0 0 0 0 0 0 0 2 2]]></Row>
<Row><![CDATA[2 2 0 0 0 0 0 0 0 0 0 0 0 0 0 0 2 2]]></Row>
<Row><![CDATA[2 2 1 1 1 1 0 0 0 0 0 0 0 0 0 0 2 2]]></Row>
<Row><![CDATA[2 2 2 2 2 2 0 0 0 0 0 0 2 2 2 2 2 2]]></Row>
<Row><![CDATA[2 2 2 2 2 2 0 0 0 0 0 0 2 2 2 2 2 2]]></Row>
</Data>
</Device>
<
/Map>
Figure R1-17
Control Map Usage Example Settings
SEMI E130-1104 © SEMI 2003, 2004 42
Host Prober
Load Substrate
PS: AWAITING LOAD to HANDLING MATERIAL
Load substrate on Chuck
Move next substrate to Pre-align
Align and Profile
Move substrate to Pre-align
PS: HANDLING MATERIAL to AWAITING COMMAND(X:3, Y:16)
INDEX
PS: AWAITING COMMAND to MOVING XYZ
PS: MOVING XYZ to AWAITING COMMAND(X:4, Y:16)
INDEX
PS: MOVING XYZ to AWAITING COMMAND(X:5, Y:16)
PS: AWAITING COMMAND to MOVING XYZ
Tester
Start
Start
Device Test Complete(Passed)
MOVE-ABS(X:4, Y:16)
PS: MOVING XYZ to AWAITING COMMAND(X:4, Y:16)
PS: AWAITING COMMAND to MOVING XYZ
Start
Device Test Complete(Failed)
Start
Device Test Complete(Failed)
CLEAN-PROBES
PS: AWAITING COMMAND to SERVICE TASK(TaskId:CLEAN-PROBES)
PS: SERVICE TASK to AWAITING COMMAND(X:4, Y:16, Passed)
Start
Device Test Complete(Passed)
MOVE-ABS(X:5, Y:16)
PS: AWAITING COMMAND to MOVING XYZ
PS: MOVING XYZ to AWAITING COMMAND(X:5, Y:16)
Start
Device Test Complete(Passed)
INDEX
PS: AWAITING COMMAND to MOVING XYZ
PS: MOVING XYZ to AWAITING COMMAND(X:6, Y:16)
Start
Device Test Complete(Passed)
ControlMapCompleted
The INDEX command drives the chuck
to the next unprobed site contained
in the control map
Device Test Complete(Passed)
Host issues the MOVE XYZ command
to reprobe the sites previously probed
when the INDEX command was used.
INDEX
Figure R1-18
Control Map Usage Scenario
SEMI E130-1104 © SEMI 2003, 2004 43
R1-1.6 Scenario VI – Recoverable Alarm — An error occurs when the prober is responding to a MOVE XYZ
command (the chuck could not complete the motion). The host is able to restart processing after the chuck is
initialized.
Host Prober
Alarm Notification
PS: MOVING XYZ to PROCESSING BLOCKED()
MOVE-ABS(X:targetX, Y:targetY)
PS: AWAITING COMMAND to MOVING XYZ()
Internal Error Occurs()
Alarm Cleared()
PS: HANDLING MATERIAL to AWAITING COMMAND(X: RefX, Y:RefY)
PROCESS
EXECUTING
PROC ESSI NG
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
PROCESS
EXECUTING
PROC ESSI NG
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
Resume normal processing
PROCESS
EXECUTING
PROC ESSI NG
BLOCKED
3
C
16
15
4
5
SUBSTRATE
LOADED
6
8
10
9
11
12
13
1
2
IDLE
SETTING UP
AWAITING COMMAND
HANDLING MATERIAL
SERVICE TASK
MOVING XYZ
AWAITING LOAD
7
IDLE WITH ALARMS
PROCESSING ACTIVE
17
18
14
PS: PROCESSING BLOCKED to HANDLING MATERIAL
Align Substrate
MOVE-ABS(X:targetX, Y:targetY)
PS: AWAITING COMMAND to MOVING XYZ
Host notified user of alarm condition
User performs error recovery
procedure which ultimately results in
the re-initialization of the chuck
PS: MOVING XYZ to AWAITING COMMAND(X:targetX, Y:targetY)
Figure R1-19
Recoverable Alarm Scenario