semi合集-English.pdf - 第1143页
SEMI E5-1104 © SEMI 1982, 2004 85 Stream,Function Name (Mnemonic) Direction S2,F50 Enhanced Remote Command Acknowledge M,H<-E Description The equipment acknowledges En hanced Remote Command or reports an y error(s). I…

SEMI E5-1104 © SEMI 1982, 2004 84
Stream,Function Name (Mnemonic) Direction
S2,F49 Enhanced Remote Command M,H->E
Description
The host requests an object to perform the specified remote command with its associated parameters. If multi-block, it shall be
preceded by the S2,F39/S2,F40 Multi-Block Inquire/Grant transaction.
Structure
L,4
1. <DATAID>
2. <OBJSPEC>
3. <RCMD>
4. L,m # of parameter groups
1. L,2
1. <CPNAME
1
> command parameter 1 name
2. <CEPVAL
1
> command-enhanced parameter 1 value
2. L,2
1. <CPNAME
2
> command parameter 2 name
2. <CEPVAL
2
> command-enhanced parameter 2 value
.
.
m. L,2
1. <CPNAME
m
> command parameter m name
2. <CEPVAL
m
> command enhanced parameter m value
If a specific value of CPNAME is defined to have a CEPVAL defined as a LIST, it shall
always be a LIST. If the CEPVAL that is associated to that specific value of CPNAME
is defined to be anything other than LIST, it will result in a format error.
Exception
A zero length list, m = 0, indicates that no parameter groups are sent with the command. OBJSPEC can be a null length item.
Notes:
1. If CEPVAL is a LIST, the items that make up that list shall take on one of the following forms: (1) a list of items with an
identical format, (2) a LIST of CPNAME, CEPVAL pairs, as illustrated below.
A) L,2
1. <CPNAME
a
>
2. L,m
1. <CPVAL
a1
>
2. <CPVAL
a2
>
.
.
m. <CPVAL
am
>
B) L,2
1. <CPNAME
b
>
2. L,n
1. L,2
1. <CPNAME
b1
>
2. <CEPVAL
b1
>
.
.
n. L,2
1. <CPNAME
bn
>
2. <CEPVAL
bn
>

SEMI E5-1104 © SEMI 1982, 2004 85
Stream,Function Name (Mnemonic) Direction
S2,F50 Enhanced Remote Command Acknowledge M,H<-E
Description
The equipment acknowledges Enhanced Remote Command or reports any error(s). If the command is not accepted due to one or
more invalid parameters, (i.e. HCACK = 3), then a list of invalid parameters will be returned containing the parameter name and
reason for being invalid.
Structure
L,2
1. <HCACK>
2. L,n # of parameter groups
1. L,2
1. <CPNAME
1
>
2. <CEPACK
1
>
.
.
n. L,2
1. <CPNAME
n
>
2. <CEPACK
n
>
Exception
None
10.7 Stream 3 Materials Status — The functions of the material status stream are used to communicate information
and actions related to material, including carriers and material-in-process, time-to-completion information, and
extraordinary material occurrences.
Stream,Function Name (Mnemonic) Direction
S3,F0 Abort Transaction (S3F0) S,H<->E
Description
Same form as S1,F0
Structure
Exception
Stream,Function Name (Mnemonic) Direction
S3,F1 Material Status Request (MSR) S,H->E,reply
Description
Host requests the device to send the status of all material in process.
Structure
Header only
Exception
None

SEMI E5-1104 © SEMI 1982, 2004 86
Stream,Function Name (Mnemonic) Direction
S3,F2 Material Status Data (MSD) M,H<-E
Description
Material-in-process information is sent from the equipment to the host. There are m locations.
Structure
L,2
1. <MF>
2. L,m
1. L,3
1. <LOC
1
>
2. <QUA
1
>
3. <MID
1
>
2. L,3
.
.
m. L,3
1. <LOC
m
>
2. <QUA
m
>
3. <MID
m
>
Exception
A zero-length list returned means no such data exists.
Stream,Function Name (Mnemonic) Direction
S3,F3 Time to Completion Request (TCR) S,H->E,reply
Description
Host requests the equipment to send the time-to-completion of operations on all material in possession.
Structure
Header only
Exception
None
Stream,Function Name (Mnemonic) Direction
S3,F4 Time to Completion Data (TCD) M,H<-E
Description
Time-to-completion information is sent by the equipment to the host.
Structure
L,2
1. <MF>
2. L,m
1. L,3
1. <TTC
1
>
2. <QUA
1
>
3. <MID
1
>
2. L,3
.
.
m. L,3
1. <TTC
m
>
2. <QUA
m
>
3. <MID
m
>
Exception
A zero-length list header returned means no such data exists.