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SEMI G82-0301 E © SEMI 2001 5 bila tera l datum pl ane hori zontal datum pl ane H0 > 1 5 example of conveyor ra il app licatio n conveyor r ail is l owered below for k li ft excl usi on zone W1 < 130 W2 > 205 eq…

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SEMI G82-0301
E
© SEMI 2001 4
(frame cassette with handles)
equipment
boundar
y
facial
datum
plane
frame
casstte
front
load
face
plane
docking
interface
(see
SEMI E64)
bilateral
datum
planes
frame
cassette
horizontal
datum
plane
floor
H
= 900
H1
< 25
D = 250
C2
> 30
> 482
(frame cassette without handles)
> 555
C1
> 75
+0
–
10
S
H2
< 2600
overhead
track
clearance
Figure 1
Load Port Requirements
SEMI G82-0301
E
© SEMI 2001 5
bilateral
datum plane
horizontal
datum plane
H0 > 15
example of conveyor
rail application
conveyor rail is lowered
below fork lift exclusion zone
W1 < 130
W2 > 205
equipment boundary
above H1
frame cassette
C1 > 75
C1 > 75
W1 < 130
W2 > 205
equipment boundary
bilateral
datum plane
facial datum plane
load face plane
D0 > 110
equipment boundary
above H1
equipment boundary
below H1
C2 > 30
H1 < 25
Top
Front
HC3 =32
+2
−
0
Figure 2
Trenches and Conveyor Rails
SEMI G82-0301
E
© SEMI 2001 6
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