semi合集-English.pdf - 第1096页

SEMI E5-1104 © SEMI 1982, 2004 38 Name Format Description Values Where Used TARGETSPEC 20 Object specif ier of target object S14F17; S15F43 TBLACK 51 Indicates success or failure 0 = Success 1 = Failure S13F14, F16 TBLCM…

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SEMI E5-1104 © SEMI 1982, 2004 37
Name Format Description Values Where Used
STIME 20 Sample time, 12 or 16 bytes.
NOTE 3: The 16-
b
yte format
is currently optional. After
January 1, 1998, the 16-byte
format shall be required on
new and updated
implementations. Support for
the 12-byte format shall be
supported as a configurable
option using the equipment
constant TimeFormat. This is
a format requirement only and
does not imply either
precision or accuracy.
If 12 bytes the format is
YYMMDDhhmmss
YY = Year 00 to 99
MM = Month 01 to 12
DD = Day 01 to 31
hh = Hour 00 to 23
mm = Minute 00 to 59
ss = Second 00 to 59
If 16 bytes the format is
YYYYMMDDhhmmsscc
YYYY = Year 0000 to 9999
MM = Month 01 to 12
DD = Day 01 to 31
hh = Hour 00 to 23
mm = Minute 00 to 59
ss = Second 00 to 59
cc = Centisecond 00 to 99
S6F1
STRACK 10 Spool Stream Acknowledge
1 = Spooling not allowed for
stream (i.e., Stream 1)
2 = Stream unknown
3 = Unknown function specified
for this stream
4 = Secondary function specified
for this stream
S2F44
STRID 51 Stream Identification
S2F43, F44
STRP 3() Starting position in die
coordinate position. Must be
in (X,Y) order.
S12F9, F16
SV 0, 10,
11, 20,
21, 3(),
4(), 5()
Status variable value
S1F4;
S6F1
SVCACK 10 Service acceptance
acknowledge code, 1 byte
0 = Acknowledge, service has
been performed
1 = Service does not exist
2 = Cannot perform now
3 = At least parameter is
invalid
4 = Acknowledge, service will
be performed with completion
notified later with parameters
for response
5 = Service is not completed or
prohibited
6 = No such object exists
7-63 Reserved
S14F20
SVCNAME 20 Service name provided on
specified object asking by the
host
S14F19, F26,
F27, F28
SVID 20, 3(),
5()
Status variable ID
Status variables may include any
parameter that can be sampled in
time such as temperature or
quantity of a consumable.
S1F3, F11, F12;
S2F23
SVNAME 20 Status Variable Name
S1F12
TARGETID 20 Identifies where a request for
action or data is to be applied.
If text, conforms to
OBJSPEC.
S18F1, F3, F5,
F7, F9, F11,
F13
SEMI E5-1104 © SEMI 1982, 2004 38
Name Format Description Values Where Used
TARGETSPEC 20 Object specifier of target
object
S14F17;
S15F43
TBLACK 51 Indicates success or failure
0 = Success
1 = Failure
S13F14, F16
TBLCMD 51 Provides information about
the table or parts of the table
being transferred or
requested. Enumerated:
0 = Complete Table
1 = New rows (add)
2 = New columns (append)
3 = Replace existing rows
4 = Replace existing columns
S13F13, F15
TBLELT 0, 10,
11, 20,
21, 3(),
4(), 5()
Table element. The first table
element in a row is used to
identify the row.
S13F13, F15,
F16
TBLID 20 Table identifier. Text
conforming to the
requirements of OBJSPEC.
S13F13, F15,
F16
TBLTYP 20 A reserved text string to
denote the format and
application of the table. Text
conforming to the
requirements of OBJSPEC.
S13F13, F15,
F16
TEXT 10, 20,
22, 3(),
5()
A single line of characters
S10F1, F3, F5,
F9
TIAACK 10 Equipment acknowledgement
code, 1 byte
0 = Everything correct
1 = Too many SVIDs
2 = No more traces allowed
3 = Invalid period
>3 = Equipment-specified error
4-63 Reserved
S2F24
TIACK 10 Time Acknowledge Code, 1
byte
0 = OK
1 = Error, not done
2-63 Reserved
S2F32
TID 10 Terminal number, 1 byte
0 = Single or main terminal
>0 = Additional terminals at the
same equipment
S10F1, F3, F5,
F7
TIME 20 Time of day, 12 or 16 bytes
NOTE 4: The 16-byte format
is currently optional. After
January 1, 1998, the 16-byte
format shall be required on
new and updated
implementations. Support for
the 12-byte format shall be
supported as a configurable
option using the equipment
constant TimeFormat. This is
a format requirement only and
does not imply either
precision or accuracy.
If 12 bytes the format is
YYMMDDhhmmss
YY = Year 00 to 99
MM = Month 01 to 12
DD = Day 01 to 31
hh = Hour 00 to 23
mm = Minute 00 to 59
ss = Second 00 to 59
If 16 bytes the format is
YYYYMMDDhhmmsscc
YYYY = Year 0000 to 9999
MM = Month 01 to 12
DD = Day 01 to 31
hh = Hour 00 to 23
mm = Minute 00 to 59
ss = Second 00 to 59
cc = Centisecond 00 to 99
S2F18, F31
SEMI E5-1104 © SEMI 1982, 2004 39
Name Format Description Values Where Used
TIMESTAMP 20 A text string indicating the
time of an event, which
encodes time in the following
format:
YYYYMMDDhhmmsscc
YYYY = year 0000 to 9999
MM = month 01 to 12
DD = day 01 to 31
hh = hour 00 to 23
mm = minute 00 to 59
ss = second 00 to 59
cc = centisecond 00 to 99
S5F9, F11, F15;
S15F41, F44;
S16F5, F7, F9
TOTSMP 20, 3(),
5()
Total samples to be made
S2F23;
S17F5
TRACK 11 Tells whether the related
transfer activity was
successful (= True) or
unsuccessful (= False)
S4F20, F22,
F23
TRATOMICID 5() Equipment assigned identifier
for an atomic transfer
S4F20
TRAUTOD 11 A Trace Object attribute for a
control flag which, if set
TRUE, causes the Trace
Object to delete itself when it
has completed a report
S14F1, F2, F3,
F4;
S17F5
TRAUTOSTART 11 For each atomic transfer, this
data item tells the equipment
if it should automatically start
the handoff when ready
(= TRUE) or await the host’s
“StartHandoff” command
(= FALSE) following setup.
This data item only affects
the primary transfer partner.
S4F19
TRCMDNAME 20 Identifier of the transfer job-
related command to be
executed. Possible values:
"CANCEL"
"PAUSE"
"RESUME"
"ABORT"
"STOP"
"STARTHANDOFF" (requires a
TRATOMICID as a parameter)
S4F21
TRDIR 51 Direction of handoff.
1 = Send material
2 = Receive material
0, 3-63 Reserved
S4F19, F29
TRID 20, 3(),
5()
Trace request ID
S2F23;
S6F1, F27, F28;
S17F5, F6, F7,
F8, F13, F14
TRJOBID 10 Equipment assigned identifier
for the transfer job.
S4F20, F21
TRJOBMS 51 Milestone for a transfer job
(e.g., started or complete)
1 = Transfer Job Started
2 = Transfer Job Complete
0, 3-63 Reserved
S4F23
TRJOBNAME 20 Host assigned identifier for
the transfer job. Limited to a
maximum of 80 characters.
S4F19, F23
TRLINK 5() Common identifier for the
atomic transfer used by the
transfer partners to confirm
that they are working on the
same host-defined task.
S4F19, F29,
F31, F33, F39