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SEMI E52-0703 © SEMI 1995, 2003 2 NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions. 5 Terminology 5.1 Definitions 5.1.1 formula — the structural representation of a gas, in d…
SEMI E52-0703 © SEMI 1995, 2003 1
SEMI E52-0703
PRACTICE FOR REFERENCING GASES AND GAS MIXTURES USED
IN DIGITAL MASS FLOW CONTROLLERS
This practice was technically approved by the Global Gases Committee and is the direct responsibility of the
North American Gases Committee. Current edition approved by the North American Regional Standard
Committee on April 11, 2003. Initially available at www.semi.org May 2003; to be published July 2003.
Originally published in 1995; previously published March 2002.
NOTICE: This document was completely rewritten in
2003.
1 Purpose
1.1 To provide a numerical index of gases and gas
mixtures used in the semiconductor industry that will
give an ordered reference for the gases and gas
mixtures when used in mass flow devices. This index or
list will facilitate the production and use of digital mass
flow devices.
2 Scope
2.1 The list includes gases, gas mixtures, and
vaporizable materials that can be used in mass flow
devices. The list will supplement, not replace, existing
DOT/OSHA or other identification systems. For ease of
use, the list is presented sorted by gas code, gas name,
and symbol for gases and vaporizable materials and by
code and mixture percentage for gas mixtures.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety health practices and determine the
applicability of regulatory or other limitations prior to
use.
3 Limitations
3.1 This list does not provide information related to the
safe use and intended application of listed materials.
4 Referenced Standards
4.1 NIST Standard
1
NIST AD732-043 — JANAF Thermochemical Tables,
2nd Edition
4.2 Miscellaneous Publications
Dangerous Properties of Industrial Materials, 5th
Edition, N. Irving Sax, © 1979
2
1 National Institute of Standards and Technology, 100 Bureau Drive,
Stop 3460, Gaithersburg, MD 20899-3460, USA. Telephone:
301.975.6478, Website: www.nist.gov
2 CRC Press LLC, (Headquarters) 2000 Corporate Blvd., NW, Boca
Raton, FL 33431, 561.994.0555
Encyclopedia of Gas, Air Liquide, © 1976
3
Matheson Gas Data Book, 6th Edition, © 1980
4
The Merck Manual Index, 6th Edition
5
4.3 Data Sheets
Air Products & Chemicals Data Sheet, © 1991
6
American Cyanamid Data Sheet
7
Callery Chemical Borazine Data Sheet, © 1984
8
DuPont Data Sheet
9
Schumacher Material Safety Data Sheet, No. R&D 49.3
JN, Revision Date 1/95
10
Schumacher Product Data Sheet, No. 23, Revision 3
4.4 Handbooks
Chemical Engineers’ Handbook, 5th Edition
11
CRC Handbook of Chemistry and Physics, 75th
Edition, © 1994
12
4.5 Other Standard
Nomenclature of Organic Chemistry, authored by
International Union of Pure and Applied Chemistry
(IUPAC), edited by J. Rigaudy, © 1979
13
3 Litton Publishing
4 Matheson Gas Products, Inc., 959 Route 46 East, P.O. Box 624,
Parsippany, NJ 07054, 973.257.1100
5 This publication is available from Franklin Electronic Publishers, 1
Franklin Plaza, Burlington, NJ 08060, 1.800.266.5626
6 Air Products & Chemicals Inc.-PA, Rural Route 1, Tamaqua, PA
18252, 717.467.2981
7 American Cyanamid Company, CALI Corporation Center, 50 Tice
Blvd., Woodcliff Lake, NJ 07675, 201.930.0455
8 Callery Chemical Company, P.O. Box 429, Pittsburgh, PA 15230,
412.967.4100
9 E.I. du Pont de Nemours and Company, 1007 Market St.,
Wilmington, DE 19898, 302.774.1000
10 Schumacher, 1969 Palomar Oaks Way, Carlsbad, CA 92009-1307,
619.931.9555
11 McGraw-Hill Inc., Princeton Rd., Hightstown, NJ 08520,
609.426.5934
12 CRC Press LLC Headquarters,2000 NW Corporate Blvd, Boca
Raton,FL 33431, USA, Phone: 1(800)272-7737 or (561)994-0555
Fax: 1(800)374-3401 or (561)989-9732
13 This publication is available from Franklin Book Company, 7804
Montgomery Ave., Elkon’s Park, PA 19027, 215.635.5252
SEMI E52-0703 © SEMI 1995, 2003 2
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
5 Terminology
5.1 Definitions
5.1.1 formula — the structural representation of a gas, indicating the molecular groupings. Formulas are unique and
unambiguous except in the case of isomers.
5.1.2 gas code — an integer that is uniquely associated with a particular gas.
5.1.3 gas name — the accepted name for a gas as specified in Nomenclature of Organic Chemistry.
5.1.4 symbol — commonly accepted, unambiguous, and unique identification using ASCII characters with no
subscripts, superscripts, or parenthesis.
6 Gas Table Sorted by Code
Table 1 Gases Sorted by Code
Code Gas Name Symbol Formula Synonym Ref
1 Helium He He 1
2 Neon Ne Ne 1
3 Radon Rn Rn 2
4 Argon Ar Ar 1
5 Krypton Kr Kr 1
6 Xenon Xe Xe 1
7 Hydrogen H2 H
2
1
8 Air Air 1
9 Carbon Monoxide CO CO 1
10 Hydrogen Bromide HBr HBr 1
11 Hydrogen Chloride HCl HCl 1
12 Hydrogen Fluoride HF HF 1
13 Nitrogen N2 N
2
1
14 Deuterium D2 H
2
2
D2 2
15 Oxygen O2 O
2
1
16 Nitric Oxide NO NO 2
17 Hydrogen Iodide HI HI 1
18 Fluorine F2 F
2
1
19 Chlorine Cl2 Cl
2
1
20 Water Vapor H2O H
2
O 2
21 Bromine Br2 Br
2
2
22 Hydrogen Sulfide H2S H
2
S 1
23 Hydrogen Selenide H2Se H
2
Se 1
24 Hydrogen Cyanide HCN HCN 1
25 Carbon Dioxide CO2 CO
2
1
26 Nitrogen Dioxide NO2 NO
2
1
27 Nitrous Oxide N2O N
2
O 1
28 Methane CH4 CH
4
1
29 Ammonia NH3 NH
3
1
30 Ozone O3 O
3
1
31 Phosphine PH3 PH
3
1
SEMI E52-0703 © SEMI 1995, 2003 3
Code Gas Name Symbol Formula Synonym Ref
32 Sulfur Dioxide SO2 SO
2
1
33 Methyl Fluoride CH3F CH
3
F Fluoromethane or Methane,
Fluoro
1
34 Carbonyl Sulfide COS COS 1
35 Arsine AsH3 AsH
3
1
36 Methyl Chloride CH3Cl CH
3
Cl Chloromethane or Methane,
Chloro
1
37 Cyanogen Chloride ClCN ClCN 1
38 Ethylene C2H4 CH
2
=CH
2
Ethene 1
39 Silane SiH4 SiH
4
1
40 Carbon Disulfide CS2 CS
2
2
41 Oxygen Difluoride OF2 OF
2
1
42 Acetylene C2H2 HC=CH Ethyne 1
43 Germane GeH4 GeH
4
1
44 Methyl Bromide CH3Br CH
3
Br Bromomethane or Methane,
Bromo
1
45 Ethylene Oxide C2H4O C
2
H
4
O Acetaldehyde 1
46 Carbonyl Fluoride CF2O CF
2
O 1
47 Methyl Mercaptan CH4S CH
3
SH 1
48 Boron Trifluoride BF3 BF
3
1
49 Fluoroform CHF3 CHF
3
Trifluoromethane or Methane,
Trifluoro, F-23, R-23
1
50 Hydrazine N2H4 H
2
NNH
2
2
51 Vinyl Fluoride C2H3F H
2
C=CHF 1
52 Methylamine CH5N CH
3
NH
2
Amino Methane,
Monomethylamine
2
53 Nitrogen Trifluoride NF3 NF
3
1
54 Ethane C2H6 CH
3
CH
3
1
55 Vinyl Chloride C2H3Cl CH
2
=CHCl Chloroethylene 1
56 Vinyl Bromide C2H3Br CH
2
=CHBr 1
57 Chlorodifluoromethane CHClF2 CClHF
2
F-22, R-22 1
58 Diborane B2H6 B
2
H
6
1
59 Cyanogen C2N2 NCCN Oxalodinitrile 1
60 Phosgene CCl2O CCl
2
O Carbonyl Chloride 1
61 Cyclopropane C3H6 C
3
H
6
1
62 Phosphorus Trifluoride PF3 PF
3
1
63 Carbon Tetrafluoride CF4 CF
4
Tetrafluoromethane or Methane,
Tetrafluoro
1
64 Difluoroethylene C2H2F2 CH
2
=CF
2
G-1132A,Vinylidenefluoride 1
65 Dichlorofluoromethane CHCl2F CHCl
2
F F-21, R-21 1
66 Allene C3H4 CH
2
=C=CH
2
Propadiene 1
67 Dichlorosilane SiH2Cl2 SiH
2
Cl
2
1
68 Methyl Acetylene C3H4 CH
3
C=CH Propyne 1
69 Propylene C3H6 CH
3
CH=CH
2
Propene 1
70 Boron Trichloride BCl3 BCl
3
1
71 Chloroform CHCl3 CHCl
3
Trichloromethane or Methane,
Trichloro
2