semi合集-English.pdf - 第1314页

SEMI E5-1104 © SEMI 1982, 2004 256 Unit Identifier Equivalence Prefix Allowed Suffix Allowed Description micron um l0^-6*m No No Alternate name for a mic rometer. conventional micron of mercury umHg 133.32*Pa*10^-3 No No…

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SEMI E5-1104 © SEMI 1982, 2004 255
Unit Identifier Equivalence Prefix
Allowed
Suffix
Allowed
Description
gram-force gf 9.80665*N*10^-3 Yes No The weight of a gram mass when subjected to the
mean gravitational attraction of the Earth.
gray Gy Unknown Yes No SI unit of absorbed dose in the field of radiation
dosimetry.
henry H V*s/A Yes No SI unit of inductance.
hertz Hz c/s Yes No SI unit of frequency.
horsepower (electric) hp 746*W No No Archaic unit of power.
hour h 60*min No No Derived unit of time.
inch in 2.54*cm No No English unit of length.
conventional inch of
mercury
inHg 3386.4*Pa No No Unit equivalent to the pressure required to balance
a one inch high column of mercury in a
manometer at 32˚F.
conventional inch of
water
inH
2
O 249.09*Pa No No Unit equivalent to the pressure required to balance
a one inch high column of water in a manometer
at 4˚C.
ingot ing None No No Special SECS generic unit corresponding to the
entity of semiconductor manufacture from which
wafers are made.
ion ion None No No SECS II unique symbol equivalent to an atom that
carries an electric charge as a result of losing or
gaining electrons.
joule J N*m Yes No SI unit of energy, work, and quantity of heat.
kelvin K None No No SI unit of temperature. Also referred to as degree
Kelvin.
kilopound force klbf l000*lbf No No A multiple of the English unit of force or weight.
knot kn nmi/h No No Unit of velocity expressed in nautical miles per
hour.
lambert L (l/pi)*cd/cm^2 Yes No CGS unit of luminance. One lumen per square
centimeter leaves a surface whose luminance is
one lambert in all directions within a hemisphere.
leadframe ldfr None No Yes Special SECS generic unit corresponding to a
structure for leads which is removed after
p
ackaging. The structure may be fixed length or a
reel. The unit capacity is specified by the
symbol’s suffix, if provided. Otherwise, the
capacity is situation-dependent.
liter l 10^-3*m^3 Yes No A metric unit of volume.
lot lot None No No Special SECS generic unit corresponding to a
grouping of material which is undergoing the
same processing operations. The amount of
material represented by “1 lot” is situation-
dependent.
lumen lm cd*sr Yes No SI unit of luminous flux.
lux lx lm/m^2 Yes No SI unit of illuminance.
magazine mgz None No Yes Special, SECS generic unit corresponding to a
holder of fixed length leadframes. The unit
capacity is specified by the symbols suffix, if
provided. Otherwise, the capacity is situation-
dependent.
maxwell Mx 10^-8*Wb Yes No Electromagnetic CGS unit of magnetic flux.
meter m None Yes No SI unit of length.
metric ton t 10^3*kgf No No Unit of weight of force.
mho mho S Yes No Previous name for the SI unit siemens.
SEMI E5-1104 © SEMI 1982, 2004 256
Unit Identifier Equivalence Prefix
Allowed
Suffix
Allowed
Description
micron um l0^-6*m No No Alternate name for a micrometer.
conventional micron of
mercury
umHg 133.32*Pa*10^-3 No No Unit of pressure.
mil mil 10^-3*in No No English unit of length.
mile mi 5280*ft No No English unit of length.
conventional millimeter
of mercury
mmHg 133.322*Pa No No Unit of pressure.
millimicron nm 10^-9*m No No Alternate name for nanometer.
minute (plane angle) mins deg/60 No No One sixtieth of a degree (plane angle).
minute(time) min 60*s No No Unit of time.
mole mol 6.02252*l0^23 No No SI unit of number of entities within a substance.
month mo None No No Unit of time.
nautical mile nmi 1852*m No No English unit of measurement.
neper Np 0.1l51*dB Yes No Unit for expressing ratios of power levels.
newton N kg*m/s^2 Yes No SI unit of force.
nit nt cd/m^2 Yes No Alternate name for the SI unit of luminance,
candela per square meter.
oersted Oe 79.577472*A/m Yes No Electromagnetic CGS unit of magnetic field
strength.
ohm ohm V/A Yes No SI unit of resistance.
ounce (avoirdupois) oz lbf/16 No No English unit of weight
package pkg None No No Special SECS generic unit corresponding to an
individual entity both as a place for the die to
reside and as a completed unit.
pascal Pa N/m^2 Yes No SI unit of pressure or stress.
percent % 1/100 No No Ratio of parts per hundred.
phot ph lm/cm^2 Yes No CGS unit of illuminance.
pH pH 1 No No Normalized measure of acidity or alkalinity.
pint (UK) ptUK 0.56826*1 No No United Kingdom version of English unit of
capacity.
pint (US dry) ptUS 0.55061*1 No No United States version of English unit of dry
capacity.
pint (US liquid) pt 0.47318*1 No No United States version of English unit of liquid
capacity.
plate plt None No Yes Special SECS generic unit corresponding to a
temporary fixture used to hold die during
assembly operations. The unit capacity is
specified by the symbol’s suffix, if provided.
Otherwise, the capacity is situation-dependent.
poise P 36*N*s/m^2, or
36*kg/(m*s)
Yes No A CGS unit of viscosity equal to the viscosity of a
fluid that would require a shearing force of one
dyne to move a square centimeter area of either of
two parallel layers of fluid one centimeter apart
with a velocity of one centimeter per second
relative to the other layer, with the space between
the layers being filled with fluid.
pound lb 0.0310810*slug No No English unit of mass.
pound-force lbf 4.4482217*N No No English unit of force or weight.
poundal pdl 0.0310810*lbf No No Force required to accelerate a one pound mass at
one ft/s^2.
parts per million ppm 1/I0^6 No No Ratio of parts per million.
SEMI E5-1104 © SEMI 1982, 2004 257
Unit Identifier Equivalence Prefix
Allowed
Suffix
Allowed
Description
quart (UK) qtUK 1.1365*1 No No United Kingdom version of an English unit of
capacity.
quart (US dry) qtUS 1.1012*1 No No United States version of an English unit of dry
capacity.
quart (US liquid) qt 0.94635*1 No No United States version of an English unit of liquid
capacity.
rad rd 10^-2*Gy Yes No A unit of absorbed dose in the field of radiation
dosimetry.
radian rad None Yes No SI unit of plane angle.
rem rem 10^-2*Sv Yes No A unit of dose equivalent in the field of radiation
dosimetry.
revolution r c No No One complete cycle of a rotating body.
roentgen R Unknown No No A unit of exposure in the field of radiation
dosimetry.
second (plane angle) sec mins/60 No No One sixtieth of a minute of a degree.
second (time) s None Yes No SI unit of time.
siemens S 1/ohm SI unit
of
conducta
nce.
Yes No
sievert Sv Unknown Yes No SI unit of dose equivalent in the field of radiation
dosimetry.
slug slug 14.5939*kg No No English unit of mass.
standard cubic
centimeter per minute
sccm cc/min No No A unit of flow equivalent to one cubic centimeter
of a gas at standard temperature and pressure
flowing past a point in one minute.
standard liter per
minute
slpm 1/min No No A unit of flow equivalent to one liter of a gas at
standard temperature and pressure flowing past a
point in one minute.
steradian Sr Unknown Yes No SI unit of solid angle.
stilb sb cd/cm^2 Yes No A CGS unit of luminance.
stokes St P*cm^3/g Yes No A CGS unit of kinematic viscosity.
substrate substrate None No No Special SECS generic unit corresponding to the
entity of material being operated on, processed or
fabricated.
tesla T N/(A*m) or Wb/m^2 Yes No SI unit of magnetic flux density (magnetic
induction).
therm thm 10^5*Btu No No An English unit of energy.
ton (short) ton 2000*lbf No No English unit of weight.
torr torr mmHg Yes No Pressure unit. Alternative name for millimeters of
mercury.
tube tube None No Yes Special SECS generic unit corresponding to a
holder of packages arranged in a flow. The unit
capacity is specified by the symbol’s suffix, if
provided. Otherwise, the capacity is situation-
dependent.
var var Unknown Yes No SI unit for reactive power.
volt V W/A Yes No SI unit of voltage.
wafer wfr None No No Special SECS generic unit corresponding to the
entity of material on which semiconductor devices
are fabricated.