semi合集-English.pdf - 第2909页

SEMI E109-0305 © SEMI 2001, 2005 19 # Previous State Trigger New State Actions Comment 24 (no state) A reticle pod is instantiated. NOT LO CKED None. Data required to be available for this event report: PodID PortID 25 N…

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SEMI E109-0305 © SEMI 2001, 2005 18
# Previous State Trigger New State Actions Comment
17 WAITING
FOR HOST
A CancelPod service is
received.
SLOT MAP
VERIFICATION
FAIL
Prepare the Reticle
Pod for Unload.
Data required to be available for
this event report:
PortID (if valid)
PodID
LocationID
18 (no state) A reticle pod object is
instantiated.
NOT
ACCESSED
None. Data required to be available for
this event report:
PodID
19 (no state) A reticle pod object is
instantiated.
NOT
AVAILABLE
or
AVAILABLE
None. This is the default entry into
NOT ACCESSED. If the reticle
is instantiated by service, the
state is NOT AVAILABLE. If
instantiated by PodID read the
state is AVAILALBLE.
Data required to be available for
this event report:
PodID
20 NOT
AVAILABLE
The reticle pod is received by
the equipment.
AVAILABLE None. Data required to be available for
this event report:
PodID
PortID
21 AVAILABLE The equipment opens the
reticle pod.
IN ACCESS None. Data required to be available for
this event report:
PodID
22 IN ACCESS Normal with ReticleTransfer-
Job service for pod with
OutputPortID not equal to
zero: The actions defined in
the reticle transfer job have
completed and the equipment
closes the reticle pod.
PodComplete service: The
host sends the PodComplete
service and the equipment
closes the reticle pod.
Internal Pod Buffer: The
PodOut service has been
received.
Abnormal: The pod has failed
slot map verification and/or a
CancelPod service is received
and the pod is ready for
unload.
COMPLETE None. Data required to be available for
this event report:
PodID
23 NOT
ACCESSED
Via ID verification failure:
The pod has failed ID
verification and the carrier is
ready for unload.
Via Service: A CancelBind,
CancelPodNotification,
CancelPod, or
CancelReticleTransferJob has
been received prior to pod
arrival.
COMPLETE None. Data required to be available for
this event report:
PodID
SEMI E109-0305 © SEMI 2001, 2005 19
# Previous State Trigger New State Actions Comment
24 (no state) A reticle pod is instantiated. NOT LOCKED None. Data required to be available for
this event report:
PodID
PortID
25 NOT LOCKED A reticle pod is clamped or
otherwise physically
restrained from removal by an
entity external to equipment.
LOCKED None. Data required to be available for
this event report:
PortID
PodID
26 NOT LOCKED A reticle pod is clamped or
otherwise physically
restrained from removal by an
entity external to equipment.
RELEASED
AND LOCKED
or
HOLD
None. This is the default entry into
LOCKED. If the PodRelease
flag is set to Equipment Release
the state is RELEASED AND
LOCKED. If the PodRelease
flag is set to Host Release the
state is HOLD.
Data required to be available for
this event report:
PortID
PodID
27 HOLD A PodRelease service has
been received by the
equipment.
RELEASED
AND LOCKED
28 RELEASED
AND LOCKED
MANUAL Access Mode: The
POD ACCESSING state
enters COMPLETE and a
reticle pod is unclamped or
has had any restraints
preventing removal by an
external entity removed.
AUTO Access Mode and
Unclamp control trigger set to
Pod Closed: The POD
ACCESSING state enters
COMPLETE and a reticle pod
is unclamped or has had any
restraints preventing removal
by an external entity removed.
AUTO Access Mode and
Unclamp control trigger set to
AMHS Triggered Unclamp:
The POD ACCESSING state
is COMPLETE and the
AMHS arrives and starts a
PIO sequence.
NOT LOCKED None. Data required to be available for
this event report:
PortID
PodID
SEMI E109-0305 © SEMI 2001, 2005 20
# Previous State Trigger New State Actions Comment
29 POD Normal: The reticle pod is
unloaded from the equipment.
Abnormal by service:
CancelBind,
CancelPodNotification, or
CancelReticleTransferJob
service is received prior to pod
load.
Abnormal by equipment: An
equipment-based verification
fails and the equipment
performs a self-initiated
CancelBind service.
(no state) The equipment
destroys the
instance of this
reticle pod object.
Data required to be available for
this event report:
PodID
30 (no state) A Reticle Pod is loaded,
locked, and the id is read on a
load port for which no
previous reticle pod has been
instantiated.
LOCKED Data required to be available for
this event report:
PodID
PortID
#1
Only one collection event report is required when entering the Reticle Pod State Model (instantiating a reticle pod object). This event report
shall include the entry state of the all the substates of Reticle Pod State Model, (including RETICLE POD ID STATUS substate, the RETICLE
POD SLOT MAP STATUS substate, the RETICLE POD ACCESSING STATUS, and the RETICLE POD LOCKING STATUS).
10.4.5 Slot Map Read Details
10.4.5.1 The Slot Map shall be read on all production equipment prior to removal of reticles from the reticle pod.
10.4.6 Pod Read Failure — A pod read failure occurs when the PodID reader is present, in service, and reports that
it is unable to read the ID of a pod. This represents a transient random failure rather than a steady condition.
10.4.7 Bypass Read ID — A PodID reader may be unavailable: either out of service, not installed, or otherwise
malfunctioning and unable to execute a read operation. This represents a steady condition that often is known in
advance. The equipment shall provide a user-configurable variable BypassReadID that the user is able to set to
specify the action to take when a pod is received to an ASSOCIATED load port. In this case, the reticle pod object
is instantiated in the ID NOT READ state, and when the reticle pod is received, the state model transitions to either
WAITING FOR HOST or ID VERIFICATION OK, depending upon whether BypassReadID is FALSE (the default
value) or TRUE. When TRUE, then the PodID received in the Bind is used automatically. Otherwise, the pod
transitions to WAITING FOR HOST and waits for the host to send a ProceedWithPod. The ID used will be the ID
included with the ProceedWithPod.
11 Access Mode
11.1 Access Mode State Model
11.1.1 The Access Mode State Model defines the host view of equipment access mode, as well as the host
interactions with the equipment necessary to switch the access mode. Each Reticle Load Port has its own Access
Mode State Model. There are two access mode states. These are defined in ¶11.3.3.
11.1.2 The access mode for a reticle pod load port may be switched at anytime by the host or the operator, except
when the Reticle Load Port Reservation State Model for that Reticle Pod Load Port is in the RESERVED state or
during reticle pod transfer. Reticle pod transfer boundaries, for determining when access mode may be changed, are
designated by Table 8, Reticle Pod Transfer Boundaries.