semi合集-English.pdf - 第5650页

SEMI P10-0705 © SEMI 1990, 2005 145 8.1.668 SHIP_TRAVELER — (T or F) If T, requires delivery of m ask traveler document to the customer. 8.1.669 SHIPPING_ADDRESS — Address for delivery of masks. 8.1.670 SHIPPING_CONTACT …

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SEMI P10-0705 © SEMI 1990, 2005 144
8.1.645 SHIP_FIRST_POSTPELL_DIE_DIE_MAP — (T or F) If T, requires delivery of the first run, post-pellicle
die to die defect inspection map for the entire mask to be sent to customer.
8.1.646 SHIP_FIRST_PREPELL_DIE_DB_MSK_MAP — (T or F) If T, requires delivery of the first run, pre-
pellicle die to database defect inspection map for the entire patterned area to be sent to customer.
8.1.647 SHIP_FIRST_PREPELL_DIE_DB_PTN_MAP — (T or F) If T, requires delivery of the first run, pre-
pellicle die to database defect inspection map for the single pattern to be sent to customer.
8.1.648 SHIP_FIRST_PREPELL_DIE_DIE_MAP — (T or F) If T, requires delivery of the first run, pre-pellicle
die to die defect inspection map for the entire mask to be sent to customer.
8.1.649 SHIP_FIRST_ROT_POSTPELL_DIE_DIE_MAP — (T or F) If T, requires delivery of the first run, post-
pellicle rotated die to die defect inspection map for the entire mask to be sent to customer.
8.1.650 SHIP_FIRST_ROT_PREPELL_DIE_DIE_MAP — (T or F) If T, requires delivery of the first run, pre-
pellicle rotated die to die defect inspection map for the entire mask to be sent to customer.
8.1.651 SHIP_INSP_DATABASE_DATA — (T or F) If T, requires delivery of die-to-database inspection data to
the customer.
8.1.652 SHIP_MANUAL_INSPECTION_FORM — (T or F) If T, requires delivering to the customer a copy of the
manual inspection form.
8.1.653 SHIP_MEASURE_FILE_REGISTR_MAP — (T or F) If T, requires delivering to the customer the
measure file registration map.
8.1.654 SHIP_PHASE_SHIFT_MEASUREMENTS — (T or F) If T, <phase_shift_measurements> must be sent to
the customer.
8.1.655 SHIP_PHASE_SHIFT_REPORT — (T or F) If T, requires delivering to the customer a report of the phase
shift characteristics of the mask.
8.1.656 SHIP_REGISTR_DATA — (T or F) If T, requires delivery of all registration measurements, criteria and
evaluation data to the customer for all registration criteria specified.
8.1.657 SHIP_REPAIR_DATA — (T or F) If T, requires delivery of repair data to the customer.
8.1.658 SHIP_SEM_PHOTOS — (T or F) If T, requires delivery of SEM photos to the customer.
8.1.659 SHIP_SPECIAL_REQUEST — (text) If present, the data field specifies the special request of the
customer.
8.1.660 SHIP_STARLIGHT_MAP — (T or F) If T, requires delivery of a defect map from the Starlight to the
customer.
8.1.661 SHIP_SURF_INSP_GLASS_SIDE_MAP — (T or F) If T, the final, post-pellicle, surface inspection map
of the glass side of the mask must be sent to the customer.
8.1.662 SHIP_SURF_INSP_MEASUREMENTS — (T or F) If T, <surface_insp_measurements> must be sent to
the customer.
8.1.663 SHIP_SURF_INSP_PATTERN_SIDE_MAP — (T or F) If T, the final, post-pellicle, surface inspection
map of the patterned side of the mask must be sent to the customer.
8.1.664 SHIP_SURF_INSP_PELL_TOP_MAP — (T or F) If T, the final, post-pellicle, surface inspection map of
the pellicle on the patterned side of the mask must be sent to the customer.
8.1.665
SHIP_SURF_INSP_PELL_BOTTOM_MAP — (T or F) If T, the final, post-pellicle, surface inspection
map of the pellicle on the glass side of the mask must be sent to the customer.
8.1.666 SHIP_SURF_INSPECTION_MAP — (T or F) If T, the final, post-pellicle, surface inspection map(s) must
be sent to the customer.
8.1.667 SHIP_THRU_PELLICLE_DATA — (T or F) If T, requires delivery of through-pellicle defect inspection
criteria and evaluation data to the customer for all defect criteria specified. This should be final inspection data.
SEMI P10-0705 © SEMI 1990, 2005 145
8.1.668 SHIP_TRAVELER — (T or F) If T, requires delivery of mask traveler document to the customer.
8.1.669 SHIPPING_ADDRESS — Address for delivery of masks.
8.1.670 SHIPPING_CONTACT — Name of person to receive masks.
8.1.671 SHIPPING_EMAIL — Internet address for SHIPPING_CONTACT.
8.1.672 SHIPPING_FAX — Phone number for facsimile machine of SHIPPING_CONTACT.
8.1.673 SHIPPING_PHONE — Phone number for SHIPPING_CONTRACT.
8.1.674 SHIPPING_METHOD — Transportation method for masks, including special arrangements for off-hours
and weekends.
8.1.675 SHIPPING_METHOD_USED — Transportation method used to deliver masks.
8.1.676 SIZING — (n) The amount to increase or decrease the width and height of all geometry within a pattern
while fracturing. (n) is in microns and can be negative, indicating a decrease. Note that (n) results in a “one-sided”
change in feature size.
8.1.677 SIZING_BORDER_RULE — (FIT, INSIDE, OUTSIDE and others on request) Describes methodology for
applying SIZING at the borders of the output file and the effect on the final dimensions of the output file.
8.1.678 SIZING_RULE — (SQUARE, PARAGON, EXTEND, OCTAGON and others on request) Describes
methodology for applying SIZING around corners.
8.1.679 SO_NUMBER — Alphanumeric sales order number.
8.1.680 SOFTWARE_NAME — Name of the software program, not the brand (e.g., MaskRigger or MaskWeaver,
not MaskTools). If, for a given function_purpose, multiple software_program names appear, then they are
alternative software tools to achieve the desired outcome.
8.1.681 SOFTWARE_REVISION — (text, including …“OR HIGHER”) Revision identification, per software
vendor’s nomenclature.
8.1.682 START_BARCODE — (text) name of barcode.
8.1.683 START_BILLING_INFORMATION — (text) name of <billing_information>.
8.1.684 START_CD — Indicates beginning of <cd_group>. Alphanumeric data field identifies the collection to
establish which collections are hierarchically affected by another. The appearance of a <cd_definition> at a lower
level in the hierarchy supercedes the entire <cd_definition> at a higher level in the hierarchy if and only if it has the
same START_CD data field.
8.1.685 START_CD_GROUP_MEASUREMENTS — (text) name of <cd_group_measurements>.
8.1.686 START_CD_ISO_DENSE — (text) name of <cd_iso_dense_definition>.
8.1.687 START_CD_ISO_DENSE_RESULTS — (text) name of <cd_iso_dense_results>.
8.1.688 START_CD_MEASUREMENT — (text) name of <cd_measurement>.
8.1.689 START_CD_SET — Indicates beginning of <cd_set>. Alphanumeric data field identifies the collection to
establish which collections are hierarchically affected by another. The appearance of a <cd_set> at a lower level in
the hierarchy supercedes the entire <cd_set> at a higher level in the hierarchy if and only if it has the same
START_CD data field.
8.1.690 START_CD_SET_RESULTS — (text) name of <cd_set_results>.
8.1.691 START_CD_XY_DEFINITION — (text) name of <cd_xy_definition>.
8.1.692 START_CD_XY_RESULTS — (text) name of <cd_xy_results>.
8.1.693 START_CLOSURE_MEASUREMENTS — (text) name of <closure_measurements>
8.1.694 START_COATING — (text) name of <coating>.
8.1.695 START_DATA_FRACTURE — (text) name of <data_fracture> group.
SEMI P10-0705 © SEMI 1990, 2005 146
8.1.696 START_DATA_FUNCTION — (text) name of <data_function> group.
8.1.697 START_DATA_MANIPULATION — (text) name of group of sequential BOOLEAN and/or
<data_fracture> operations. The output pattern data from the first operation is the input pattern data for the next
operation and so on. The data field must be a unique identifier within <mask_order> as the results of one
<data_manipulation> may be referenced by another.
8.1.698 START_DEFECT_DEFINITION — (text) name of <defect_definition> group.
8.1.699 START_DEFECT_MEASUREMENTS — (text) name of <defect_measurements> group.
8.1.700 START_ETCH_DEPTH_MEASUREMENTS — Indicates the beginning of etch depth measurements
within <phase_shift_measurements>.
8.1.701 START_LITHO_INFORMATION — (text) name of <litho_information>.
8.1.702 START_MASK_RESULTS — Indicates the beginning of the file from the vendor to the customer
containing actual mask results data. Should match the data field of the START_ORDER to which it is responding
AND the data field of END_MASK_RESULTS.
8.1.703 START_MASK_RESULTS_OPTIONS — (text) name of <mask_results_options>.
8.1.704 START_MATERIALS_USED — (text) name of <materials_used>.
8.1.705 START_MEASURED_REGISTR_MARK —(text) name of <measured_registr_mark>.
8.1.706 START_OPC — (text) name of <opc_definition> group.
8.1.707 START_ORDER — Indicates the beginning of order entry data file from the customer to the vendor.
Should indicate the name(s) of the mask sets included.
8.1.708 START_PATTERN_GROUP_RESULTS — (text) name of <pattern_group_results>.
8.1.709 START_PATTERN_OPTIONS — (text) name of <pattern_options> group.
8.1.710 START_PHASE_ANGLE_MEASUREMENTS — Indicates the beginning of phase angle measurements
within <phase_shift_measurements>.
8.1.711 START_PHASE_SHIFT — (text) name of <phase_shift> group.
8.1.712 START_PHASE_SHIFT_MEASUREMENTS — (text) name of <phase_shift_measurements> group.
8.1.713 START_PLACEMENT — (text) name of <placement> group.
8.1.714 START_REGISTR — Indicates beginning of <registration> collection. Defines separation between
multiple <registration>s. Alphanumeric data field identifies the collection to establish which collections are
hierarchically superceded by another; also for reference by REGISTR_RELATIVE.
8.1.715 START_REGISTR_MEASUREMENTS — (text) name of <registr_measurements> group.
8.1.716 START_REPAIR_DEFINITION — (text) name of <repair_definition> group.
8.1.717 START_SEM_PHOTO — (text) name of <sem_photo> group.
8.1.718 START_SHIP_PLOT — Indicates beginning of <ship_plot> collection. Alphanumeric data field identifies
the collection to establish which collections are hierarchically affected by another. The appearance of a <ship_plot>
with the same START_SHIP_PLOT data field at a lower level in the hierarchy (see §6) supersedes the <ship_plot>
at a higher level in the hierarchy.
8.1.719 START_SHIP_TO — (text) name of <ship_to> group.
8.1.720
START_SHIPPABLE_DATA — (text) name of <shippable_data> group.
8.1.721 START_SUBSTRATE — (text) name of <substrate> group.
8.1.722 START_SURFACE_DEFINITION — (text) name of <surface_definition> group.
8.1.723 START_SURFACE_INSP_MEASUREMENTS — (text) name of <surface_insp_measurements> group.
Must match START_SURFACE_DEFINITION of corresponding <surface_definition> group.