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SEMI E116-0705 © SEMI 2002, 2005 18 11.3 All events require the following data variables to be available: < Clock > ( Clo ck represents the timestamp for the occurrence of the event) < EPTState > <Previous…
SEMI E116-0705 © SEMI 2002, 2005 17
VARIABLE NAME DESCRIPTION TYPE ACCESS COMMENT
TaskName Name of the task that
was started by the
module or equipment at
the occurrence of an EPT
state transition.
Text, 0 to 80
characters
RO TaskName is defined by the
equipment supplier.
TaskType The type of EPT Task
currently running on this
EPT module.
Enumerated RO 0 = No Task
1 = Unspecified
2 = Process – adding value (e.g.,
exposing)
3 = Support – incapable of adding
value (e.g., Handling/Transport)
4 = Equipment Maintenance (e.g.,
equipment initiated clean cycle)
5 = Equipment Diagnostics (e.g.,
equipment-initiated health check)
6 = Waiting (e.g., chamber waiting
for a robot to remove a substrate)
PreviousTaskName Name of the task that
was completed by the
module or equipment at
the occurrence of an EPT
state transition.
Text, 0 to 80
characters
RO
PreviousTaskType The type of the task that
was completed by the
module or equipment at
the occurrence of an EPT
state transition.
Enumerated RO 0 = No Task
1 = Unspecified
2 = Process – adding value (e.g.,
exposing)
3 = Support – incapable of adding
value (e.g., Handling/Transport)
4 = Equipment Maintenance (e.g.,
equipment initiated clean cycle)
5 = Equipment Diagnostics (e.g.,
equipment-initiated health check)
6 = Waiting (e.g., chamber waiting
for a robot to remove a substrate)
BlockedReason The number of the block
condition that initiated
the transition to the
BLOCKED state for the
module or equipment.
Enumerated RO 0 – Not Blocked
1 – Unknown
2 – Safety Threshold
3 – Error Condition
4 – Parametric Exception
5 – Aborting, Aborted
6 – Pausing, Paused
7 – Reserved
8 – Reserved
9 – Reserved
BlockedReasonText The reason why the
transition was made to
the BLOCKED state for
the module or
equipment.
Text, 0 to 80
characters
RO Description of the Blocked reason
SEMI E116-0705 © SEMI 2002, 2005 18
11.3 All events require the following data variables to be available:
< Clock > (Clock represents the timestamp for the occurrence of the event)
< EPTState >
<PreviousEPTState>
< EPTStateTime >
<TaskName>
<TaskType>
<PreviousTaskName>
<PreviousTaskType>
Additional data required for specific transitions are shown in Table 5.
Table 5 Events
EVENT NAME STATE MODEL
TRANSITION
NUMBER
DESCRIPTION REQUIRED DATA
EPTStateChange
0
1, 2, 3, 4, 5, 6, 7, 8,
9
Triggered by a EPT State change at the
equipment-level.
<EqpName >
The following additional data is
required for Transitions 5, 8
and 9:
< Blocked Reason>
< BlockedReasonText>
EPTStateChange
i
1, 2, 3, 4, 5, 6, 7, 8,
9
Triggered by an EPT State change at the
EPT module-level.
There exist i+1 EPTStateChange events,
where i is the number of EPT modules.
EPTStateChange
1
is triggered by a state
change at the 1
st
EPT module,
EPTStateChange
2
is triggered by a state
change at the 2
nd
EPT module, etc.
<ModuleName
i
>
The following additional data is
required for Transitions 5, 8
and 9:
< Blocked Reason>
< BlockedReasonText>
12 Requirements for Compliance
12.1 Table 6 provides a checklist for EPT compliance.
Table 6 EPT Compliance Statement
Fundamental EPT Requirements EPT Section Implemented EPT Compliant
EPT State Model for Equipment 9 Yes No Yes No
EPT State model for each EPT module 9 Yes No Yes No
EPTTRacker Objects 10 Yes No Yes No
EPT Events 11 Yes No Yes No
13 Related Documents
13.1.1 International SEMATECH Equipment Performance Management User Requirements Document
13.1.2 ISMT/J300E Equipment Performance Management Operator Requirements Document (URD)
13.1.3 Harel, D., “Statecharts: A Visual Formalism for Complex Systems,” Science of Computer Programming 8
(1987) 231-274.
SEMI E116-0705 © SEMI 2002, 2005 19
RELATED INFORMATION 1
EXAMPLES OF EQUIPMENT PERFORMANCE TRACKING (EPT)
NOTICE: This related information is not an official part of SEMI E116 and was derived from North American
Information and Control. This related information was approved for publication by full letter ballot procedures on
April 30, 2002.
R1-1 Examples of EPT Modules per Tool Type
R1-1.1 Table R1-1 lists examples of EPT modules for various equipment types. It is not required that each tool type
support all or be limited to only the modules listed; rather, the listing is provided as an example only.
Table R1-1 Example EPT Modules
Tool Type Modules
CMP/
Planar
Loadports Alignment
Stage
Wafer
Handler
Transport Polish
Table
Scrub
Station
Rinse
Station
Linked Litho
Track
Loadports Central
Wafer
Handler
Module
Spin Cup Link
Transfer
Station
Buffer Vapor Prime Chill
Plate
Soft Bake
Oven
Linked Litho
Expose
Expose
Stage
Wafer
Transfer
Link
Transfer
Station –
In port
Link
Transfer
Station –
Out port
Reticle
Stage
Reticle
Library
Reticle
Loader
Arm
Thin Film
Sputter
Loadports Central
Wafer
Handler(s)
Cool Down PVD Airlock Argon
Sputter Etch
Degas In Situ
Metrology
CVD
Diffusion
Furnace
Loadports Quartz
Loading
Station
Reactor
Module
Wafer
Transfer
System
Buffer
Implanter Loadports Central
Wafer
Handler(s)
Implant
Chamber
Platen Notch
Aligner
Coldplate
Plater Loadports Central
Wafer
Handler
Degas Plate
Chamber
Thermal
Anneal
Loadports Central
Wafer
Handler
Bake Stage
Wet Etcher Loadports Central
Wafer
Handler
Aligner Bath CH 1 Bath CH
2
Buffer
Dry Etcher Loadports Central
Wafer
Handler
Aligner Chill Plate Etch CH
1
Etch CH 2
Wafer Sorter Loadports Central
Wafer
Handler
Aligner