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SEMI E52-0703 © SEMI 1995, 2003 8 Code Gas Name Symbol Formula Synonym Ref 248 Tetrachlorodiborane B2Cl4 B 2 Cl 4 2 249 Tetrafluorodiborane B2F4 B 2 F 4 2 250 Tetramethylgermanium C4H12Ge (CH 3 ) 4 Ge 2 251 Tetramethylsi…

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SEMI E52-0703 © SEMI 1995, 2003 7
Code Gas Name Symbol Formula Synonym Ref
203 Chlorodifluoroethane C2H3ClF2 CH
3
-CF
2
Cl R-142b 4
204 Chlorodifluoroethylene C2HClF2 CF
2
=CHCl R-1122, FREON-1122 4
205 Chlorosilane SiH3Cl SiH
3
Cl 2
206 Chlorotrifluoroethylene C2ClF3 FCCl=CF
2
R-1113, FREON-1113 2
207 Cyclobutane C4H8 C
4
H
8
Tetramethylene 2
208 Diazomethane CH2N2 CH
2
N
2
Acomethylene 2
209 Dibromodifluoromethane CBr2F2 Br
2
CF
2
R-12B2, FREON-12B2 2
210 Dichloroethylene C2H2Cl2 CH
2
=CCl
2
Vinylidene Chloride 2
211 Dichloroethylene -cis C2H2Cl2 CHCl=CHCl 2
212 Dichlorodimethylsilane C2H6SiCl2 (CH
3
)
2
SiCl
2
2
213 Diethylamine C4H11N (C
2
H
5
)
2
NH 2
214 Diethylzinc C4H10Zn Zn(C
2
H
5
)
2
2
216 Arsenic Trichloride AsCl3 AsCl
3
2
217 Digermane Ge2H6 Ge
2
H
6
2
218 Dimethylcadmium C2H6Cd (CH
3
)
2
Cd 2
219 Dimethylsilane C2H8Si (CH
3
)
2
SiH
2
2
220 Dimethyltellurium C2H6Te (CH
3
)
2
Te 2
221 Ethyl Fluoride C2H5F CH
3
CH
2
F Fluoroethane, R-161, FREON-
161
2
222 Ethylene Dichloride C2H4Cl2 ClCH
2
CH
2
Cl 1,2 Dichloroethane 2
223 Fluoroacetylene C2HF FC=CH 2
224 Fluorotriethoxysilane C6H15OSiF (C
2
H
5
O)
3
SiF 2
225 Hexafluoroacetone C3F6O (CF
3
)
2
CO 2
226 Aluminum Trifluoride AlF3 AlF
3
2
227 Hexamethyldisilazane C6H19Si2N (CH
3
)
6
Si
2
NH 2
228 Hexamethyldisiloxane C6H18Si2O (CH
3
)
6
Si
2
O 2
229 Hydrogen telluride H2Te H
2
Te 2
230 Iron Carbonyl C5O5Fe Fe(CO)
5
2
231 Isopentane C5H12 CH
3
CH
2
CH(CH
3
)
2
2-Methylbutane 2
232 Difluoroamidogen NF2 NF
2
2
233 Monoethylamine C2H7N C
2
H
5
NH
2
2
234 Monomethyl hydrazine CH6N2 CH
3
N
2
H
3
2
235 Nitromethane CH3NO2 CH
3
NO
2
2
236 Octafluorobutane C4F8 C
4
F
8
3
237 Octane C8H18 CH
3
(CH
2
)
6
CH
3
2
238 Oxygen Dichloride OCl2 OCl
2
2
239 Pentaborane(11) B5H11 B
5
H
11
2
240 Pentane C5H12 CH
3
(CH
2
)
3
CH
3
2
241 Perfluorobutane C4F10 C
4
F
10
3
242 Arsenic Tribromide AsBr3 AsBr
3
2
243 Rhenium Hexafluoride ReF6 ReF
6
2
244 Deuteriumsilane SiD4 SiH
2
4
2
245 Stibine SbH3 SbH
3
2
246 Sulfur Trioxide SO3 SO
3
2
247 Tellurium Hexafluoride TeF6 TeF
6
2
SEMI E52-0703 © SEMI 1995, 2003 8
Code Gas Name Symbol Formula Synonym Ref
248 Tetrachlorodiborane B2Cl4 B
2
Cl
4
2
249 Tetrafluorodiborane B2F4 B
2
F
4
2
250 Tetramethylgermanium C4H12Ge (CH
3
)
4
Ge 2
251 Tetramethylsilane C4H12Si (CH
3
)
4
Si 2
252 Tetramethyl Tin C4H12Sn (CH
3
)
4
Sn 2
253 Tetrasilane Si4H10 Si
4
H
10
2
254 Titanium Tetraiodide TiI4 TiI
4
2
255 Tribromostibine SbBr3 SbBr
3
2
256 Trichlorostibine SbCl3 SbCl
3
2
257 Triethylaluminum C6H15Al (C
2
H
5
)
3
Al 2
258 Triethylantimony C6H15Sb (C
2
H
5
)
3
Sb 2
259 Trifluoroacetic Acid CF3CO2H CF
3
CO
2
H 2
260 Trifluoroacetonitrile C2F3N F
3
CCN 2
261 Trifluorosilane SiHF3 SiHF
3
2
262 Triisobutylaluminum C12H27Al (C
4
H
9
)
3
Al 2
263 Xylene m- C8H10 1,3-(CH
3
)
2
C
6
H
4
1,3 Dimethyl Benzene 3
264 Xylene p- C8H10 1,4-(CH
3
)
2
C
6
H
4
1,4 Dimethyl Benzene 3
265 Dichloromethane CH2Cl2 CH
2
Cl
2
266 Octafluorocyclopentene C5F8 CF
2
=C(CF
3
)-CF=CF
2
3
267 Hexafluoro Propane C3H2F6 CH
2
FCF
2
CF
3
1,1,1,2,2,3-Hexafluoropropane 2
268 Methylene Bromide CH2Br2 CH
2
Br
2
UN 2664; Methyl dibromide,
Dibromomethane
1
269 Hydrazoic Acid HN3 HN
3
1
270 Hexafluoro-2-Butyne C4F6 CF
3
C=CCF
3
Bis(trifluoromethyl)acetylene;
Perfluoro-2-butyne
3
271 Butanol-1 C4H10O CH
3
CH
2
CH
2
CH
2
OH 3
272 Hexafluoro Acetylacetone C5H2F6O2 C
5
H
2
F
6
O
2
1
273 Tungsten Hexacarbonyl C6O6W W(CO)
6
1
274 TEAsat C6H15O4As (C
2
H
5
O)
3
AsO 1
275 Hafnium Tetranitrate HfN4O12 Hf(NO
3
)
4
1
276 Acrylonitrile C3H3N CH
2
=CHCN Acrylon; Propenenitrile 3
277 Trimethylborane C3H9B (CH
3
)
3
B 2
278 Silicon tetrabromide Br4Si Br
4
Si SiBr4; Tetrabromosilane; Silicon
(IV) bromide
2
279 Tantalum (V) ethoxide C10H25O5Ta C
10
H
25
O
5
Ta Ta(Oet)5 2
280 Diphenylmethylenediamine C13H14N2 C
13
H
14
N
2
2
281 Diphenylmethan-4,4' -diisocyanat C15H10N2O C
15
H
10
N
2
O UN 2489; Benzene,1,1' -
methylenebis(isocyanatophenyl)
2
282 Tetrakis( diethylamino )titanium C16H40N4Ti C
16
H
40
N
4
Ti 2
283 Acetic acid C2H4O2 CH
3
COOH Ethanoic acid; UN 2789; 2
284 Dimethyl selenide C2H6Se C
2
H
6
Se (CH3)2Se; Selenium dimethyl;
Dimethylselenium
2
285 Ethoxy silane C2H8OSi C
2
H
8
OSi 2
286 Hexafluoropropylene oxide C3F6O C
3
F
6
O Hexafluoroepoxypropane 2
287 Trimethoxy silane C3H10O3Si C
3
H
10
O
3
Si 2
288 Pentafluoropropanol C3H3F5O C
2
F
5
CH
2
OH Perfluorodihydropropanol,
1,1,1,2,2-Pentafluoropropane
2
SEMI E52-0703 © SEMI 1995, 2003 9
Code Gas Name Symbol Formula Synonym Ref
289 Acrylic acid C3H4O2 C
3
H
4
O
2
2-Propenoic acid;
CH2=CHCOOH
2
290 Trifluoropropane C3H5F3 C
3
H
5
F
3
1,1,1-Trifluoropropane;
CH3CH2CF3
2
291 Ethyl Formate C3H6O2 HCO
2
C
2
H
5
Ethyl ester formic acid;
HC00C2H5
3
292 Methyl acetate C3H6O2 CH
3
CO
2
CH
3
Methyl ester acetic acid; UN
1231
3
293 Propenamine C3H7N C
3
H
7
N Allylamine; Monoallylamine; UN
2334
2
294 Trimethyl ester phosphoric acid C3H9O4P C
3
H
9
O
4
P Methyl phosphate;
Trimethoxyphosphine oxide
2
295 Heptafluoropropane C3HF7 C
3
HF
7
1,1,1,2,3,3,3-Heptafluoropropane,
Freon 227
2
296 Hexafluorocyclobutene C4F6 C
4
F
6
Perfluorocyclobutene;
1,2,3,3,4,4-
Hexafluorocyclobutene
3
297 Hexafluoro butadiene-1,3 C4F6 CF
2
=CF-CF=CF
2
Perfluorobutadiene-1,3; 3
298 Diethyl sulfide C4H10S C
4
H
10
S UN 2375; Ethyl sulfide; 2
299 Tetramethoxygermanium C4H12GeO4 (CH
3
O)
4
Ge Ge(OMe)4 2
300 Dimethoxydimethyl silane C4H12O2Si (CH
3
O)
2
Si(CH
3
)
2
KBM 22 2
301 Tetramethoxy silane C4H12O4Si (CH
3
O)
4
Si Silicic Acid (H4SiO4);
Tetramethyl ester; Tetramethyl
silicate
2
302 Tetramethyl lead C4H12Pb (CH
3
)
4
Pb (CH3)4Pb; Plumbane,
tetramethyl;
2
303 Trimethylvinylsilane C5H12Si C
5
H
12
Si Vinyltrimethylsilane;
CH2=CHSi(CH3)3
2
304 Pyridine C5H5N C
5
H
5
N Azabenzene; Azine 2
305 Methyl methacrylate polymer C5H8O2 C
5
H
8
O
2
Poly(methyl methacrylate);2-
Methyl1-2-propenoic acid
2
306 Triethyl arsine C6H15As (C
2
H
5
)
3
As Arsine; Triethylarsenic 2
307 Trietoxy arsine C6H15AsO3 (C
2
H
5
O)
3
As Triethyl ester arsenous acid;
Triethyl arsenite
2
308 Triethoxyborane C6H15BO3 (C
2
H
5
O)
3
B Boron triethoxide 2
309 Triethylindium C6H15In (C
2
H
5
)
3
In Indium triethyl 2
310 Triethylamine C6H15N (C
2
H
5
)
3
N UN 1296; Ethanamine 2
311 Triethoxyphosphine C6H15O3P (C
2
H
5
O)
3
P Triethyl phosphite; UN 2323;
Phosphorous acid, triethyl ester
2
312 Triethoxy silane C6H16O3Si (C
2
H
5
O)
3
SiH 2
313 Triethyl silane C6H16Si (C
2
H
5
)
3
SiH (C2H5)3SiH 2
314 Trimethylisoxazole C6H9NO CH
3
CH=CHCH=CHCON
H
2
3,4,5-Trimethylisoxazole,
Sorbamide
3
315 Tetraethylgermane C8H20Ge (C
2
H
5
)
4
Ge (C2H5)4Ge; Germanium
tetraethyl
2
316 Tetraethyl lead C8H20Pb (C
2
H
5
)
4
Pb Plumbane, tetraethyl; UN 1649 2
317 Tetraethyl silane C8H20Si C
8
H
20
Si Tetraethylsilane;
Tetraethylsilicon; (C2H5)4Si
2
318 Tetrakis( dimethylamino )titanium C8H24N4Ti C
8
H
24
N
4
Ti 2
319 Styrene C8H8 C
8
H
8
Ethenylbenzene; UN 2055 2
320 Triallylamine C9H15N C
9
H
15
N 2