semi合集-English.pdf - 第299页
SEMI E47.1-0305 © SEMI 1997, 2005 14 Symbol Used Value Specified Datum Measured From Feature Measured To y 46 71 ± 1 mm (2.80 ± 0.04 in.) facial datum plane front and rear edge of robotic handling flange y 47 58 mm (2.28…
SEMI E47.1-0305 © SEMI 1997, 2005 13
Symbol
Used
Value Specified
Datum
Measured From
Feature Measured To
x46 71 ± 1 mm (2.80 ± 0.04 in.) bilateral datum plane sides of robotic handling flange
x47 58 mm (2.28 in.) minimum bilateral datum plane end of robotic handling flange front
and rear
x50‡ 214 ± 1 mm
(8.43 ± 0.04 in.)
bilateral datum plane outer edge of side fork-lift flanges
and furthest reach of human handles
x51 140 mm (5.51 in.) minimum bilateral datum plane interior of FOUP sides between y11
and y49
x52 170 mm (6.69 in.) minimum bilateral datum plane interior of FOUP sides between y49
and y52
x53 195 mm (7.68 in.) maximum bilateral datum plane FOUP sides (apart from human
handles)
x56 194.75 ± 0.25 mm
(7.667 ± 0.010 in.)
bilateral datum plane outside edge of bottom conveyor rails
x57 180 mm (7.09 in.) maximum bilateral datum plane FOUP sides underneath bottom
conveyor rails
x58‡ 75 mm (2.95 in.) minimum bilateral datum plane end of rear conveyor rails
x60 8 ± 0.5 mm
(0.31 ± 0.02 in.)
bilateral datum plane sides of slot for center retaining
feature
x61 190.5 mm (7.50 in.) minimum bilateral datum plane outer edge of front clamp flange
x62 188.5 mm (7.42 in.) maximum bilateral datum plane encroachment of FOUP behind front
clamp flange
x63‡ 199.3 ± 1 mm
(7.85 ± 0.04 in.)
bilateral datum plane nearest point of notches in side fork-
lift flanges
x64 35 mm (1.38 in.) minimum bilateral datum plane sides of front retaining feature
x65 187.5 mm (7.38 in.) bilateral datum plane vertical axis of cylindrical fork-lift pi
n
holes in left and right bottom
conveyor rails
x66 31 mm (1.22 in.) maximum bilateral datum plane near side of advancing FOUP sensing
pads
x67 34 mm (1.34 in.) minimum bilateral datum plane far side of advancing FOUP sensing
pads
x68 25 mm (0.98 in.) minimum bilateral datum plane sides of volume above ramp on front
retaining feature
x69‡ 7.6 ± 0.1 mm
(0.299 ± 0.004 in.)
bilateral datum plane or
vertical plane rotated
away from it about
nominal wafer center line
beginning of angled surface of the
kinematic grooves in the top robotic
handling flange
y40 122.5 ± 2.5 mm
(4.82 ± 0.10 in.)
facial datum plane front of side fork-lift flanges and
furthest reach of human handles
toward the front
y41 30 ± 1 mm
(1.18 ± 0.04 in.)
facial datum plane left orientation notch on robotic
handling flange
y42 ± 0.5 mm (± 0.02 in.) flatness over each area not applicable door and frame seal zones and the
reserved spaces for vacuum
application
y44 53 mm (2.09 in.) maximum facial datum plane encroachment of FOUP underneath
robotic handling flange
y45 65.3 ± 1 mm (2.57 ± 0.04 in.) facial datum plane nearest point of front and rear
position and orientation notches on
robotic handling flange
SEMI E47.1-0305 © SEMI 1997, 2005 14
Symbol
Used
Value Specified
Datum
Measured From
Feature Measured To
y46 71 ± 1 mm (2.80 ± 0.04 in.) facial datum plane front and rear edge of robotic
handling flange
y47 58 mm (2.28 in.) minimum facial datum plane end of robotic handling flange sides
y49 134 mm (5.28 in.) maximum facial datum plane interior of FOUP sides between x51
and x52
y50 130 mm (5.12 in.) minimum facial datum plane rear of upper door frame volume
y51 140 mm (5.51 in.) minimum facial datum plane rear of door
y52 165.5 ± 0.5 mm (6.52 ± 0.02 in.) at door and frame
seal zones and at reserved spaces for vacuum
application and 166 mm (6.54 in.) maximum
elsewhere on door or FOUP shell
facial datum plane FOUP front
y53 190 mm (7.48 in.) maximum facial datum plane FOUP rear
y56‡ 189.75± 0.25 mm (7.470 ± 0.010 in.) facial datum plane outside edge of front and rear bottom
conveyor rails
y57‡ 178 mm (7.01 in.) maximum facial datum plane encroachment of FOUP front and rear
underneath bottom conveyor rails
y58 75 mm (2.95 in.) minimum facial datum plane end of left and right conveyor rails
y60 155 mm (6.10 in.) maximum facial datum plane encroachment of FOUP behind front
clamp flange
y61 3.5 ± 0.5 mm
(0.14 ± 0.02 in.)
front of front clamp
flange at FOUP front
rear of front clamp flange
y62 28 mm (1.10 in.) maximum facial datum plane rear of front retaining feature
y63 37.3 ± 0.5 mm
(1.47 ± 0.02 in.)
facial datum plane rear of ramp on front retaining feature
y64 42.1 ± 0.5 mm
(1.66 ± 0.02 in.)
facial datum plane front of ramp on front retaining
feature and front side of advancing
FOUP sensing pads
y65 104 mm (4.09 in.) minimum facial datum plane front of front retaining feature
y66 50 mm (1.97 in.) minimum facial datum plane rear side of advancing FOUP sensing
pads
y67 25 mm (0.98 in.)
facial datum plane origin of r67 on bilateral datum plane
y68‡ 55 mm (2.17 in.) maximum facial datum plane near end of the front kinematic
groove in the top robotic handling
flange
y242‡ 150 mm (5.75 in.) maximum facial datum plane front conveyor surface edge closest
to facial datum plane
y243‡ If the front conveyor surface is farther from HDP
than the front conveyor rail (defined by bottom of
front seal zone):
161.0 mm (1.0 mm
(6.34 (0.04 in.)
facial datum plane front conveyor surface edge furthest
from facial datum plane
If the front conveyor surface is coplanar with the
front conveyor rail (defined by bottom of front seal
zone):
165.5 mm (0.5 mm
(6.52 (0.02 in.)
y244‡ 155.0 mm maximum facial datum plane rear conveyor placement volume
front boundary
y245‡ 169.0 mm minimum facial datum plane rear conveyor placement volume rear
boundary
SEMI E47.1-0305 © SEMI 1997, 2005 15
Symbol
Used
Value Specified
Datum
Measured From
Feature Measured To
z316‡ 7.0 mm minimum horizontal datum plane rear conveyor placement volume
upper boundary
z2 2 mm (0.08 in.) maximum horizontal datum plane bottom of carrier sensing pads and
info pads (when down)
z41 0 mm (0 in.) minimum external horizontal datum
plane
bottom of FOUP
z43 2 ± 1 mm (0.08 ± 0.04 in.) external horizontal datum
plane
bottom conveyor rails
z44 11 ± 0 mm
(0.43 ± 0 in.)
external horizontal datum
plane
internal horizontal datum plane
z46‡ 60 ± 1 mm
(2.36 ± 0.04 in.)
external horizontal datum
plane
bottom of side fork-lift flanges
z47 210 ± 1 mm
(8.27 ± 0.04 in.)
for 13-wafer FOUP and
330 ± 1 mm
(12.99 ± 0.04 in.)
for 25-wafer FOUP
external horizontal datum
plane
bottom of robotic handling flange
z48 15 mm (0.59 in.) minimum bottom of robotic
handling flange
encroachment of FOUP top
underneath robotic handling flange
z49 8 mm (0.31 in.) maximum bottom of robotic
handling flange
top of robotic handling flange and
upper door frame volume
z50 5 mm (0.20 in.) minimum bottom of robotic
handling flange
encroachment of FOUP top
underneath the center hole in the top
robotic handling flange
z59 72 mm (0.31 in.) minimum external horizontal datum
plane
top of notches in side fork-lift flanges
z60 8.0 ± 0.5 mm
(0.31 ± 0.02 in.)
external horizontal datum
plane
top of slot in center retaining feature
z61 15 mm (0.59 in.) minimum external horizontal datum
plane
top of chamber above slot in center
retaining feature
z62 18 mm (0.71 in.) minimum external horizontal datum
plane
top of front retaining feature
z63 7.5 ± 0.5 mm
(0.30 ± 0.02 in.)
external horizontal datum
plane
top of ramp on front retaining feature
z65 7 mm (0.28 in.) minimum horizontal datum plane upper boundary of cylindrical fork-lift
pin holes in left and right bottom
conveyor rails
z66 55.5 mm (2.19 in.) maximum external horizontal datum
plane
encroachment of FOUP behind
bottom front clamp flange
z67 79.5 mm (3.13 in.) minimum external horizontal datum
plane
encroachment of FOUP behind
bottom front clamp flange
z68 133.5 mm (5.26 in.) maximum
for 13-wafer FOUP and
253.5 mm (9.98 in.) maximum
for 25-wafer FOUP
external horizontal datum
plane
encroachment of FOUP behind top
front clamp flange
z69 157.5 mm (6.20 in.) minimum
for 13-wafer FOUP and
277.5 mm (10.93 in.) minimum
for 25-wafer FOUP
external horizontal datum
plane
encroachment of FOUP behind top
front clamp flange
‡ These dimensions define optional features.