semi合集-English.pdf - 第4050页

SEMI F53-0600 © SEMI 2000 7 14.1.7.1 Where reference conditions ar e de fined by 50% FS flow with the EMI sou rce at zero field strength. 14.1.8 R ecord these values in Table 2 . 14.2 Interpretation of Results 14.2.1 The…

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SEMI F53-0600 © SEMI 2000 6
13.8.3.1 Connect spike generator output between
negative DC lead and ground and adjust spike generator
output control for minimum amplitude.
13.8.3.2 Using the X100 probe, connect one channel
of the scope to the negative lead in order to monitor the
amplitude of the spike applied on the negative lead. Put
the scope probe ground clip on the green wire safety
ground, not on any of the spike generator output
terminals.
13.8.3.3 Energize test equipment and observe polarity
of low amplitude spikes to determine the polarity of the
transient. Connection to the generator output should be
such that positive spikes are applied on the negative
lead. If pulses are negative, reverse leads at generator
output.
13.8.3.4 Repeat Sections 13.8.2.4 through 13.8.2.6
with the positive voltage spikes applied to the negative
lead. Then go on to Section 13.8.3.5.
13.8.3.5 Reduce spike amplitude control, de-energize
test equipment, and turn off DC power before switching
spike polarity.
13.8.3.6 Reverse leads at the spike generator output to
apply negative spikes to the controller.
13.8.3.7 Energize test equipment.
13.8.3.8 Repeat Sections 13.8.2.4 through 13.8.2.6
with the negative voltage spikes applied to the negative
lead. Then go on to Section 13.8.3.9.
13.8.3.9 Reduce spike amplitude to zero, de-energize
test equipment, turn off the DC power, and disconnect
equipment from test setup patch panel.
13.8.4 Spike on control (setpoint) signal lead:
13.8.4.1 Connect spike generator output between
control signal lead and ground and adjust spike
generator output control for minimum amplitude.
13.8.4.2 Using the X100 probe, connect one channel
on the scope to monitor the amplitude of the spike
applied on the setpoint lead. Put the scope probe
ground clip on the green wire safety ground, not on any
of the spike generator output terminals.
13.8.4.3 Energize test equipment and observe polarity
of low amplitude spikes to determine the polarity of the
transient. Connection to the generator output should be
such that positive spikes are applied on the setpoint
lead. If pulses are negative, reverse leads at generator
output.
13.8.4.4 Apply the maximum DC control signal level.
13.8.4.5 Repeat Sections 13.8.2.5 and 13.8.2.6 with
the positive voltage spikes applied to the setpoint lead.
Then go on to Section 13.8.4.6.
13.8.4.6 Reduce spike amplitude control, de-energize
test equipment, and turn off DC power before switching
spike polarity.
13.8.4.7 Reverse leads at the spike generator output to
apply negative spikes to the controller.
13.8.4.8 Energize test equipment.
13.8.4.9 Apply the maximum DC control signal level.
13.8.4.10 Repeat Sections 13.8.2.5 and 13.8.2.6 with
negative voltage spike applied to the setpoint lead.
13.8.4.11 Reduce spike amplitude to zero, de-energize
test equipment, turn off the DC power, and disconnect
equipment from test setup patch panel.
14 Calculations or Interpretation of Results
14.1 Calculations
NOTE 7: Use the data sheet (see Table 1) to record the test
data. Then record the calculated values at each data point in
Table 2.
14.1.1 Convert MFC indicated flow output data (v)
and the flow standard output data to percent of full-
scale flow as follows:
MFC Indicated Flow:
Percent of Full-Scale Flow =
Output Data (v)× 100
Full Scale output (v)
14.1.2 Record on data sheet for each measurement
point.
14.1.3 Flow Standard (actual flow)
14.1.3.1 Follow the manufacturer’s recommendations
for the flow standard output conversion to percent of
full scale.
14.1.4 Record on data sheet for each measurement
point.
14.1.5 Calculate the zero-corrected percent of full-
scale values for both the MFC indicated flow and the
flow standard output as follows:
MFC Indicated Flow or Standard Flow = MFC or Flow
Standard Value (%FS) at a Data Point – MFC or Flow
Standard Value (%FS) at the Zero Flow
14.1.6 Record these values at each data point in Table
2.
14.1.7 Calculate the change in flow for the MFC and
flow standard as follows:
Change in Flow (%FS) = MFC Standard Value (%FS)
Corrected for Zero – MFC or Flow Standard Value
(%FS) Corrected for Zero at Reference Conditions
SEMI F53-0600 © SEMI 20007
14.1.7.1 Where reference conditions are defined by
50% FS flow with the EMI source at zero field strength.
14.1.8 Record these values in Table 2.
14.2 Interpretation of Results
14.2.1 The changes in flow columns in Table 2 give an
indication of the effect of EM susceptibility, both
radiated and conducted. If the effect is larger than can
be tolerated for the process in the fab, two steps may be
necessary. EM field strength and frequency
measurements should be made at the fab under normal
operating conditions. If EM measurements in the fab
match areas that cause unacceptable effects on the
MFC, shielding may be necessary to reduce the effect.
Shielding design is beyond the scope of this test
method.
15 Illustrations
Start
Set up Test
Apply Power
Allow Warm
Up
Purge With N2
Zero MFC and
Record Data
Set Up 50%
Flow of N2 and
Record Data
Initiate
Radiated EM
Testing
Set Frequency
and Record
Data
Repeat Until all
Frequencies
are Covered
Are all
Frequencies
Tested
Set Up for High
Frequency
Sweep
Frequency 50
KHz to 20 MHz
Any
Malfunctions
Locate
Frequency of
Malfunction
and Record
Set Up for
Higher
Frequencies
Set Frequency
and Record
Data
Are all
Frequencies
Tested
Sweep
Frequency 30
MHz to 200
MHz
Any
Malfunctions
Locate
Frequency of
Malfunction
and Record
Set Up for High
Frequency
Set Frequency
and record
Data
Are All
Frequencies
Tested
Sweep
Frequencu 300
MHz to 990
MHz
Yes
No
Yes
No
No
Yes
Yes
No
No
Yes
Figure 1
Flow Chart of Test Method
SEMI F53-0600 © SEMI 2000 8
Any
Malfunctions
End of Radiated
Testing
Initiate Conducted
Testing
Set Up Apparatus
Spike on "+" DC
Lead Tests
A.
Increase Spike
Amplitude and
Record Data
B.
Is MFC Digital
C.
Hold at Highest
Level for 5 Minutes
Locate Frequency
of Malfunction and
Record
D.
Spike on "+" DC
Lead
E.
Increase Spike
Amplitude and
Record Data
G.
Hold at Highest
Level for 5 Minutes
F.
Is MFC Digital
Spike on "-" DC
Lead
Repeat steps A-G
Spike on Control
Lead
H.
Apply Full Scale
Control Signal and
Increase Spike,
Record Data
J.
Hold at Highest
Level for 5 Minutes
I.
If Not Susceptible
and Digital
Apply Negative
Spike on Control
Leads
Repeat Steps H-J
End Test
Yes
No
Yes
No
Yes
No
Yes
No
Figure 1 (continued)
Flow Chart of Test Method